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US4122407A
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Heterostructure junction light emitting or responding or modulating devices
Assignee: International Business Machines Corp
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Filing: 1976-04-06
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Granted: 1978-10-24
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Expires: 1996-04-06
Abstract
Abstract Practice of this disclosure reduces the concentration of intrinsic defects heretofore grown into semiconducting materials. Thereby, the operational lifetime is increased of heterostructure junction light emitting or responding or modulating devices which are fabricated in accordance with principles of the disclosure. Illustratively, the operational lifetime of a heterostructure junction laser device thus fabricated is extended. This improvement in operational lifetime of the device is attained by constraining growth, e.g., liquid phase epitaxial growth, of the several layers of semiconducting materials which form such a device to proceed only upon unreconstructed surface layers. Illustratively, such an unreconstructed surface is any one of the set of (311) surfaces of a crystalline semiconductor having diamond, zinc-blende, or chalcopyrite structure. In particular, the operational lifetime of GaAlAs double heterostructure junction lasers is increased by constraining the liquid phase epitaxial growth to proceed only upon a (311B), i.e., an As terminated (311), surface so that respective interfaces between layers of the resultant devices are (311) crystal planes.
Inventors
- 👤 James Alden Van Vechten
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 16:07
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/817; G; G02; G02F; G02F1/00; G02F1/01; G02F1/015; H01; H01S; H01S5/00; H01S5/30; H01S5/32; H10F; H10F10/00; H10F10/10; H10F10/16; H10H20/01; H10H20/011; H10H20/012; H10H20/013; H10H20/811; H10H20/822; H10H20/823; H10H20/824; H01S5/3202; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 70
Claim 1
Independent Claim
177 words
A single crystalline semiconductor heterostructure injection laser comprising: a monocrystalline substrate; an active layer of a first composition of single crystalline material, wherein radiative recombination of injected carriers primarily occurs; a carrier and light confining layer on one of the two sides respectively of said active layer, having a second compositin of single crystalline material, the respective interface between each confining layer and the active layer being a crystalline plane which does not reconstruct; an additional single crystal transition layer adjacent to said confining layer, the planar interface therebetween being a crystalline plane which does not reconstruct, the several said layers being disposed in epitaxial relationship from said monocrystalline substrate which is so oriented that its normal surface on which the several said layers are disposed in epitaxial relationship is a non-reconstructing crystalline surface; electrical contact means for causing suitable injection current of electrons and holes to be injected into the active layer to produce recombination therein; and feedback means to produce laser oscillations in the structure when an injection current exceeding a threshold is applied thereto.
Claim 2
Dependent Claim
177 words
A single crystalline semiconductor heterostructure injection laser comprising: a monocrystalline substrate; an active layer of a first composition of single crystalline material, wherein radiative recombination of injected carriers primarily occurs; a carrier and light confining layer on one of the two sides respectively of said active layer, having a second compositin of single crystalline material, the respective interface between each confining layer and the active layer being a crystalline plane which does not reconstruct; an additional single crystal transition layer adjacent to said confining layer, the planar interface therebetween being a crystalline plane which does not reconstruct, the several said layers being disposed in epitaxial relationship from said monocrystalline substrate which is so oriented that its normal surface on which the several said layers are disposed in epitaxial relationship is a non-reconstructing crystalline surface; electrical contact means for causing suitable injection current of electrons and holes to be injected into the active layer to produce recombination therein; and feedback means to produce laser oscillations in the structure when an injection current exceeding a threshold is applied thereto.
Claim 3
Dependent Claim
15 words
A laser as set forth in claim 1 wherein said feedback means includes mirror surfaces.
Claim 4
Dependent Claim
93 words
A semiconductor heterostructure light emitting device comprising: a single crystalline substrate of a first composition and conductivity type; an epitaxially related single crystalline layer of composition different from said first composition disposed an said substrate with planar interfaces therebetween, said planar interfaces between the single crystalline layers being non-reconstructing planes; a p-n junction formed by two of said layers and said substrate which provides injected minority carriers in order to produce radiative recombination in said device; and electrical contact means for providing a suitable current of injected carriers to sustain the radiative recombination.
Claim 5
Dependent Claim
93 words
A semiconductor heterostructure light emitting device comprising: a single crystalline substrate of a first composition and conductivity type; an epitaxially related single crystalline layer of composition different from said first composition disposed an said substrate with planar interfaces therebetween, said planar interfaces between the single crystalline layers being non-reconstructing planes; a p-n junction formed by two of said layers and said substrate which provides injected minority carriers in order to produce radiative recombination in said device; and electrical contact means for providing a suitable current of injected carriers to sustain the radiative recombination.
Claim 6
Dependent Claim
19 words
The heterostructure light emitting device of claim 3 wherein the compositions chosen have the diamond, zinc-blende or chalcopyrite structure.
Claim 7
Dependent Claim
21 words
The heterostructure light emitting device of claim 4 wherein said interfaces are of the form <N11> with N at least 2.
Claim 8
Dependent Claim
14 words
The heterostructure light emitting diode of claim 5 wherein the interfaces are <311> interfaces.
Claim 9
Dependent Claim
14 words
The semiconductor heterostructure light emitting device of claim 4 wherein the interfaces are <310>.
Claim 10
Dependent Claim
96 words
A semiconductor heterostructure photovoltaic converter comprising: a single crystalline substrate of a first composition and conductivity type; an epitaxially related single crystalline layer disposed on said substrate of composition different from said first composition with a planar interface respectively therebetween, the planar interface between the single crystalline layers being a non-reconstructing plane; at least one of the said layers being of opposite conductivity type from said substrate to provide voltage and current generating means when light is incident on the layers; and electrical contact means for connecting the generated voltage and current to an external circuit.
Claim 11
Dependent Claim
96 words
A semiconductor heterostructure photovoltaic converter comprising: a single crystalline substrate of a first composition and conductivity type; an epitaxially related single crystalline layer disposed on said substrate of composition different from said first composition with a planar interface respectively therebetween, the planar interface between the single crystalline layers being a non-reconstructing plane; at least one of the said layers being of opposite conductivity type from said substrate to provide voltage and current generating means when light is incident on the layers; and electrical contact means for connecting the generated voltage and current to an external circuit.
Claim 12
Dependent Claim
18 words
The heterostructure photovoltaic converter of claim 8 wherein the compositions chosen have the diamond, zinc-blende or chalcopyrite structure.
Claim 13
Dependent Claim
20 words
The heterostructure photovoltaic converter of claim 9 wherein said interfaces are of the form <N11> with N at least 2.
Claim 14
Dependent Claim
13 words
The heterostructure photovoltaic converter of claim 10 wherein the interfaces are <211> interfaces.
Claim 15
Dependent Claim
13 words
The semiconductor heterostructure photovoltaic converter of claim 9 wherein the interfaces are <310>.
Claim 16
Dependent Claim
157 words
Heterostructure junction device, comprising: a single crystalline substrate layer; an active layer supported by said substrate having single crystalline structure with oppositely disposed parallel end faces which are each at least partially reflective at light, wherein carrier recombination primarily occurs in said device, and having first composition from a semiconductor multicomponent system of a given conductivity type; a first boundary layer having single crystalline structure on one side of said active layer and forming a first interface therewith of crystalline orientation which has a nonsingular local minimum value of the surface energy per unit area, for carrier injection and carrier confinement and for optical confinement in said active layer, and having second composition different than said first composition of opposite conductivity type than said active layer from said semiconductor multicomponent system; and first electrical contact means for said active layer, and second electrical contact means for said boundary layer, for communicating current to and from said device.
Claim 17
Dependent Claim
157 words
Heterostructure junction device, comprising: a single crystalline substrate layer; an active layer supported by said substrate having single crystalline structure with oppositely disposed parallel end faces which are each at least partially reflective at light, wherein carrier recombination primarily occurs in said device, and having first composition from a semiconductor multicomponent system of a given conductivity type; a first boundary layer having single crystalline structure on one side of said active layer and forming a first interface therewith of crystalline orientation which has a nonsingular local minimum value of the surface energy per unit area, for carrier injection and carrier confinement and for optical confinement in said active layer, and having second composition different than said first composition of opposite conductivity type than said active layer from said semiconductor multicomponent system; and first electrical contact means for said active layer, and second electrical contact means for said boundary layer, for communicating current to and from said device.
Claim 18
Dependent Claim
15 words
Heterostructure junction device as set forth in claim 13 which is a light emitting laser.
Claim 19
Dependent Claim
43 words
Heterostructure junction device as set forth in claim 13 wherein said active layer and said first boundary layer are single crystalline cubic structure, and said first interface is selected from the class of crystal surface <N11 > where N is at least 2.
Claim 20
Dependent Claim
16 words
Heterostructure junction device as set forth in claim 15 wherein said selected interface is <311 >.
Claim 21
Dependent Claim
15 words
Heterostructure junction device as set forth in claim 16 having diamond, zinc-blende or chalcopyrite structure.
Claim 22
Dependent Claim
68 words
Heterostructure junction device as set forth in claim 17 wherein said active layer has the composition A = a.sub.1-x b.sub.x c.sub.1-y d.sub.y, and said first boundary layer has the composition 6 = a.sub.1-x-v b.sub.x+v c.sub.1-y-u d.sub.y+u, where a and b are elements from group IIIA, c and d are elements from group V and wherein: a = Ga, b = Al, c = As, d = P; and
Claim 23
Dependent Claim
5 words
0 ≦ x ≲ 0.4,
Claim 24
Dependent Claim
5 words
0 ≦ x ≲ 0.4,
Claim 25
Dependent Claim
4 words
15 ≲ v ≲0.8,
Claim 26
Dependent Claim
4 words
15 ≲ v ≲0.8,
Claim 27
Dependent Claim
5 words
0 ≦ y ≲ 0.2,
Claim 28
Dependent Claim
5 words
0 ≦ y ≲ 0.2,
Claim 29
Dependent Claim
5 words
0 ≦ u ≲ 0.2.
Claim 30
Dependent Claim
5 words
0 ≦ u ≲ 0.2.
Claim 31
Dependent Claim
88 words
Heterostructure junction device as set forth in claim 17 wherein said active layer has the composition A = a.sub.1-x b.sub.x c.sub.1-y d.sub.y, and said first boundary layer has the composition G = a.sub.1-x-v b.sub.x+v c.sub.1-y-u d.sub.y+u, where a and b are elements from group IIB, c and d are elements from group VI and wherein: a = Hg, b = Cd, c = Te, d = Se; and 0.2 ≲ x ≲ 0.6, 0.2 ≲ v ≲ 0.4, 0 ≲ y ≲ 0.2, 0 ≲ u ≲ 0.2.
Claim 32
Dependent Claim
34 words
Heterostructure junction device as set forth in claim 13 wherein there is included voltage means connected to said first electrical contact means and said second electrical contact means for establishing current in said device.
Claim 33
Dependent Claim
90 words
Heterostructure junction device as set forth in claim 13 wherein there is included as part of said first electrical contact means a second boundary layer having single crystalline structure on the other side of said active layer and forming a second interface therewith of crystalline orientation which has a nonsingular local minimum value of the surface energy per unit area, for carrier injection and carrier confinement and for optical confinement in said active layer, having third composition of same conductivity type as said active layer from said semiconductor multicomponent system.
Claim 34
Dependent Claim
33 words
Heterostructure junction device as set forth in claim 21 wherein said first and second interfaces consist of an interface selected from the class of intefaces <N11 > where N is at least 2.
Claim 35
Dependent Claim
15 words
Heterostructure junction device as set forth in claim 21 having diamond, zinc-blende or chalcopyrite structure.
Claim 36
Dependent Claim
16 words
Heterostructure junction device as set forth in claim 23 wherein said selected interface is <311 >.
Claim 37
Dependent Claim
75 words
Heterostructure junction device as set forth in claim 24 wherein said active layer has the composition Ga.sub.x Al.sub.1-x As.sub.1-t p.sub.t, said first boundary layer has the composition Ga.sub.x+y Al.sub.1-x-y As.sub.1-u P.sub.u, and said second boundary layer has the composition Ga.sub.x+z Al.sub.1-x-z As.sub.1-v P.sub.v, wherein: 0 ≦ x ≲ 0.4, 0.15 ≲ y ≲ 0.45, 0.15 ≲ z ≲ 0.45, 0 ≦ t ≲ 0.2, 0 ≦ u ≲ 0.2, and 0 ≦ v ≲ 0.2.
Claim 38
Dependent Claim
54 words
Heterostructure junction device as set forth in claim 21 wherein said second electrical contact means for said first boundary layer includes a substrate layer on said first boundary layer on the side thereof opposite from said active layer having fourth composition of same conductivity type as said active layer from said semiconductor multicomponent system.
Claim 39
Dependent Claim
43 words
Heterostructure device as set forth in claim 26 wherein said substrate layer is single crystalline structure and forms a third interface with said first boundary layer of crystalline orientation which has a nonsingular local minimum value of the surface energy per unit area.
Claim 40
Dependent Claim
33 words
Heterostructure junction device as set forth in claim 27 wherein said first, second and third interfaces consist of an interface selected from the class of interfaces <N11>, where N is at least 2.
Claim 41
Dependent Claim
15 words
Heterostructure junction device as set forth in claim 28 wherein said selected interface is <311>.
Claim 42
Dependent Claim
15 words
Heterostructure junction device as set forth in claim 29 having diamond, zinc-blende or chalcopyrite structure.
Claim 43
Dependent Claim
90 words
Heterostructure junction device as set forth in claim 27 wherein said active layer has composition Ga.sub.x Al.sub.1-x As.sub.1-t P.sub.t, said first boundary layer has composition Ga.sub.x+y Al.sub.1-x-y As.sub.1-u P.sub.u, said second boundary layer has composition Ga.sub.x+z Al.sub.1-x-z As.sub.1-v P.sub.v, and substrate layer has composition Ga.sub.1-m Al.sub.m As.sub.1-n P.sub.n, wherein: 0 ≦ x ≲ 0.4, 0.15 ≲ y ≲ 0.45, 0.15 ≲ z ≲ 0.45, 0 ≦ t ≲ 0.2, 0 ≦ u ≲ 0.2, 0 ≦ v ≲ 0.2, 0 ≦ m ≦ 1, and 0 ≦ n ≦ 1.
Claim 44
Dependent Claim
47 words
Heterostructure junction device as set forth in claim 21 wherein said first electrical contact means for said active layer further includes a capping layer on said second boundary layer having fifth composition from said semiconductor multicomponent system for environmentally protecting and electrically contacting said second boundary layer.
Claim 45
Dependent Claim
44 words
Heterostructure junction device as set forth in claim 32 wherein said capping layer is single crystalline structure and forms a fourth interface with said second boundary layer of crystalline orientation which has a nonsingular local minimum value of the surface energy per unit area.
Claim 46
Dependent Claim
33 words
Heterostructure junction device as set forth in claim 33 wherein said first, second, third, fourth and fifth interfaces consist of an interface selected from the class <N11> where N is greater than 2.
Claim 47
Dependent Claim
15 words
Heterostructure junction device as set forth in claim 34 wherein said selected interface is <311>.
Claim 48
Dependent Claim
15 words
Heterostructure junction device as set forth in claim 35 having diamond, zinc-blende or chalcopyrite structure.
Claim 49
Dependent Claim
30 words
Heterostructure junction device as set forth in claim 36 wherein said capping layer has composition Ga.sub.1-m Al.sub.m As.sub.1-n p.sub.n where m and n are less than or equal to 1.
Claim 50
Dependent Claim
38 words
Heterostructure junction device as set forth in claim 32 wherein said first electrical contact means and said second electrical contact means include respectively a metallic layer on said capping layer, and a metallic layer on said substrate layer.
Claim 51
Dependent Claim
34 words
Heterostructure junction device as set forth in claim 38 wherein there is included voltage means connected to said first electrical contact means and said second electrical contact means for establishing current in said device.
Claim 52
Dependent Claim
111 words
Heterostructure junction device as set forth in claim 13 wherein said first electrical contact means and said second electrical contact means include respectively a second boundary layer on the other side of said active layer and forming a second interface therewith of crystalline orientation which has a nonsingular local minimum value of the surface energy per unit area, for carrier injection and carrier confinement and for optical confinement in said active layer, and having second composition different than said first composition of opposite conductivity type than said active layer from said semiconductor multicomponent system a metallic layer on said second boundary layer, and a metallic layer on said first boundary layer.
Claim 53
Dependent Claim
34 words
Heterostructure junction device as set forth in claim 40 wherein there is included voltage means connected to said first electrical contact means and said second electrical contact means for establishing current in said device.
Claim 54
Dependent Claim
110 words
Heterostructure junction device as set forth in claim 13 wherein said first electrical contact means and said second electrical contact means include respectively a second boundary layer on the other side of said active layer and forming a second interface therewith of crystalline orientation which has a nonsingular local minimum value of the surface energy per unit area, for carrier injection and carrier confinement and for optical confinement in said active layer, and having second composition different than said first composition of opposite conductivity type than said active layer from said semiconductor multicomponent system a metallic layer on said second boundary layer, and a metallic layer on said substrate layer.
Claim 55
Dependent Claim
34 words
Heterostructure junction device as set forth in claim 42 wherein there is included voltage means connected to said first electrical contact means and said second electrical contact means for establishing current in said device.
Claim 56
Independent Claim
110 words
A device comprising: a single crystalline substrate a p-type semiconductor layer and an n-type semiconductor layer forming one semiconductor p-n junction therebetween; means for conducting electricity to and from both the p-type and the n-type semiconducting layers via metallic conductors; means for passing light in or out of said p-n junction; and a plurality of semiconducting layers on said substrate disposed in epitaxial relationship, including those two which form the p-n junction, bounded by planes all approximately parallel to one another and oriented in a crystalline direction corresponding to a nonsingular local minimum of the surface energy per unit area as a function of orientation for the semiconducting materials employed.
Claim 57
Independent Claim
110 words
A device comprising: a single crystalline substrate a p-type semiconductor layer and an n-type semiconductor layer forming one semiconductor p-n junction therebetween; means for conducting electricity to and from both the p-type and the n-type semiconducting layers via metallic conductors; means for passing light in or out of said p-n junction; and a plurality of semiconducting layers on said substrate disposed in epitaxial relationship, including those two which form the p-n junction, bounded by planes all approximately parallel to one another and oriented in a crystalline direction corresponding to a nonsingular local minimum of the surface energy per unit area as a function of orientation for the semiconducting materials employed.
Claim 58
Dependent Claim
14 words
A device as set forth in claim 44 which is a light emitting device.
Claim 59
Dependent Claim
38 words
A semiconductor device as set forth in claim 44 wherein radiative recombination of injected minority carriers occurs primarily in one of said p-type and said n-type semiconductor layers, said one semiconductor layer being denoted as the active layer.
Claim 60
Dependent Claim
71 words
A semiconductor device as set forth in claim 46 wherein the layer on the opposite side of the p-n junction from said active layer is of a composition having a larger fundamental band gap and lower optical index of refraction than that of the active layer so that the benefits of the reflection both of carriers and of emitted light back into said active layer from the p-n junction are obtained.
Claim 61
Dependent Claim
66 words
A semiconductor device as set forth in claim 46 wherein the layers on both sides of said active layer are of compositions having larger fundamental band gaps and lower optical indexes of refraction than that of the active layer so that the benefits of the reflection both of carriers and of emitted light back into the active layer from the layers on either side, are obtained.
Claim 62
Dependent Claim
120 words
A semiconductor double heterostructure optical modulator device as set forth in claim 44 employing the electrooptic effect under reverse bias of said p-n junction wherein one of the layers meeting at said p-n junction, which is denoted the guiding layer, is composed of material having a larger optical index of refraction than both layers on either side of said guiding layer, these two layers being denoted the confining layers, so that light entering said device through facets perpendicular to the planes bonunding said layers is confined by total internal reflection to the guiding layer and may have its axis of polarization rotated by application of said reverse bias voltage to said p-n junction through the action of said electrooptic effect.
Claim 63
Dependent Claim
12 words
A device as set forth in claim 49 said facets are cleaved.
Claim 64
Dependent Claim
80 words
A semiconductor light responding device as set forth in claim 44 wherein light is caused to pass through said semiconducting layers and one of the two electrical contacts to said p-n junction with a component at approximately normal incidence so that electron-hole pairs created by the absorption of said light in the region of said p-n junction are separated to either side of said junction and conducted away from said device via said electrical conductors as a photoinduced electrical current.
Claim 65
Dependent Claim
17 words
A light responding device as set forth in claim 51 wherein said device is a photovoltaic device.
Claim 66
Dependent Claim
15 words
A light responding device as set forth in claim 51 which is a photovoltaic device.
Claim 67
Dependent Claim
15 words
A light responding device as set forth in claim 51 which is a solar cell.
Claim 68
Dependent Claim
14 words
A light responding device as set forth in claim 51 is a photodetector device.
Claim 69
Dependent Claim
14 words
A device as set forth in claim 44 which is a light responding device.
Claim 70
Dependent Claim
14 words
A device as set forth in claim 44 which is a light modulating device.
References Cited (Backward Citations)
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US3950195A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-10-23 | 1982-04-24 | 1982-10-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-10-23 | 1986-04-24 | 1986-10-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-10-23 | 1990-04-24 | 1990-10-24 | $7700.00 | Window Closed / Lapsed |