Patent US4352835A successfully refreshed from Google Patents.
US4352835A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Masking portions of a substrate
Assignee: AT&T Inc
•
Filing: 1981-07-01
•
Granted: 1982-10-05
•
Expires: 2001-07-01
Abstract
Abstract A removable mask (22) protects at least one portion of a substrate (10) during treatment such as irradiation thereof. To obtain mask (22), there is applied over said portion of substrate (10) a parting layer (44) of a metal selected from the group consisting of nickel, aluminum, indium and tin. Over the parting layer (44), there is applied the removable mask (22) of a material which is adherent and harmless to the parting layer (44) and is substantially impenetrable by the treatment. After irradiation, the parting layer (44) is treated with at least a detaching agent sufficiently to detach said parting layer (44) and the mask (22) from substrate (10). For proton bombardment of a substrate (10) which includes gallium arsenide, the parting layer (44) is preferably nickel, the mask is preferably gold and the detaching agent includes hydrochloric acid.
Inventors
- 👤 Walter R. Holbrook
- 👤 William A. Sponsler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 05:15
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/40; H10P76/408; H10P76/4085; C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/11; H10P30/00; H10P30/20; H10P30/202; H10P30/206; H10P30/208; H10P30/22; H10P76/405
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
89 words
A method of removably masking at least one portion of a substrate to protect said portion during irradiation of said substrate, comprising: applying over said portion, a parting layer of metal selected from the group consisting of nickel, aluminum, indium and tin, said layer being removable from the substrate by application of a detaching agent which is harmless to the substrate; and applying over said parting layer, a masking layer of material, said material being adherent and harmless to the parting layer and being substantially impenetrable by the radiation.
Claim 2
Independent Claim
89 words
A method of removably masking at least one portion of a substrate to protect said portion during irradiation of said substrate, comprising: applying over said portion, a parting layer of metal selected from the group consisting of nickel, aluminum, indium and tin, said layer being removable from the substrate by application of a detaching agent which is harmless to the substrate; and applying over said parting layer, a masking layer of material, said material being adherent and harmless to the parting layer and being substantially impenetrable by the radiation.
Claim 3
Dependent Claim
35 words
A method as in claim 1, further comprising, after the irradiation is completed: treating the parting layer with at least the detaching agent sufficiently to detach said parting layer and the mask from the substrate.
Claim 4
Dependent Claim
24 words
A method as in claim 2, wherein the substrate includes gallium arsenide, the parting layer is nickel and the detaching agent includes hydrochloric acid.
Claim 5
Dependent Claim
40 words
A method as in claim 2, wherein the substrate includes gallium arsenide, the parting layer is aluminum and the detaching agent includes by volume, about 85% phosphoric acid, about 5% nitric acid, about 5% acetic acid and about 5% water.
Claim 6
Dependent Claim
24 words
A method as in claim 2, wherein the substrate includes gallium arsenide, the parting layer is indium and the detaching agent includes hydrochloric acid.
Claim 7
Dependent Claim
33 words
A method as in claim 2, wherein the substrate includes gallium arsenide, the parting layer is tin and the detaching agent includes by volume, about 98% hydrochloric acid and about 2% hydrogen peroxide.
Claim 8
Dependent Claim
20 words
A method as in claim 3 or 4 or 5 or 6, wherein the masking layer includes the metal gold.
Claim 9
Independent Claim
16 words
A method as in clam 7, wherein irradiating the substrate includes bombarding the substrate with protons.
Claim 10
Independent Claim
16 words
A method as in clam 7, wherein irradiating the substrate includes bombarding the substrate with protons.
Claim 11
Independent Claim
95 words
A method of removably applying, over at least one portion of a substrate, a gold mask to protect said portion during irradiation of said substrate, comprising: applying over said portion, a parting layer of metal selected from the group consisting of nickel, aluminum, indium and tin, said layer being removable from the substrate by application of a detaching agent which is harmless to the substrate; and applying over said parting layer, a masking layer including the metal gold, said layer being adherent and harmless to the parting layer and being substantially impenetrable by the radiation.
Claim 12
Independent Claim
95 words
A method of removably applying, over at least one portion of a substrate, a gold mask to protect said portion during irradiation of said substrate, comprising: applying over said portion, a parting layer of metal selected from the group consisting of nickel, aluminum, indium and tin, said layer being removable from the substrate by application of a detaching agent which is harmless to the substrate; and applying over said parting layer, a masking layer including the metal gold, said layer being adherent and harmless to the parting layer and being substantially impenetrable by the radiation.
Claim 13
Dependent Claim
49 words
A method as in claim 9, further comprising, after the substrate irradiation is completed: treating the parting layer with at least the detaching agent sufficiently to detach said layer and the gold mask from the substrate, thereby obviating a need to treat the gold mask to achieve removal thereof.
References Cited (Backward Citations)
US3824133A
Cited
US4022927A
Cited
US4024293A
Cited
US4174219A
Cited
US4122215A
Cited
US4165395A
Cited
US4181755A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-10-04 | 1986-04-05 | 1986-10-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-10-04 | 1990-04-05 | 1990-10-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-10-04 | 1994-04-05 | 1994-10-05 | $7700.00 | Window Closed / Lapsed |