US4215005A
Expired / Lapsed
US
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Organic stripping compositions and method for using same
Assignee: Honeywell International Inc
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Filing: 1978-01-30
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Granted: 1980-07-29
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Expires: 1998-01-30
Abstract
Abstract Improved organic stripping compositions useful in removing polymeric organic substances, such as photoresists, from aluminized inorganic substrates, which comprise one or more organic sulfonic acids, such as linear dodecylbenzene-sulfonic acid, toluenesulfonic acid and phenolsulfonic acid, one or more organic solvents and, optionally, phenol. A hydrogen fluoride complex is incorporated into the composition comprising HF at about 5 to 300 pm by weight of fluoride per weight of composition and at least about 0.1 mols per mol of HF of a complexing agent, such as morpholine or dimethyl formamide, having a nitrogen with an unshared electron pair. The hydrogen fluoride complex reduces aluminum corrosion during stripping even after repeated use at high temperature as is common in industrial semiconductor photoresist stripping.
Inventors
- 👤 John E. Vander Mey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 06:03
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/426; C; C09; C09D; C09D9/00; C11; C11D; C11D7/00; C11D7/02; C11D7/04; C11D7/08; C11D7/22; C11D7/32; C11D7/3263; C11D7/34; C11D7/50; C11D7/5004; C11D7/5009
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
189 words
In an improved organic stripping composition for removing polymeric organic substances from aluminized inorganic substrates comprising at least one organic sulfonic acid of the formula R--SO.sub.3 H wherein R is an organic radical selected from the group consisting of alkyl containing 1 to 18 carbon atoms, monohydroxyalkyl containing 1 to 18 carbon atoms, aryl containing 6 to 10 carbon atoms, monoalkylaryl wherein the alkyl group contains 1 to 14 carbon atoms, dialkylaryl wherein each alkyl group contains 1 to 4 carbon atoms, monohydroxyaryl containing 6 to 10 carbon atoms, monoalkyl-hydroxyaryl containing 7 to 11 carbon atoms and monochloro-hydroxyaryl containing 6 to 10 carbon atoms, and at least one organic solvent, the improvement which comprises incorporating a hydrogen fluoride complex comprising HF at about 5 to about 300 ppm by weight of fluoride per weight of composition and at least about 0.1 mols per mol of HF of an organic complexing agent having a nitrogen with an unshared electron pair selected from the group consisting of heterocyclic aromatic and heterocyclic saturated compounds containing a cyclic nitrogen with an unshared electron pair, N-substituted and unsubstituted amides and substituted and unsubstituted anilines.
Claim 2
Dependent Claim
189 words
In an improved organic stripping composition for removing polymeric organic substances from aluminized inorganic substrates comprising at least one organic sulfonic acid of the formula R--SO.sub.3 H wherein R is an organic radical selected from the group consisting of alkyl containing 1 to 18 carbon atoms, monohydroxyalkyl containing 1 to 18 carbon atoms, aryl containing 6 to 10 carbon atoms, monoalkylaryl wherein the alkyl group contains 1 to 14 carbon atoms, dialkylaryl wherein each alkyl group contains 1 to 4 carbon atoms, monohydroxyaryl containing 6 to 10 carbon atoms, monoalkyl-hydroxyaryl containing 7 to 11 carbon atoms and monochloro-hydroxyaryl containing 6 to 10 carbon atoms, and at least one organic solvent, the improvement which comprises incorporating a hydrogen fluoride complex comprising HF at about 5 to about 300 ppm by weight of fluoride per weight of composition and at least about 0.1 mols per mol of HF of an organic complexing agent having a nitrogen with an unshared electron pair selected from the group consisting of heterocyclic aromatic and heterocyclic saturated compounds containing a cyclic nitrogen with an unshared electron pair, N-substituted and unsubstituted amides and substituted and unsubstituted anilines.
Claim 3
Dependent Claim
23 words
The composition of claim 1 wherein said hydrogen fluoride complex contains at least about 0.5 mols of complexing agent per mol of HF.
Claim 4
Dependent Claim
25 words
The composition of claim 2 wherein said hydrogen fluoride complex contains between about 0.5 and about 2.0 mols of complexing agent per mol of HF.
Claim 5
Dependent Claim
11 words
The composition of claim 1 wherein said complexing agent is morpholine.
Claim 6
Dependent Claim
12 words
The composition of claim 1 wherein said complexing agent is an N,N-dialkylamide.
Claim 7
Dependent Claim
11 words
The composition of claim 5 wherein said complexing agent is dimethylformamide.
Claim 8
Dependent Claim
26 words
The composition of claim 1 wherein said HF complex includes HF at about 100 to about 300 ppm by weight of fluorine per weight of composition.
Claim 9
Dependent Claim
25 words
The composition of claim 7 wherein said HF complex includes HF at about 150 to about 250 by weight of fluorine per weight of composition.
Claim 10
Dependent Claim
33 words
The composition of claim 1 wherein the organic sulfonic acid comprises a member selected from the group consisting of toluenesulfonic acid, cumenesulfonic acid, linear dodecylbenzenesulfonic acid, benzenesulfonic acid, phenolsulfonic acid and mixtures thereof.
Claim 11
Dependent Claim
173 words
The composition of claim 1 wherein the organic solvent is selected from the group consisting of aromatic hydrocarbons containing 6 to 14 carbon atoms, aliphatic hydrocarbons containing 1 to 30 carbon atoms, monoalkyl-substituted aromatic hydrocarbons containing 7 to 20 carbon atoms, dialkyl-substituted aromatic hydrocarbons containing 8 to 20 carbon atoms, trialkyl-substituted aromatic hydrocarbons containing 9 to 20 carbon atoms, chlorinated aliphatic hydrocarbons containing 1 to 14 carbon atoms and 1 to 4 chlorine atoms, chlorinated olefinic hydrocarbons containing 1 to 14 carbon atoms and 1 to 4 chlorine atoms, chlorinated aromatic hydrocarbons containing 6 to 12 carbon atoms and 1 to 4 chlorine atoms, aliphatic ketones containing 3 to 10 carbon atoms, monoalkylethers of ethylene glycol containing 3 to 10 carbon atoms, formamide, N-alkyl lactams containing 6 to 12 carbon atoms, N,N-dialkylalkanoylamides containing 3 to 10 carbon atoms, cyclic aliphatic sulfones containing 4 to 6 carbon atoms, carboxylic acids containing 1 to 4 carbon atoms, cresols containing 7 to 10 carbon atoms, and hydroxybenzenes containing 2 to 3 hydroxy groups and mixtures thereof.
Claim 12
Dependent Claim
24 words
The composition of claim 1 wherein the organic solvent is selected from the group consisting of octylbenzene, decylbenzene, dodecylbenzene, perchloroethylene, ortho-dichlorobenzene and mixtures thereof.
Claim 13
Dependent Claim
26 words
The composition of claim 1 in which phenol is not present and the organic sulfonic acid comprises about 20 to 80 weight percent of the composition.
Claim 14
Dependent Claim
38 words
The composition of claim 1 in which phenol is present in an amount of about 5 to 50 weight percent of the composition and the organic sulfonic acid comprises about 10 to 80 weight percent of the composition.
Claim 15
Dependent Claim
35 words
A method of stripping a polymeric organic substance from a aluminized inorganic substrate comprising contacting the polymeric organic substance with the composition of claim 1 at a temperature of about 20° to about 180° C.
Claim 16
Dependent Claim
37 words
The method of claim 14 wherein said polymeric organic substance is a photoresist which comprises a polymer selected from the group consisting of polyisoprene, polyvinyl cinnamate and phenol-formaldehyde resins, and wherein the inorganic substrate is silicon dioxide.
Claim 17
Dependent Claim
25 words
The method of claim 14 wherein said hydrogen fluoride complex contains between about 0.5 and about 2.0 moles of complexing agent per mole of HF.
Claim 18
Dependent Claim
11 words
The method of claim 14 wherein said complexing agent is morpholine.
Claim 19
Dependent Claim
12 words
The method of claim 14 wherein said complexing agent is an N,N-dialkylamide.
Claim 20
Dependent Claim
26 words
The method of claim 14 wherein said HF complex includes HF at about 100 to about 300 ppm by weight of fluorine per weight of composition.
Claim 21
Dependent Claim
33 words
The method of claim 14 wherein the organic sulfonic acid comprises a member selected from the group consisting of toluenesulfonic acid, cumenesulfonic acid, linear dodecylbenzenesulfonic acid, benzenesulfonic acid, phenolsulfonic acid and mixtures thereof.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-07-29 | 1984-01-28 | 1984-07-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-07-29 | 1988-01-28 | 1988-07-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-07-29 | 1992-01-28 | 1992-07-29 | $7700.00 | Window Closed / Lapsed |