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Epitaxial crystalline aluminium nitride

Assignee: National Research Development Corp UK
•
Filing: 1978-07-17
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Granted: 1980-02-19
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Expires: 1998-07-17
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Abstract

Abstract Material suitable for a surface acoustic wave device comprises an epitaxial film of aluminum nitride on the surface of a substrate of single crystal aluminum oxide, said surface having the crystallographic orientation 1100.

Inventors

  • 👤 Peter M. Dryburgh
  • 👤 Raymond R. Halstead

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 15:10
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/50; C04B41/5053; C04B41/5062; C04B41/5063; C04B41/80; C04B41/81; C04B41/85; C04B41/87; G; G10; G10K; G10K11/00; G10K11/36; Y; Y10; Y10T; Y10T428/00; Y10T428/31

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 33 words
Material suitable for a surface acoustic wave device comprising an epitaxial film of aluminum nitride on the surface of a substrate of single crystal aluminum oxide, said surface having the crystallographic orientation 1100.
Claim 2
Dependent Claim 33 words
Material suitable for a surface acoustic wave device comprising an epitaxial film of aluminum nitride on the surface of a substrate of single crystal aluminum oxide, said surface having the crystallographic orientation 1100.
Claim 3
Dependent Claim 32 words
A surface acoustic wave device comprising material as in claim 1 and interdigital transducers on said epitaxial film suitable for the launching and reception of surface acoustic waves in said epitaxial film.
Claim 4
Dependent Claim 13 words
Material as claimed in claim 1 and wherein said substrate is of alumina.
Claim 5
Dependent Claim 13 words
Material as claimed in claim 1 and wherein said substrate is of sapphire.

References Cited (Backward Citations)

US2874067A Cited
US3090876A Cited
US3189477A Cited
US3406043A Cited
US3664867A Cited
US3665225A Cited
US3676721A Cited
US3950596A Cited
US4126731A Cited
US4133925A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1983-02-18 1983-08-20 1984-02-19 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1987-02-18 1987-08-20 1988-02-19 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1991-02-18 1991-08-20 1992-02-19 $7700.00 Window Closed / Lapsed

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