US4072544A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Growth of III-V layers containing arsenic, antimony and phosphorus
Assignee: AT&T Inc
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Filing: 1977-03-29
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Granted: 1978-02-07
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Expires: 1997-03-29
Abstract
Abstract Gallium arsenide antimonide phosphide (GaAsSbP) has been successfully grown on a gallium arsenide substrate by liquid phase epitaxy. A critical amount of phosphorus initially in growth solution is depleted with consequent grading of lattice constant and bandgap in the epitaxially grown layer. The substrate and graded layer as a subassembly are well suited for use in electronic devices such as double heterostructure lasers, light-emitting diodes, Schottky barrier diodes, and p-n junction photodiodes in the near-infrared low loss region of optical fibers.
Inventors
- 👤 John C. DeWinter
- 👤 Robert E. Nahory
- 👤 Martin A. Pollack
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 18:44
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/822; H10H20/824; C; C30; C30B; C30B19/00; C30B19/10; H04; H04B; H04B10/00; H04B10/25; H04B10/2507; H04B10/40; H04B10/43; H10F; H10F30/00; H10F30/20; H10F30/21; H10F30/22; H10F30/222; H10F30/227; H10H20/811; H10P; H10P14/00; H10P14/20; H10P14/26; H10P14/263; H10P14/265; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2911; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3218; H10P14/3221; H10P14/3222; H10P14/3242; H10P14/3244; H10P14/3254; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3418; H10P14/3421; H10P14/3422; Y; Y10; Y10S; Y10S438/00; Y10S438/936
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
126 words
In a process for coating a Group III-Group V substrate the steps comprising heating a solid having gallium, arsenic, antimony and phosphorus constituents so that a growth solution having a solution temperature is formed; heating said substrate to a temperature comparable to said solution temperature; and applying said growth solution to said substrate by a liquid phase epitaxial method so that a grown coating results, said solution including gallium, arsenic, antimony and phosphorus in proportions such that the grown coating is substantially lattice matched to said substrate, whereby said grown coating is found to be graded in phosphorus content and to have a smooth surface having a lattice constant significantly different from said substrate so that growth of subsequent layers in electronic device manufacture is facilitated.
Claim 2
Dependent Claim
126 words
In a process for coating a Group III-Group V substrate the steps comprising heating a solid having gallium, arsenic, antimony and phosphorus constituents so that a growth solution having a solution temperature is formed; heating said substrate to a temperature comparable to said solution temperature; and applying said growth solution to said substrate by a liquid phase epitaxial method so that a grown coating results, said solution including gallium, arsenic, antimony and phosphorus in proportions such that the grown coating is substantially lattice matched to said substrate, whereby said grown coating is found to be graded in phosphorus content and to have a smooth surface having a lattice constant significantly different from said substrate so that growth of subsequent layers in electronic device manufacture is facilitated.
Claim 3
Dependent Claim
78 words
In a method for liquid phase epitaxial growth of a coating on a substrate having a lattice constant the steps comprising covering said substrate with a liquid solution comprising gallium, arsenic, antimony, and phosphorus at a temperature and composition such that the solution is in substantial equilibrium with a corresponding solid which substantially lattice matches said substrate and decreasing said temperature, whereby a coating layer grows lattice matched on said substrate in suitable manner for electronic device manufacture.
Claim 4
Dependent Claim
78 words
In a method for liquid phase epitaxial growth of a coating on a substrate having a lattice constant the steps comprising covering said substrate with a liquid solution comprising gallium, arsenic, antimony, and phosphorus at a temperature and composition such that the solution is in substantial equilibrium with a corresponding solid which substantially lattice matches said substrate and decreasing said temperature, whereby a coating layer grows lattice matched on said substrate in suitable manner for electronic device manufacture.
Claim 5
Dependent Claim
31 words
The method of claim 2 wherein said temperature lies between about 700° C. and about 950° C. and the rate of temperature decrease is less than about 2° C. per minute.
Claim 6
Dependent Claim
15 words
The method of claim 2 wherein said temperature lies between 775° C. and 825° C.
Claim 7
Dependent Claim
40 words
The method of claim 2 wherein said solution is substantially entirely composed of gallium, arsenic, antimony and phosphorus and said substrate is gallium arsenide, whereby at least part of said coating layer is formed of gallium arsenide antimonide phosphide (GaAsSbP).
Claim 8
Dependent Claim
39 words
The method of claim 5 in which said temperature is decreased for enough time so that a layer of gallium arsenide antimonide (GaAsSb) is produced upon said GaAsSbP layer part, whereby lattice matched infrared devices may be conveniently produced.
Claim 9
Dependent Claim
76 words
The method of claim 2 for liquid phase epitaxial growth of a coating of GaAsSbP on a GaAs substrate wherein said solution has an atom fraction of gallium of about 0.61, an atom fraction of arsenic of about 0.02, an atom fraction of antimony of about 0.37, and an atom fraction of phosphorus of about 0.00034; and said temperature is approximately 825° Centigrade, whereby a lattice matched graded layer of GaAsSbP grows on said GaAs substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1981-02-06 | 1981-08-08 | 1982-02-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-02-06 | 1985-08-08 | 1986-02-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-02-06 | 1989-08-08 | 1990-02-07 | $7700.00 | Window Closed / Lapsed |