US4057476A
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Thin film photovoltaic diodes and method for making same
Assignee: Hughes Missile Systems Co
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Filing: 1976-05-26
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Granted: 1977-11-08
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Expires: 1996-05-26
Abstract
Abstract Photovoltaic diodes prepared by the methods of the invention include p-n (or n-p) heterojunction or homojunction diodes as well as Schottky barrier diodes where both elements of the diode comprise thin monocrystalline films of Pb 1-x Sn x Te or a thin monocrystalline film of Pb 1-x Sn x Te and an appropriate thin barrier metal film. Such a monocrystalline Pb 1-x Sn x Te film is sputter deposited, has a composition Pb 1-x Sn x Te which may range from x = 0.0 to about x = 0.3 and, consequently, can be preselected to have a photovoltaic response with response cutoff wavelengths ranging from about 6.0μm to about 25μm at 77° K. The first film is sputter deposited under controlled conditions in accordance with the present method, including at low pressure of selected gas and at selected substrate temperature and film growth rate conditions with or without substrate temperature and film growth rate condition with or without substrate bias voltage of from about +30 volts to about -30 volts, so as to control the composition and stoichiometry of the resulting film as well as its carrier type, carrier concentration and Hall mobility to provide selected electro-optical properties. Thereupon a second film is deposited, which is either a film of composition Pb 1-x .sbsb.1 Sn x .sbsb.1 Te where x 1 may range from 0.0 to about 0.3, in which case this film is deposited directly upon the first film, or a film of thin barrier metal which may be deposited on the first film. The thin barrier metal film is utilized in preparing Schottky type diodes and the film may be lead, indium or the like. The present method provides in a very economical manner at moderate conditions high sensitivity photovoltaic diodes utilizing PbSnTe films requiring no costly and tim consuming post-deposition treatment such as annealing.
Inventors
- 👤 Esther Krikorian
- 👤 Michael J. Crisp
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:42
CPC Classifications
H; H10; H10F; H10F10/00; H10F10/10; H10F10/18; C; C30; C30B; C30B23/00; C30B23/002; C30B23/02; C30B29/00; C30B29/10; C30B29/46; H10F77/00; H10F77/10; H10F77/12; H10F77/127; H10P; H10P14/00; H10P14/20; H10P14/22; H10P14/29; H10P14/2901; H10P14/2921; H10P14/32; H10P14/3202; H10P14/3236; H10P14/34; H10P14/3402; H10P14/3436; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
185 words
An improved method of preparing photovoltaic diodes having thin films Pb 1-x Sn x Te, said method comprising: sputtering from a prereacted Pb 1-x Sn x Te target wherein x is in the range from 0.0 to about 0.3 a single crystal Pb 1-x Sn x Te film of predetermined composition and about 0.1-10μm thickness, wherein x is in the range from 0.0 to about 0.3, on a selected heat resistant single crystal substrate in a reaction zone containing about 0.5-5μm inert gas after first evacuating said reaction zone to at least about 10 -7 torr, said sputtering being effected at a substrate temperature of about 220°-350° C and at a film growth rate of about 0.1-3.0μm/hr., the particular film deposition conditions being selected and controlled to provide said film with a carrier concentration of predetermined type and value, a Hall mobility of selected value, and a spectral response with cutoff wavelengths ranging from about 0.6μm to about 25μm; and therafter depositing on the resulting composite of said film and said single crystal substrate a second film of preselected composition to form a photovoltaic diode.
Claim 2
Dependent Claim
185 words
An improved method of preparing photovoltaic diodes having thin films Pb 1-x Sn x Te, said method comprising: sputtering from a prereacted Pb 1-x Sn x Te target wherein x is in the range from 0.0 to about 0.3 a single crystal Pb 1-x Sn x Te film of predetermined composition and about 0.1-10μm thickness, wherein x is in the range from 0.0 to about 0.3, on a selected heat resistant single crystal substrate in a reaction zone containing about 0.5-5μm inert gas after first evacuating said reaction zone to at least about 10 -7 torr, said sputtering being effected at a substrate temperature of about 220°-350° C and at a film growth rate of about 0.1-3.0μm/hr., the particular film deposition conditions being selected and controlled to provide said film with a carrier concentration of predetermined type and value, a Hall mobility of selected value, and a spectral response with cutoff wavelengths ranging from about 0.6μm to about 25μm; and therafter depositing on the resulting composite of said film and said single crystal substrate a second film of preselected composition to form a photovoltaic diode.
Claim 3
Dependent Claim
116 words
The method of claim 1 wherein said single crystal film of Pb 1-1 Sn x Te is deposited at a substrate temperature and film growth rate about those for the critical condition of substrate temperature and film growth rate R o T o under which said film exhibits a change in carrier type, so that said resulting film has a preselected carrier type, a carrier concentration of less than about 10 17 cm -3 , a Hall mobility of more than about 10 4 cm 2 /volt-sec at 77° K and a composition which is about that of a film deposited from a given target at the condition R T = R o T o .
Claim 4
Dependent Claim
74 words
The method of claim 2 wherein said second film deposited on aid composite is a film of Pb 1-x Sn x Te wherein x is in the range from 0.0 to about 0.3 said second film being deposited directly on said first film under conditions which predetermine the carrier type for said second film, as well as said second film's composition, carrier concentration and Hall mobility, whereby a high quality photovoltaic diode is provided.
Claim 5
Dependent Claim
83 words
The method of claim 3 wherein the deposition conditions of said second film are controlled by controlling the substrate temperature and film growth rate in the same manner as for said first film to provide said second film with desired composition, carrier concentration and Hall mobility, said conditions of substrate temperature and film growth rate approximating the critical condition R o T o of substrate temperature and film growth rate at which the same target composition switches carrier type for the deposited film.
Claim 6
Dependent Claim
78 words
The method of claim 3, wherein said second film is deposited under deposition conditions which include the application of a bias voltage in a range of from about +30 volts to about -30 volts to said substrate during said sputtering, the particular bias voltage applied being selected with respect to the substrate temperature and film growth rate utilized so as to predetermine the carrier type and provide about stoichiometric film composition having desired carrier concentration and Hall mobility.
Claim 7
Dependent Claim
55 words
The method of claim 3 wherein said composition of said second film is controlled so as to be about the same composition as that of said first film and the carrier type of said second film is controlled to be opposite that of said first film whereby a homo-junction is formed between said two films.
Claim 8
Dependent Claim
49 words
The method of claim 3 wherein the carrier type of said second film is different from the carrier type of said first film and wherein the composition of said second film is different from the composition of said first film, whereby said first and second films form a hetero-junction.
Claim 9
Dependent Claim
80 words
The method of claim 1 wherein said first film is deposited under predetermined substrate temperature and film growth rate merely to provide the desired film composition and wherein a substrate bias voltage in a range of between about +30 volts and about -30 volts is utilized, the particular bias voltage being selected with respect to the substrate temperature and film growth rate so as to predetermine the carrier type, the carrier concentration and the Hall mobility of said first film.
Claim 10
Dependent Claim
65 words
The method of claim 8 wherein said second film has the composition Pb x-x Sn x Te wherein x is in the range from 0.0 to about 3.0 and is deposited directly on said first film by said sputtering under conditions which predetermine the composition of said second film, its carrier type and concentration and the Hall mobility thereof to form an improved photovoltaic diode.
Claim 11
Dependent Claim
82 words
The method of claim 9 wherein said second film is deposited on said first film at preselected substrate and film growth rate which determine the film composition and provide said second film with preselected carrier type, carrier concentration and Hall mobility, said substrate temperature and film growth rate approximating the critical substrate temperature and film growth rate conditions R o T o for said second film at which the carrier type switches whereby an improved photovoltaic diode with controlled characteristics is provided.
Claim 12
Dependent Claim
81 words
The method of claim 9 wherein said second film is deposited under substrate temperature and film growth rate conditions merely to control the composition of said film and at a selected substrate bias in the range of from about +30 volts to about -30 volts, said substrate bias voltage being selected with respect to the substrate temperature and film growth rate so as to provide said second film with desired carrier concentration, the desired carrier type and the desired Hall mobility.
Claim 13
Dependent Claim
46 words
The method of claim 9 wherein the carrier type of said second film is different from that of said first film but wherein the composition of said second film is controlled to be about that of said first film, whereby said two films form a homo-junction.
Claim 14
Dependent Claim
44 words
The method of claim 9 wherein said carrier type of said second film differs from that of said first film, and wherein the composition of said second film differs from that of said first film, whereby said first and second films form a hetero-junction.
Claim 15
Dependent Claim
33 words
The method of claim 1 wherein said second film comprises a thin film barrier metal deposited on the resulting composite of said first film and substrate to form a Schottky barrier diode therewith.
Claim 16
Dependent Claim
71 words
The method of claim 14 wherein said barrier metal layer is deposited by evaporation under conditions of extremely low pressure of the order of about 10 -8 torr background pressure and selected purity of said metal source for said barrier metal deposition and wherein said barrier metal deposition is effected at a temperature low enough to effect a continuous film formation and avoid degradation of the surface of the first film.
Claim 17
Dependent Claim
17 words
The method of claim 15 wherein said first film is p-type and said barrier metal comprises indium.
Claim 18
Dependent Claim
10 words
The method of claim 1 wherein said atmosphere comprises argon.
Claim 19
Dependent Claim
50 words
The method of claim 17 wherein said atmosphere includes a minor concentration of gaseous addition selected from oxygen and nitrogen to provide the selected carrier type and to decrease the effective carrier concentration of at least one of said first and second films to form a homo- or hetero-junction therewith.
Claim 20
Dependent Claim
146 words
An improved photovoltaic diode, said diode comprising: a heat resistant monocrystalline substrate, a first unannealed monocrystalline film of Pb 1-x Sn x Te, wherein x is in the range from 0.0 to about 0.3, sputtered on said substrate to form a composite therewith, said first film having selected carrier concentration and Hall mobility and desired carrier type, a spectral response cutoff ranging from about 6μm to about 25μm and a second film disposed on said composite and selected from the group consisting of a thin, up to about 50A, barrier metal and a crystalline unannealed sputtered film of Pb 1-x Sn x Te wherein x is in the range from 0.0 to about 0.3, wherein the carrier type is opposite that of said first film, wherein said second film has a selected carrier concentration, and Hall mobility and a thickness not in excess of about 5μm.
Claim 21
Dependent Claim
146 words
An improved photovoltaic diode, said diode comprising: a heat resistant monocrystalline substrate, a first unannealed monocrystalline film of Pb 1-x Sn x Te, wherein x is in the range from 0.0 to about 0.3, sputtered on said substrate to form a composite therewith, said first film having selected carrier concentration and Hall mobility and desired carrier type, a spectral response cutoff ranging from about 6μm to about 25μm and a second film disposed on said composite and selected from the group consisting of a thin, up to about 50A, barrier metal and a crystalline unannealed sputtered film of Pb 1-x Sn x Te wherein x is in the range from 0.0 to about 0.3, wherein the carrier type is opposite that of said first film, wherein said second film has a selected carrier concentration, and Hall mobility and a thickness not in excess of about 5μm.
Claim 22
Dependent Claim
30 words
The improved photovoltaic diode of claim 19 wherein said second film has a composition Pb 1-x Sn x Te wherein x is in the range from 0.0 to about 0.3.
Claim 23
Dependent Claim
38 words
The improved photovoltaic diode of claim 20 wherein said second film has a composition and thickness the same as said first film, whereby said second film is deposited directly on said first film and forms a homo-junction therewith.
Claim 24
Dependent Claim
38 words
The improved photovoltaic diode of claim 20 wherein said second film is deposited directly on said first film and wherein said second film has a composition different from said first film, whereby said two films form a hetero-junction.
Claim 25
Dependent Claim
25 words
The improved photovoltaic diode of claim 19 wherein said second film comprises a thin barrier film and wherein said diode comprises a Schottky barrier diode.
Claim 26
Dependent Claim
25 words
The improved photovoltaic Schottky barrier diode of claim 23 wherein said first film is of the p-carrier type and where said barrier metal comprises indium.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-11-07 | 1981-05-09 | 1981-11-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-11-07 | 1985-05-09 | 1985-11-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-11-07 | 1989-05-09 | 1989-11-08 | $7700.00 | Window Closed / Lapsed |