Patent US4377633A successfully refreshed from Google Patents.
US4377633A
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Methods of simultaneous contact and metal lithography patterning
Assignee: International Business Machines Corp
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Filing: 1981-08-24
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Granted: 1983-03-22
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Expires: 2001-08-24
Abstract
Abstract This describes different methods of using a single photoresist layer to define both metal contact vias and metal lift-off areas on semiconductor integrated circuits. The methods use positive photoresist containing a small amount of base such as imidazole to provide a lift-off overhang when the resist is exposed and developed to provide a reversal image. One method includes the steps of exposing selected regions of a layer of photoresist deposited on the surface of an integrated circuit, developing said image to remove the exposed photoresist to form a positive image, etching, exposing other selected regions of said photoresist layer to a negative image, baking the layer of photoresist to decarboxylate and fix the negative image in said layer of photoresist rendering all remaining unexposed regions of the said layer of photoresist, alkali soluble removing the alkali soluble regions of said photoresist, depositing metallurgy over the surface of the circuit and then removing the negative image formed in the layer of photoresist. A different method uses similar steps but in a different order. This second method first exposes and fixes the negative image which is not developed. The positive image is then exposed and developed to leave either unexposed resist or negative image exposed resist regions. The previously unexposed resist is rendered soluble in alkali developer and removed. Metal deposition and lift-off steps complete the method.
Inventors
- 👤 Karen M. Abrahamovich
- 👤 Clifford J. Hamel
- 👤 Edward H. Payne
- 👤 Dean R. Weed
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 15:02
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2022; H; H10; H10P; H10P76/00; H10P76/20; H10P76/202; H10P76/204; H10P76/2041; Y; Y10; Y10S; Y10S430/00; Y10S430/153
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
51 words
A photolithographic method of processing a photoresist in which both positive and reversal image processes are sequentially carried out in a single layer of positive photoresist containing a basic material, each of said image processes comprising an exposure step and a development step performed in said single layer of positive photoresist.
Claim 2
Dependent Claim
51 words
A photolithographic method of processing a photoresist in which both positive and reversal image processes are sequentially carried out in a single layer of positive photoresist containing a basic material, each of said image processes comprising an exposure step and a development step performed in said single layer of positive photoresist.
Claim 3
Dependent Claim
69 words
A photolithographic process in which a first latent image is exposed and fixed in a layer of positive photoresist containing a basic material, a second image is exposed, developed and used to form a relief pattern in a layer of material on a substrate, the first image is developed to form a second relief image and is used to define a different pattern in a layer on the substrate.
Claim 4
Dependent Claim
69 words
A photolithographic process in which a first latent image is exposed and fixed in a layer of positive photoresist containing a basic material, a second image is exposed, developed and used to form a relief pattern in a layer of material on a substrate, the first image is developed to form a second relief image and is used to define a different pattern in a layer on the substrate.
Claim 5
Dependent Claim
151 words
A lithographic method in which both positive and reversal image processes are sequentially carried out in a single layer of photoresist comprising the steps of: applying, drying, exposing and developing a selected region of positive photoresist containing a basic material deposited on the surface of a body to provide a positive image defining a contact area on said surface, re-exposing the remaining photoresist with a negative mask defining a selected zone which includes the previously defined contact area, baking for a period of time to decarboxylate the decomposition products formed in the photoresist in the re-exposed zone, thus fixing the negative image in the photoresist, blanket exposing the entire body to render alkali soluble the remaining photoresist which has not previously been exposed, and developing, in a weak alkaline developer to remove said alkali soluble photoresist from the surface of the body leaving the re-exposed, baked decarboxylated photoresist on said surface.
Claim 6
Dependent Claim
151 words
A lithographic method in which both positive and reversal image processes are sequentially carried out in a single layer of photoresist comprising the steps of: applying, drying, exposing and developing a selected region of positive photoresist containing a basic material deposited on the surface of a body to provide a positive image defining a contact area on said surface, re-exposing the remaining photoresist with a negative mask defining a selected zone which includes the previously defined contact area, baking for a period of time to decarboxylate the decomposition products formed in the photoresist in the re-exposed zone, thus fixing the negative image in the photoresist, blanket exposing the entire body to render alkali soluble the remaining photoresist which has not previously been exposed, and developing, in a weak alkaline developer to remove said alkali soluble photoresist from the surface of the body leaving the re-exposed, baked decarboxylated photoresist on said surface.
Claim 7
Dependent Claim
49 words
The method of claim 3 which further includes the steps of depositing a metal layer on the exposed surface of said body and said re-exposed, baked, decarboxylated photoresist, and removing the remaining re-exposed, baked photoresist and any overlying metal to define a selected pattern of metal on said surface.
Claim 8
Dependent Claim
16 words
The method of claim 4 wherein said photoresist comprises a positive photoresist, with an imidazole base.
Claim 9
Dependent Claim
16 words
The method of claim 4 wherein said photoresist comprises a phenolic resin containing a quinone-diazide sensitizer.
Claim 10
Dependent Claim
19 words
The method of claim 6 wherein said selected region is developed with a 0.23 normal solution of potassium hydroxide.
Claim 11
Dependent Claim
18 words
The method of claim 7 wherein said weak alkaline developer is a 0.095 normal solution of potassium hydroxide.
Claim 12
Dependent Claim
13 words
The method of claim 8 wherein said baked photoresist is removed by N-methyl-2-pyrrolidone.
Claim 13
Dependent Claim
183 words
A photolithographic method of processing a semiconductor in which both positive and reversal image processes are sequentially carried out in a single layer of positive photoresist containing a basic material comprising the steps of: applying, drying, exposing and developing selected regions of a photoresist on the oxide coated surface of a semiconductor body to provide a positive image defining contact via areas in said oxide coating, etching said vias while protecting the unexposed remaining photoresist from exposure, re-exposing the remaining photoresist with a negative mask defining contact metallurgy in zones which include the previously defined vias, baking for a period of time to decarboxylate the decomposition products formed in the photoresist in the re-exposed zones, thus fixing the negative image in the photoresist, blanket exposing the entire body to render alkali soluble the remaining photoresist which have not previously been exposed, developing, in a weak alkaline developer to remove said alkali soluble photoresist the re-exposed, baked, decarboxylated photoresist in all areas where metallurgy is not wanted, and depositing metal on the semiconductor and removing the remaining re-exposed, baked, photoresist and any overlying metal.
Claim 14
Dependent Claim
183 words
A photolithographic method of processing a semiconductor in which both positive and reversal image processes are sequentially carried out in a single layer of positive photoresist containing a basic material comprising the steps of: applying, drying, exposing and developing selected regions of a photoresist on the oxide coated surface of a semiconductor body to provide a positive image defining contact via areas in said oxide coating, etching said vias while protecting the unexposed remaining photoresist from exposure, re-exposing the remaining photoresist with a negative mask defining contact metallurgy in zones which include the previously defined vias, baking for a period of time to decarboxylate the decomposition products formed in the photoresist in the re-exposed zones, thus fixing the negative image in the photoresist, blanket exposing the entire body to render alkali soluble the remaining photoresist which have not previously been exposed, developing, in a weak alkaline developer to remove said alkali soluble photoresist the re-exposed, baked, decarboxylated photoresist in all areas where metallurgy is not wanted, and depositing metal on the semiconductor and removing the remaining re-exposed, baked, photoresist and any overlying metal.
Claim 15
Dependent Claim
158 words
A lithographic method in which both positive and reversal image processes are sequentially carried out in a single layer of positive photoresist containing a basic material comprising the steps of: applying, drying and exposing selected portions of the photoresist deposited on the surface of a body, to form a negative image defining a contact area to be created on the surface, baking for a period of time to decarboxylate the decomposition products of the photoresist in the exposed area, thus fixing the negative image in the photoresist, exposing a contact zone within the defined contact area by exposing the area through a positive mask and developing said zone to expose selected regions on the surface of the body, blanket exposing the entire body to render alkali soluble all previously unexposed photoresist, treating the body with a week alkaline developer to remove the alkali soluble photoresist leaving the baked photoresist on said surface, and removing the remaining baked photoresist.
Claim 16
Dependent Claim
158 words
A lithographic method in which both positive and reversal image processes are sequentially carried out in a single layer of positive photoresist containing a basic material comprising the steps of: applying, drying and exposing selected portions of the photoresist deposited on the surface of a body, to form a negative image defining a contact area to be created on the surface, baking for a period of time to decarboxylate the decomposition products of the photoresist in the exposed area, thus fixing the negative image in the photoresist, exposing a contact zone within the defined contact area by exposing the area through a positive mask and developing said zone to expose selected regions on the surface of the body, blanket exposing the entire body to render alkali soluble all previously unexposed photoresist, treating the body with a week alkaline developer to remove the alkali soluble photoresist leaving the baked photoresist on said surface, and removing the remaining baked photoresist.
Claim 17
Dependent Claim
195 words
A photolithograhic method of processing a photoresist in which both positive and reversal image processes are sequentially carried out in a single layer of positive photoresist containing a basic material comprising the steps of: applying, drying and exposing selected portions of the photoresist on the oxide coated surface of a semiconductor body, through a negative mask defining contact areas to be created on the body, baking for a period of time to decarboxylate the decomposition products of the photoresist in the exposed areas, thus fixing the negative image in the photoresist, exposing contact zones within the defined contact areas by exposing the defined contact areas through a positive mask, and developing said zones to expose selected regions on the oxide coated surface, etching vias through said oxide in said regions while protecting the unexposed remaining photoresist from exposure, blanket exposing the entire body to render alkali soluble all previously unexposed photoresist, treating the body with a weak alkaline developer to remove the alkali soluble photoresist leaving the baked photoresist on said surface in all areas where metallurgy is not wanted, depositing metal on said body and removing the remaining baked photoresist and any overlying metal.
Claim 18
Dependent Claim
195 words
A photolithograhic method of processing a photoresist in which both positive and reversal image processes are sequentially carried out in a single layer of positive photoresist containing a basic material comprising the steps of: applying, drying and exposing selected portions of the photoresist on the oxide coated surface of a semiconductor body, through a negative mask defining contact areas to be created on the body, baking for a period of time to decarboxylate the decomposition products of the photoresist in the exposed areas, thus fixing the negative image in the photoresist, exposing contact zones within the defined contact areas by exposing the defined contact areas through a positive mask, and developing said zones to expose selected regions on the oxide coated surface, etching vias through said oxide in said regions while protecting the unexposed remaining photoresist from exposure, blanket exposing the entire body to render alkali soluble all previously unexposed photoresist, treating the body with a weak alkaline developer to remove the alkali soluble photoresist leaving the baked photoresist on said surface in all areas where metallurgy is not wanted, depositing metal on said body and removing the remaining baked photoresist and any overlying metal.
Claim 19
Dependent Claim
16 words
The method of claim 12 wherein said photoresist comprises a positive photoresist, with an imidazole base.
Claim 20
Dependent Claim
16 words
The method of claim 12 wherein said photoresist comprises a phenolic resin containing a quinone-diazide sensitizer.
Claim 21
Dependent Claim
19 words
The method of claim 14 wherein said selected region is developed with a 0.23 normal solution of potassium hydroxide.
Claim 22
Dependent Claim
18 words
The method of claim 15 wherein said weak alkaline developer is a 0.095 normal solution of potassium hydroxide.
Claim 23
Dependent Claim
13 words
The method of claim 16 wherein said baked photoresist is removed by N-methyl-2-pyrrolidone.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-03-21 | 1986-09-20 | 1987-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-03-21 | 1990-09-20 | 1991-03-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-03-21 | 1994-09-20 | 1995-03-22 | $7700.00 | Window Closed / Lapsed |