Patent US4091406A successfully refreshed from Google Patents.
US4091406A
Expired / Lapsed
US
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Combination glass/low temperature deposited Siw Nx Hy O.sub.z
Assignee: RCA Corp
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Filing: 1976-11-01
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Granted: 1978-05-23
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Expires: 1996-11-01
Abstract
Abstract A semiconductor device including a body of semiconductor material with a metallic conductor disposed thereon has a combination glass/low-temperature-(typically 300° C) deposited Si w N x H y O z passivating overcoat with improved crack and corrosion resistance. A primary passivating layer including Si 3 N 4 is between the semiconductor surface and the metallic conductor, and the glass is formed over the metallic conductor, with the low-temperature-deposited nitride over the glass.
Inventors
- 👤 William Newman Lewis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 12:50
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/43; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10W20/00; H10W20/40; H10W20/41; H10W20/425; H10W20/44; H10W20/4403; H10W20/4432; H10W20/45; H10W20/48; Y; Y10; Y10S; Y10S148/00; Y10S148/113; Y10S148/114
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
126 words
In a semiconductor device having a body of semiconductor material having a surface, a primary passivating layer of insulating material disposed on said surface, said primary passivating layer including a layer of silicon nitride (Si 3 N 4 ), a metallic conductor disposed thereon and a passivating overcoat including a glass layer disposed over said conductor, the improvement comprising said passivating overcoat further including a low-temperature-deposited nitride layer disposed over said glass layer, said low-temperature-deposited nitride layer comprising a chemical compound having the formula Si w N x H y O z , wherein w, x, y and z are integers other than zero, and being deposited at a temperature below the eutectic temperature at which said metallic conductor begins to alloy with said semiconductor material.
Claim 2
Dependent Claim
126 words
In a semiconductor device having a body of semiconductor material having a surface, a primary passivating layer of insulating material disposed on said surface, said primary passivating layer including a layer of silicon nitride (Si 3 N 4 ), a metallic conductor disposed thereon and a passivating overcoat including a glass layer disposed over said conductor, the improvement comprising said passivating overcoat further including a low-temperature-deposited nitride layer disposed over said glass layer, said low-temperature-deposited nitride layer comprising a chemical compound having the formula Si w N x H y O z , wherein w, x, y and z are integers other than zero, and being deposited at a temperature below the eutectic temperature at which said metallic conductor begins to alloy with said semiconductor material.
Claim 3
Dependent Claim
23 words
A semiconductor device as defined in claim 1 wherein said low-temperature-deposited nitride layer has a thickness of between about 500A and about 15,000A.
Claim 4
Dependent Claim
26 words
A semiconductor device as defined in claim 1 wherein said glass layer is phosphosilicate glass and has a thickness of between about 3,000A and about 30,000A.
Claim 5
Dependent Claim
16 words
A semiconductor device as defined in claim 1 wherein said conductor comprises a layer of aluminum.
Claim 6
Dependent Claim
41 words
A semiconductor device as defined in claim 1 wherein said conductor comprises a first layer of titanium, a second layer of one of platinum and palladium, and a third layer of gold, said gold layer being adjacent to said glass layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-05-22 | 1981-11-21 | 1982-05-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-05-22 | 1985-11-21 | 1986-05-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-05-22 | 1989-11-21 | 1990-05-23 | $7700.00 | Window Closed / Lapsed |