US4379022A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for maskless chemical machining
Assignee: International Business Machines Corp
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Filing: 1980-07-21
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Granted: 1983-04-05
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Expires: 2000-07-21
Abstract
Abstract A method for high resolution maskless chemical and electrochemical machining is described. Preferential etching results from exposing those regions where machining is sought to an energy beam. Such exposures can increase the etching rate in the case of electrochemical machining by a factor of 10 3 to 10 4 . Such enhancement is sufficient to make masking unnecessary.
Inventors
- 👤 Robert L. Melcher
- 👤 Lubomyr T. Romankiw
- 👤 Robert J. VON Gutfeld
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:46
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/60; H10P50/66; H10P50/663; H10P50/667; C; C23; C23F; C23F1/00; C23F1/02; C25; C25F; C25F3/00; C25F3/02; C25F3/14
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
106 words
A method of masklessly producing machined patterns by preferential chemical machining of regions of a surface of a workpiece comprising the following steps: contacting the surface with a chemical machining etching solution; and directing an energy beam having an intensity in the range from about 10 2 W/cm 2 to about 10 6 W/cm 2 onto the workpiece of sufficient intensity to heat only said regions of said surface to be machined locally with said surface in contact with said etching solution to promote enhanced etching of the surface to provide preferentially machined patterns in said regions heated by said beam where preferential machining is sought.
Claim 2
Independent Claim
106 words
A method of masklessly producing machined patterns by preferential chemical machining of regions of a surface of a workpiece comprising the following steps: contacting the surface with a chemical machining etching solution; and directing an energy beam having an intensity in the range from about 10 2 W/cm 2 to about 10 6 W/cm 2 onto the workpiece of sufficient intensity to heat only said regions of said surface to be machined locally with said surface in contact with said etching solution to promote enhanced etching of the surface to provide preferentially machined patterns in said regions heated by said beam where preferential machining is sought.
Claim 3
Dependent Claim
11 words
The method of claim 1 wherein said beam is laser generated.
Claim 4
Independent Claim
96 words
A method of chemically machining a surface of a workpiece preferentially, said method comprising the following steps: immersing said surface in a chemical machining etching solution; and directing a laser beam onto regions comprising a pattern to be formed on said workpiece to be machined, said beam having an intensity in the range from about 10 2 W/cm 2 to about 10 6 W/cm 2 sufficient to locally heat regions of the surface in a pattern and to promote enhanced etching of the surface in the pattern formed by said regions where preferential machining is sought.
Claim 5
Independent Claim
96 words
A method of chemically machining a surface of a workpiece preferentially, said method comprising the following steps: immersing said surface in a chemical machining etching solution; and directing a laser beam onto regions comprising a pattern to be formed on said workpiece to be machined, said beam having an intensity in the range from about 10 2 W/cm 2 to about 10 6 W/cm 2 sufficient to locally heat regions of the surface in a pattern and to promote enhanced etching of the surface in the pattern formed by said regions where preferential machining is sought.
Claim 6
Dependent Claim
12 words
The method of claim 2 or 3 wherein said beam is modulated.
Claim 7
Dependent Claim
31 words
The method of claim 2 or 3 wherein the thickness of the workpiece at the surface to be machined is not greater than 5 mil and said etching solution is alkaline.
Claim 8
Dependent Claim
32 words
The method of claim 2 or 3 wherein the thickness of the workpiece at the surface to be machined is not greater than 5 mil thickness and said etching solution is acidic.
Claim 9
Independent Claim
101 words
A method for masklessly producing machined patterns by preferential chemical machining of regions of a surface by contacting the surface with a chemical machining etching solution, the improvement comprising: directing a light beam onto said regions of said surface while said surface is in contact with said etching solution, said light beam having an intensity of greater than about 10 2 W/cm 2 to heat only said regions of said surface to provide preferentially machined patterns to be machined by said solution in order to increase the etching rate in said regions heated by said beam where preferential machining is sought.
Claim 10
Independent Claim
101 words
A method for masklessly producing machined patterns by preferential chemical machining of regions of a surface by contacting the surface with a chemical machining etching solution, the improvement comprising: directing a light beam onto said regions of said surface while said surface is in contact with said etching solution, said light beam having an intensity of greater than about 10 2 W/cm 2 to heat only said regions of said surface to provide preferentially machined patterns to be machined by said solution in order to increase the etching rate in said regions heated by said beam where preferential machining is sought.
Claim 11
Independent Claim
97 words
A method for chemical machining regions of a surface by contacting the surface with a chemical machining etching solution, the improvement comprising: immersing said surface in said etching solution, directing onto regions of said surface a light beam having an intensity of greater than about 10 2 W/cm 2 , said regions comprising a pattern to be formed on said surface to be machined said light beam serving to heat the said pattern of regions of said surface to be machined to increase the etching rate of said surface in said regions to provide preferentially machined patterns.
Claim 12
Independent Claim
97 words
A method for chemical machining regions of a surface by contacting the surface with a chemical machining etching solution, the improvement comprising: immersing said surface in said etching solution, directing onto regions of said surface a light beam having an intensity of greater than about 10 2 W/cm 2 , said regions comprising a pattern to be formed on said surface to be machined said light beam serving to heat the said pattern of regions of said surface to be machined to increase the etching rate of said surface in said regions to provide preferentially machined patterns.
Claim 13
Dependent Claim
31 words
A method in accordance with claim 1, 7, 3 or 8 wherein said etching solution comprises: 20 gm NaCl 2.5 ml concentrated H 2 SO 4 125 ml H 2 O.
Claim 14
Dependent Claim
76 words
A method in accordance with claim 1, 7, 3 or 8 wherein said beam comprises a krypton laser tuned to about 647.1 nm, using about 700 mW of light, focussed to a spot about 170 micrometers in diameter at about 3×10 3 W/cm 2 and said etching solution comprises: 20 gm NaCl 2.5 ml concentrated H 2 SO 4 125 ml H 2 O and the beam is moved at a rate of about 2 mm/sec.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-04-04 | 1986-10-04 | 1987-04-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-04-04 | 1990-10-04 | 1991-04-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-04-04 | 1994-10-04 | 1995-04-05 | $7700.00 | Window Closed / Lapsed |