Patent US4279947A successfully refreshed from Google Patents.
US4279947A
Expired / Lapsed
US
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Deposition of silicon nitride
Assignee: Motorola Solutions Inc
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Filing: 1979-03-26
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Granted: 1981-07-21
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Expires: 1999-03-26
Abstract
Abstract Silicon nitride is pyrolytically deposited by the reaction of a halosilane with ammonia in an evacuated system. The process is particularly useful in providing uniform layers of silicon nitride on silicon wafers to be used in the fabrication of semiconductor devices.
Inventors
- 👤 Jon C. Goldman
- 👤 Larry D. McMillan
- 👤 James B. Price
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 18:34
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/34; C23C16/345
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
63 words
A method for the pyrolytic deposition of silicon nitride upon a plurality of substrates which comprises placing said plurality of substrates in a reactor tube with their broad faces perpendicular to the flow of a mixture of dichlorosilane and ammonia at a temperature of from about 650° C. to about 1000° C. in a vacuum of about 300 millitorr to about 10 Torr.
Claim 2
Independent Claim
63 words
A method for the pyrolytic deposition of silicon nitride upon a plurality of substrates which comprises placing said plurality of substrates in a reactor tube with their broad faces perpendicular to the flow of a mixture of dichlorosilane and ammonia at a temperature of from about 650° C. to about 1000° C. in a vacuum of about 300 millitorr to about 10 Torr.
Claim 3
Dependent Claim
17 words
The method of claim 1 where said temperature is from about 770° C. to about 780° C.
Claim 4
Dependent Claim
21 words
The method of claim 1 wherein the temperature is ramped up to about 100° C. along the direction of said flow.
Claim 5
Dependent Claim
23 words
The method of claim 1 wherein the temperature is ramped up from 10° C. to 50° C. along the direction of said flow.
References Cited (Backward Citations)
GB773702A
Cited
US3798061A
Cited
US3574014A
Cited
US3537891A
Cited
US3578495A
Cited
US3652324A
Cited
US3637423A
Cited
US3922467A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-07-20 | 1985-01-19 | 1985-07-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-07-20 | 1989-01-19 | 1989-07-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-07-20 | 1993-01-19 | 1993-07-21 | $7700.00 | Window Closed / Lapsed |