US3871929A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polymeric etch resist strippers and method of using same
Assignee: Henley Group Inc
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Filing: 1974-01-30
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Granted: 1975-03-18
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Expires: 1994-01-30
Abstract
Abstract Strippers for removal of organic films and deposits, such as polymeric etch resists employed in the manufacture of semiconductors and microcircuits, comprising a surface active agent, phenol or acetic acid, phenol sulfonic acid and chlorinated hydrocarbon.
Inventors
- 👤 William R Schevey
- 👤 Frank J Kremers
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 20:39
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287; C; C09; C09D; C09D9/00; C09D9/005; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/426
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
76 words
A STRIPPER FOR POLYMERIC ORGANIC SUBSTANCES WHICH STRIPPER COMPRISES FROM ABOUT 25 TO ABOUT 35 WEIGHT PERCENT PHENOL OR ACETIC ACID, FROM ABOUT 10 TO ABOUT 30 WEIGHT PERCENT PHENOL SULFONIC ACID, FROM ABOUT 15 TO ABOUT 30 WEIGHT PERCENT OF A CHLORINATED HYDROCARBON WHICH BOILS BETWEEN ABOUT 120 TO ABOUT 210* CENTIGRADE, FROM ABOUT 25 TO 35 WEIGHT PERCENT OF A SUITABLE SURFACE ACTIVE AGENT HAVING A HLB NUMBER OF BETWEEN ABOUT 11.0 AND 12.5.
Claim 2
Dependent Claim
76 words
A STRIPPER FOR POLYMERIC ORGANIC SUBSTANCES WHICH STRIPPER COMPRISES FROM ABOUT 25 TO ABOUT 35 WEIGHT PERCENT PHENOL OR ACETIC ACID, FROM ABOUT 10 TO ABOUT 30 WEIGHT PERCENT PHENOL SULFONIC ACID, FROM ABOUT 15 TO ABOUT 30 WEIGHT PERCENT OF A CHLORINATED HYDROCARBON WHICH BOILS BETWEEN ABOUT 120 TO ABOUT 210* CENTIGRADE, FROM ABOUT 25 TO 35 WEIGHT PERCENT OF A SUITABLE SURFACE ACTIVE AGENT HAVING A HLB NUMBER OF BETWEEN ABOUT 11.0 AND 12.5.
Claim 3
Dependent Claim
25 words
The stripper of claim 1 wherein the polymeric organic substance is a photoresist which comprises a polymer selected from polyisoprene, polyvinyl cinamiate, and phenol-formaldehyde resins.
Claim 4
Dependent Claim
19 words
The stripper of claim 1 wherein the stripper comprises from about about 25 to about 35 weight percent phenol.
Claim 5
Dependent Claim
12 words
The stripper of claim 3 wherein the surface active agent is anionic.
Claim 6
Dependent Claim
13 words
The stripper of claim 4 wherein the surface active agent is an alkylarylsulfonate.
Claim 7
Dependent Claim
25 words
The stripper of claim 5 wherein the alkyl group in the alkylarylsulfonate has an average chain length between about 10 and about 14 carbon atoms.
Claim 8
Dependent Claim
14 words
The stripper of claim 6 wherein the surface active agent is linear dodecylbenzenesulfonic acid.
Claim 9
Dependent Claim
18 words
The stripper of claim 6 wherein the chlorinated hydrocarbon has a boiling point between about 150* to 190*C.
Claim 10
Dependent Claim
11 words
The stripper of claim 8 wherein the chlorinated hydrocarbon is dichlorobenzene.
Claim 11
Dependent Claim
16 words
The stripper of claim 8 wherein the chlorinated hydrocarbon is a mixture of orthodichlorobenzene and perchloroethylene.
Claim 12
Dependent Claim
33 words
A method of stripping a polymeric organic substance from a substrate comprising contacting the polymeric organic substance with the stripper of claim 1 at a temperature of from about 50* to about 180*C.
Claim 13
Dependent Claim
26 words
The method according to claim 11 wherein said polymeric organic substance is a photoresist which comprises a polymer selected from polyisoprene, polyvinyl cinnamiate and phenol-formaldehyde resins.
Claim 14
Dependent Claim
19 words
The method according to claim 12 wherein the stripper comprises from about 25 to about 35 weight percent phenol.
Claim 15
Dependent Claim
16 words
The method according to claim 13 wherein the temperature is between about 90* to 120* C.
Claim 16
Dependent Claim
31 words
The method according to claim 14 wherein the surface active agent is an alkylarylsulfonate wherein the alkyl group has an average chain length between about 10 and about 14 carbon atoms.
Claim 17
Dependent Claim
15 words
The method according to claim 15 wherein the surface active agent is linear dodecylbenzenesulfonic acid.
Claim 18
Dependent Claim
12 words
The method according to claim 16 wherein the chlorinated hydrocarbon is dichlorobenzene.
References Cited (Backward Citations)
US3582401A
Cited
US3813309A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-03-17 | 1978-09-16 | 1979-03-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-03-17 | 1982-09-16 | 1983-03-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-03-17 | 1986-09-16 | 1987-03-18 | $7700.00 | Window Closed / Lapsed |