US4212935A
Expired / Lapsed
US
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Method of modifying the development profile of photoresists
Assignee: International Business Machines Corp
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Filing: 1978-02-24
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Granted: 1980-07-15
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Expires: 1998-02-24
Abstract
Abstract The cross-sectional profile which is produced upon development of a layer of alkali soluble resin-diazo ketone photoresist is modified by treating the layer with a solvent or solvent mixture which is different from but miscible with the solvent or solvent mixture used to form the resist layer. The treating solvent is believed to dilute the resist solvent in a surface layer portion of the resist thereby modifying the alkaline developer solubility of this portion. Undercut resist profiles may be obtained by this method with normal optical exposure of the resist.
Inventors
- 👤 Benjamin J. Canavello
- 👤 Michael Hatzakis
- 👤 Jane M. Shaw
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 15:41
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/004; G03F7/022; G03F7/38
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
179 words
A method of producing a positive resist image having a sidewall profile with reduced overcut, which consists essentially of the following steps in sequence: depositing on a substrate surface a layer comprising a mixture of an alkali soluble resin, a light sensitive sensitizer having diazo and keto groups at adjacent positions on an aromatic ring and a first solvent; baking the layer at an elevated temperature to remove most of the solvent in the layer; imagewise exposing the layer to actinic light to alter the solubility characteristics of the exposed portion of the layer; treating the layer with a second solvent which is incapable of completely dissolving the layer and which is different from but miscible with the solvent still remaining in the layer so as to reduce the alkali solubility of only a surface region of the layer; and treating the layer with an alkali developer solution until the exposed portion of the layer has been completely dissolved away, the reduced alkali solubility of the surface region of the layer reducing the overcut of the developed sidewall profile.
Claim 2
Independent Claim
179 words
A method of producing a positive resist image having a sidewall profile with reduced overcut, which consists essentially of the following steps in sequence: depositing on a substrate surface a layer comprising a mixture of an alkali soluble resin, a light sensitive sensitizer having diazo and keto groups at adjacent positions on an aromatic ring and a first solvent; baking the layer at an elevated temperature to remove most of the solvent in the layer; imagewise exposing the layer to actinic light to alter the solubility characteristics of the exposed portion of the layer; treating the layer with a second solvent which is incapable of completely dissolving the layer and which is different from but miscible with the solvent still remaining in the layer so as to reduce the alkali solubility of only a surface region of the layer; and treating the layer with an alkali developer solution until the exposed portion of the layer has been completely dissolved away, the reduced alkali solubility of the surface region of the layer reducing the overcut of the developed sidewall profile.
Claim 3
Dependent Claim
29 words
The method of claim 1 wherein the alkali solubility of said surface region is sufficiently reduced to reduce the overcut of the developed sidewall profile to an undercut profile.
Claim 4
Dependent Claim
16 words
The method of claim 1 wherein said alkali soluble resin consists essentially of a phenolformaldehyde resin.
Claim 5
Dependent Claim
17 words
The method of claim 1 wherein said diazo ketone sensitizer consists essentially of naphthoquinone-(1,2)-diazide sulfonic acid esters.
Claim 6
Dependent Claim
12 words
The method of claim 4 wherein said first solvent comprises cellosolve acetate.
Claim 7
Dependent Claim
13 words
The method of claim 5 wherein said second solvent is an aromatic solvent.
Claim 8
Dependent Claim
29 words
The method of claim 6 wherein the alkali solubility of said surface region is sufficiently reduced to reduce the overcut of the developed sidewall profile to an undercut profile.
Claim 9
Dependent Claim
22 words
The method of claim 5 wherein said second solvent is selected from the group consisting of chloroform, trichloroethylene, kerosene and methyl cyclohexane.
Claim 10
Dependent Claim
23 words
The method of claim 6 wherein said second solvent is selected from the group consisting of chlorobenzene, bromobenzene, fluorobenzene, benzene, toluene and xylene.
Claim 11
Dependent Claim
15 words
The method of claim 9 wherein said alkaline developer is a buffered aqueous NaOH solution.
Claim 12
Dependent Claim
12 words
The method of claim 1 wherein said first solvent comprises cellosolve acetate.
Claim 13
Dependent Claim
13 words
The method of claim 11 wherein said second solvent is an aromatic solvent.
Claim 14
Dependent Claim
23 words
The method of claim 12 wherein said second solvent is selected from the group consisting of chlorobenzene, bromobenzene, fluorobenzene, benzene, toluene, and xylene.
Claim 15
Dependent Claim
22 words
The method of claim 11 wherein said second solvent is selected from the group consisting of chloroform, trichloroethylene, kerosene and methyl cyclohexane.
Claim 16
Dependent Claim
24 words
The method of claim 1 wherein said first solvent consists essentially of about 80% cellosolve acetate, about 10% butyl acetate and about 10% xylene.
Claim 17
Dependent Claim
25 words
The method of claim 1 wherein said layer is treated with said second solvent at an elevated temperature to shorten the period of said treatment.
Claim 18
Independent Claim
194 words
A method of producing a positive resist image having a sidewall profile with reduced overcut, which consists essentially of the following steps in sequence: depositing on a substrate surface a layer comprising a mixture of an alkali soluble resin, a light sensitive sensitizer having diazo and keto groups at adjacent positions on an aromatic ring and a first solvent; at least partly drying the layer in air to remove some of the first solvent; treating the layer with a second solvent which is incapable of completely dissolving the layer and which is different from but miscible with the solvent still remaining in the layer so as to reduce the alkali solubility of only a surface region of the layer; baking the layer at an elevated temperature to remove most of the solvents in the layer; imagewise exposing the layer to actinic light to alter the solubility characteristics of the exposed portion of the layer; and treating the layer with an alkali developer solution until the exposed portion of the layer has been completely dissolved away, the reduced alkali solubility of the surface region of the layer reducing the overcut of the developed sidewall profile.
Claim 19
Independent Claim
194 words
A method of producing a positive resist image having a sidewall profile with reduced overcut, which consists essentially of the following steps in sequence: depositing on a substrate surface a layer comprising a mixture of an alkali soluble resin, a light sensitive sensitizer having diazo and keto groups at adjacent positions on an aromatic ring and a first solvent; at least partly drying the layer in air to remove some of the first solvent; treating the layer with a second solvent which is incapable of completely dissolving the layer and which is different from but miscible with the solvent still remaining in the layer so as to reduce the alkali solubility of only a surface region of the layer; baking the layer at an elevated temperature to remove most of the solvents in the layer; imagewise exposing the layer to actinic light to alter the solubility characteristics of the exposed portion of the layer; and treating the layer with an alkali developer solution until the exposed portion of the layer has been completely dissolved away, the reduced alkali solubility of the surface region of the layer reducing the overcut of the developed sidewall profile.
Claim 20
Dependent Claim
29 words
The improvement of claim 17 wherein the alkali solubility of said surface region is sufficiently reduced to reduce the overcut of the developed sidewall profile to an undercut profile.
Claim 21
Dependent Claim
16 words
The improvement of claim 17 wherein said alkali soluble resin consists essentially of a phenolformaldehyde resin.
Claim 22
Dependent Claim
17 words
The improvement of claim 17 wherein said diazo ketone sensitizer consists essentially of naphthoquinone-(1,2)-diazide sulfonic acid esters.
Claim 23
Dependent Claim
13 words
The improvement of claim 20 wherein said second solvent is an aromatic solvent.
Claim 24
Dependent Claim
11 words
The method of claim 17 wherein said second solvent is xylene.
Claim 25
Independent Claim
179 words
A method of producing a positive resist image having a sidewall profile with reduced overcut, which consists essentially of the following steps in sequence: depositing on a substrate surface a layer comprising a mixture of an alkali soluble resin, a light sensitive sensitizer having diazo and keto groups at adjacent positions on an aromatic ring and a first solvent; baking the layer at an elevated temperature to remove most of the solvent in the layer; treating the layer with a second solvent which is incapable of completely dissolving the layer and which is different from but miscible with the solvent still remaining in the layer so as to reduce the alkali solubility of only a surface region of the layer; imagewise exposing the layer to actinic light to alter the solubility characteristics of the exposed portion of the layer; and treating the layer with an alkali developer solution until the exposed portion of the layer has been completely dissolved away, the reduced alkali solubility of the surface region of the layer reducing the overcut of the developed sidewall profile.
Claim 26
Independent Claim
179 words
A method of producing a positive resist image having a sidewall profile with reduced overcut, which consists essentially of the following steps in sequence: depositing on a substrate surface a layer comprising a mixture of an alkali soluble resin, a light sensitive sensitizer having diazo and keto groups at adjacent positions on an aromatic ring and a first solvent; baking the layer at an elevated temperature to remove most of the solvent in the layer; treating the layer with a second solvent which is incapable of completely dissolving the layer and which is different from but miscible with the solvent still remaining in the layer so as to reduce the alkali solubility of only a surface region of the layer; imagewise exposing the layer to actinic light to alter the solubility characteristics of the exposed portion of the layer; and treating the layer with an alkali developer solution until the exposed portion of the layer has been completely dissolved away, the reduced alkali solubility of the surface region of the layer reducing the overcut of the developed sidewall profile.
Claim 27
Dependent Claim
29 words
The improvement of claim 23 wherein the alkali solubility of said surface region is sufficiently reduced to reduce the overcut of the developed sidewall profile to an undercut profile.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-07-15 | 1984-01-14 | 1984-07-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-07-15 | 1988-01-14 | 1988-07-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-07-15 | 1992-01-14 | 1992-07-15 | $7700.00 | Window Closed / Lapsed |