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US4133702A
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Method of producing structured layers on a substrate being irradiated with two coherent particle beams
Assignee: Siemens AG
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Filing: 1977-08-11
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Granted: 1979-01-09
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Expires: 1997-08-11
Abstract
Abstract A monocrystalline layer having select structures therein is deposited on a substrate surface from a gas phase or via a molecular beam while the substrate surface is being irradiated with two coherent particle beams superimposed in relation to one another. The coherent particle beams are comprised of particles having an energy of about 10 keV and the substrate is positioned relative to the particle beams so that a maxima of an interference pattern formed by such particle beams is located on the substrate surface.
Inventors
- 👤 Eberhard Krimmel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 18:48
CPC Classifications
C; C30; C30B; C30B23/00; C30B23/02; C30B23/04; C30B23/08; Y; Y10; Y10S; Y10S438/00; Y10S438/914; Y10S438/925
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
84 words
A method of producing a structured monocrystalline layer on a substrate comprising: vapor-depositing a material onto a substrate surface from a source of said material; substantially simultaneously irradiating said substrate surface with at least two coherent particle beams superposed in relation to one another, each beam having particles with an energy of more than about 10 keV; and arranging said substrate surface in such a manner that the maxima of an interference pattern formed by said particle beams are located on said substrate surface.
Claim 2
Independent Claim
84 words
A method of producing a structured monocrystalline layer on a substrate comprising: vapor-depositing a material onto a substrate surface from a source of said material; substantially simultaneously irradiating said substrate surface with at least two coherent particle beams superposed in relation to one another, each beam having particles with an energy of more than about 10 keV; and arranging said substrate surface in such a manner that the maxima of an interference pattern formed by said particle beams are located on said substrate surface.
Claim 3
Dependent Claim
15 words
A method as defined in claim 1 wherein said coherent particle beams are ion beams.
Claim 4
Dependent Claim
25 words
A method as defined in claim 1 wherein said coherent particle beams are composed of particles of the material being vapor-deposited on the substrate surface.
Claim 5
Dependent Claim
43 words
A method as defined in claim 1 wherein an electrical field is maintained during the vapor-deposition of said material onto the substrate surface, said field having at least one component located in a plane containing the substrate surface on which deposition takes place.
Claim 6
Dependent Claim
16 words
A method as defined in claim 1 wherein said substrate is composed of an amorphous material.
Claim 7
Dependent Claim
16 words
A method as defined in claim 1 wherein said substrate is composed of a monocrystalline material.
Claim 8
Dependent Claim
23 words
A method as defined in claim 1 wherein an electron beam vaporization source is utilized as the source of the material being vapor-deposited.
Claim 9
Dependent Claim
27 words
A method as defined in claim 1 wherein said coherent particle beams contain particles which have a dopant effect in the material of the layer being vapor-deposited.
Claim 10
Dependent Claim
19 words
A method as defined in claim 2 wherein said coherent ion beams are produced via an electrostatic filament biprism.
Claim 11
Dependent Claim
23 words
A method as defined in claim 7 wherein said electron beam vapor source is utilized as the source of said coherent particle beams.
References Cited (Backward Citations)
US3520741A
Cited
US3582958A
Cited
US3619608A
Cited
US3709741A
Cited
US3833814A
Cited
US3999072A
Cited
US4035655A
Cited
US3924136A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-01-08 | 1982-07-10 | 1983-01-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-01-08 | 1986-07-10 | 1987-01-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-01-08 | 1990-07-10 | 1991-01-09 | $7700.00 | Window Closed / Lapsed |