Patent US4268602A successfully refreshed from Google Patents.
US4268602A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photosensitive O-quinone diazide containing composition
Assignee: TORY INDUSTRIES Inc
•
Filing: 1978-12-05
•
Granted: 1981-05-19
•
Expires: 1998-12-05
Abstract
Abstract The present invention relates to a novel photosensitive composition. In particular, the present invention relates to a photosensitive resin composition suitable for use as a photoresist.
Inventors
- 👤 Tsuneo Yoshino
- 👤 Gentaro Ohbayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 14:45
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/023; G03F7/0233
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
205 words
A resin composition suitable for use as a photoresist, wherein solubility in an organic developing solvent varies with light exposure, an exposed portion remaining after development, consisting of an admixture comprising as an ingredient an organic resin obtained by homopolymerization of vinylically unsaturated monomers containing a basic amino group --NRR' which is no less basic than pyridyl or by copolymerization of said vinylically unsaturated monomers containing a basic amino group --NRR' no less basic than pyridyl with one or more ethylenically unsaturated monomers; wherein R is C 1-12 alkyl, C 6-11 phenyl, C 7-14 aralyl; C 3-6 cycloalkyl or C 6-12 cycloalkylalkyl having a cycloalkyl group of 3 to 6 carbon atoms and R' is independently any group defined by R; or wherein NRR' is pyridyl or a nonaromatic heteromonocycle composed of 3 to 10 nuclear atoms including no more than two heteroatoms selected from N,O and S of which at least one is N; wherein the nitrogen content of said NRR' group in said organic polymer is 0.01% to 10% by weight on the basis of the weight of said polymer; and as an additional ingredient one part by weight of a photosensitive orthoquinone diazide per 5 to 500 parts of said organic polymer.
Claim 2
Dependent Claim
205 words
A resin composition suitable for use as a photoresist, wherein solubility in an organic developing solvent varies with light exposure, an exposed portion remaining after development, consisting of an admixture comprising as an ingredient an organic resin obtained by homopolymerization of vinylically unsaturated monomers containing a basic amino group --NRR' which is no less basic than pyridyl or by copolymerization of said vinylically unsaturated monomers containing a basic amino group --NRR' no less basic than pyridyl with one or more ethylenically unsaturated monomers; wherein R is C 1-12 alkyl, C 6-11 phenyl, C 7-14 aralyl; C 3-6 cycloalkyl or C 6-12 cycloalkylalkyl having a cycloalkyl group of 3 to 6 carbon atoms and R' is independently any group defined by R; or wherein NRR' is pyridyl or a nonaromatic heteromonocycle composed of 3 to 10 nuclear atoms including no more than two heteroatoms selected from N,O and S of which at least one is N; wherein the nitrogen content of said NRR' group in said organic polymer is 0.01% to 10% by weight on the basis of the weight of said polymer; and as an additional ingredient one part by weight of a photosensitive orthoquinone diazide per 5 to 500 parts of said organic polymer.
Claim 3
Dependent Claim
53 words
A photosensitive resin composition of claim 1, wherein said amino group is ##STR3## wherein R is C 1-12 alkyl, C 6-12 phenyl; C 7-14 aralkyl; C 3-6 cycloalkyl; or C 6-12 cycloalkyl-alkyl having a cycloalkyl group of 3 to 6 carbon atoms; and R' is hydrogen or independently any group defined by R.
Claim 4
Dependent Claim
42 words
A photosensitive resin composition of claim 1, wherein said amino group is ##STR4## wherein R' is C 1-12 alkyl, C 6-11 phenyl; C 7-14 aralkyl; C 3-6 cycloalkyl; or C 6-12 cycloalkyl-alkyl having a cycloalkyl group of 3 to 6 carbon atoms.
References Cited (Backward Citations)
US3126281A
Cited
US3269837A
Cited
US3402044A
Cited
US3533796A
Cited
US3502470A
Cited
US3597202A
Cited
US3660097A
Cited
US3725356A
Cited
US3759711A
Cited
US3933885A
Cited
US4104070A
Cited
US4093461A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-05-18 | 1984-11-17 | 1985-05-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-05-18 | 1988-11-17 | 1989-05-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-05-18 | 1992-11-17 | 1993-05-19 | $7700.00 | Window Closed / Lapsed |