US4300149A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gold-tantalum-titanium/tungsten alloy contact for semiconductor devices and having a gold/tantalum intermetallic barrier region intermediate the gold and alloy elements
Assignee: International Business Machines Corp
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Filing: 1979-09-04
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Granted: 1981-11-10
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Expires: 1999-09-04
Abstract
Abstract In a conductor pattern for integrated circuits, the use of barrier layers of TiW and selected transition metals between gold and a silicon substrate, with the transition metal containing a supplemental barrier region or stratum of an intermetallic formed between it and the gold. Also comprehended is the use of a platinum silicide layer between the TiW layer and silicon for Schottky Barrier Diodes.
Inventors
- 👤 James K. Howard
- 👤 James F. White
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 14:52
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/425; H10D; H10D64/00; H10D64/60; H10D64/64; H10W20/44; H10W20/4403; H10W20/4432; H10W20/4435
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
65 words
A conductive contact structure for a semiconductor substrate comprising: (a) a contact layer, adjacent said substrate, of an alloy of titanium and tungsten, (b) a barrier layer over said contact layer, comprised stratum of a coextending barrier region of an intermetallic compound of gold and a transistion metal wherein said transition metal is selected from the group consisting of tantalum, hafnium, zirconium and niobium, and
Claim 2
Dependent Claim
65 words
A conductive contact structure for a semiconductor substrate comprising: (a) a contact layer, adjacent said substrate, of an alloy of titanium and tungsten, (b) a barrier layer over said contact layer, comprised stratum of a coextending barrier region of an intermetallic compound of gold and a transistion metal wherein said transition metal is selected from the group consisting of tantalum, hafnium, zirconium and niobium, and
Claim 3
Dependent Claim
9 words
(c) a layer of gold over said barrier layer.
Claim 4
Dependent Claim
9 words
(c) a layer of gold over said barrier layer.
Claim 5
Dependent Claim
19 words
The contact structure of claim 1 wherein said substrate is silicon and the contact layer is in contact therewith.
Claim 6
Dependent Claim
21 words
The contact structure of claim 2 including a Schottky Barrier contact of platinum silicide between said contact layer and said substrate.
Claim 7
Dependent Claim
16 words
The contact structure of claim 1 wherein said substrate is silicon and includes semiconductor devices therein.
Claim 8
Dependent Claim
20 words
The contact structure of claim 4 wherein said contact layer contacts an element of at least one of said devices.
Claim 9
Dependent Claim
22 words
The contact structure of claim 1 wherein said barrier layer comprises a layer of said transition metal containing said barrier region therein.
Claim 10
Dependent Claim
19 words
The contact structure of claim 6 wherein said substrate is silicon and the contact layer is in contact therewith.
Claim 11
Dependent Claim
21 words
The contact structure of claim 7 including a Schottky Barrier contact of platinum silicide between said contact layer and said substrate.
Claim 12
Dependent Claim
16 words
The contact structure of claim 6 wherein said substrate is silicon and includes semiconductor devices therein.
Claim 13
Dependent Claim
20 words
The contact structure of claim 9 wherein said contact layer contacts an element of at least one of said devices.
Claim 14
Dependent Claim
22 words
The contact structure of claim 1, 2, 3, 4, 5, 6, 7, 8, 9 or 10 wherein said transistion metal is tantalum.
References Cited (Backward Citations)
US3769688A
Cited
US4104697A
Cited
US4171528A
Cited
US4141022A
Cited
US4166279A
Cited
US4179533A
Cited
US4214256A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-11-09 | 1985-05-11 | 1985-11-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-11-09 | 1989-05-11 | 1989-11-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-11-09 | 1993-05-11 | 1993-11-10 | $7700.00 | Window Closed / Lapsed |