Patent US4049533A successfully refreshed from Google Patents.
US4049533A
Expired / Lapsed
US
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Device for producing coatings by means of ion sputtering
Assignee: Individual
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Filing: 1975-09-10
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Granted: 1977-09-20
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Expires: 1995-09-10
Abstract
Abstract A device intended for producing single-layer coatings or films, for example, artificial diamond coatings or films, as well as multilayer or sandwich coatings. The device comprises a plurality of vacuum discharge chambers and at least two pairs of cathodes arranged in each of the chambers. Each pair of cathodes is provided with an anode which is disposed equidistantly from the cathodes forming each respective pair, the anodes of all the pairs of cathodes being arranged in one plane, whereas the cathodes in all the pairs are arranged in two planes that are parallel to the plane in which the anodes are arranged. Articles to be coated are arranged at the point of convergence of atomic beams of the cathode substance being sputtered. Each chamber is provided with a magnetic field source of its own. There is a vacuum evacuation system for all the chambers.
Inventors
- 👤 Vyacheslav Mikhailovich Golyanov
- 👤 Alek Platonovich Demidov
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 19:10
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; H; H01; H01C; H01C17/00; H01C17/06; H01C17/075; H01C17/12
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
172 words
A device for producing films by means of ion sputtering of substances in an ionized gas atmosphere, comprising: a vacuum discharge chamber comprising cooling means, a magnetic field source means, a vacuum evacuation system and an inert gas supply means; at least two pairs of cathodes arranged in the chamber, the geometrical centers of flat sputterable surfaces of the cathodes being equally spaced from each other in each pair of cathodes and being found in parallel plane, each pair of cathodes having an anode equally spaced from the cathodes forming each respective pair, all anodes of all of the pairs of cathodes being located in a plane parallel to the planes in which the cathodes are found at least one holder adapted to hold articles to be coated arranged in the plane in which all of the anodes are located at the point of convergence and overlapping of atomic beams of sputtered material from all of the cathodes; and a power source of all of the cathodes and anodes of the chamber.
Claim 2
Independent Claim
172 words
A device for producing films by means of ion sputtering of substances in an ionized gas atmosphere, comprising: a vacuum discharge chamber comprising cooling means, a magnetic field source means, a vacuum evacuation system and an inert gas supply means; at least two pairs of cathodes arranged in the chamber, the geometrical centers of flat sputterable surfaces of the cathodes being equally spaced from each other in each pair of cathodes and being found in parallel plane, each pair of cathodes having an anode equally spaced from the cathodes forming each respective pair, all anodes of all of the pairs of cathodes being located in a plane parallel to the planes in which the cathodes are found at least one holder adapted to hold articles to be coated arranged in the plane in which all of the anodes are located at the point of convergence and overlapping of atomic beams of sputtered material from all of the cathodes; and a power source of all of the cathodes and anodes of the chamber.
Claim 3
Dependent Claim
28 words
The device as claimed in claim 1, wherein at least one of the cathodes is adapted to comprise a material different from the material of the other cathodes.
Claim 4
Dependent Claim
42 words
The device as claimed in claim 2, further comprising a means for applying an electric potential to at least one pair of the cathodes, the magnitude of the potential being different from that of potentials applied to the other pairs of cathodes.
Claim 5
Dependent Claim
24 words
The device as claimed in claim 2, further comprising a means for applying a pulse voltage to at least one pair of the cathodes.
Claim 6
Dependent Claim
30 words
The device as claimed in claim 1, wherein in at least one pair of cathodes the planes of sputterable surfaces are inclined at an equal angle toward the article holder.
Claim 7
Dependent Claim
44 words
The device as claimed in claim 1, further comprising cooling means for the anodes and cathodes and a coiled pipe containing a cooling agent rigidly mounting the anodes, holders of the cathodes being pressed against the coiled pipe and separated therefrom by thin insulators.
Claim 8
Dependent Claim
24 words
The device as claimed in claim 1, wherein the geometrical centers of the cathodes are located at the apexes of an imaginary trihedral prism.
Claim 9
Dependent Claim
24 words
The device as claimed in claim 1, wherein the geometrical centers of the cathodes are located at the apexes of an imaginary tetrahedral prism.
Claim 10
Dependent Claim
24 words
The device as claimed in claim 1, wherein the geometrical centers of the cathodes are located at the apexes of an imaginary pentahedral prism.
Claim 11
Dependent Claim
24 words
The device as claimed in claim 1, wherein the geometrical centers of the cathodes are located at the apexes of an imaginary hexahedral prism.
Claim 12
Independent Claim
173 words
A device for producing films by mans of ion sputtering of substances in an ionized gas atmosphere, comprising: a vacuum discharge chamber comprising cooling means, a magnetic field source means, a vacuum evacuation system and an inert gas supply means; two pairs of cathodes arranged in the chamber, the geometrical centers of flat sputterable surfaces of the cathodes being equally spaced from each other in each pair of cathodes and being found in parallel planes, each pair of cathodes having an anode equally spaced from the cathodes forming each respective pair, all anodes of all of the pairs of cathodes being located in a plane parallel to the planes in which the cathodes are found, the geometrical centers of the cathodes being found at four apexes of the lattice base of an imaginary octahedron; two holders, each of the holders adapted to hold an article located at each of the distal apexes of the octahedron opposite the lattice base; and a power source of all of the cathodes and anodes of the chamber.
Claim 13
Independent Claim
173 words
A device for producing films by mans of ion sputtering of substances in an ionized gas atmosphere, comprising: a vacuum discharge chamber comprising cooling means, a magnetic field source means, a vacuum evacuation system and an inert gas supply means; two pairs of cathodes arranged in the chamber, the geometrical centers of flat sputterable surfaces of the cathodes being equally spaced from each other in each pair of cathodes and being found in parallel planes, each pair of cathodes having an anode equally spaced from the cathodes forming each respective pair, all anodes of all of the pairs of cathodes being located in a plane parallel to the planes in which the cathodes are found, the geometrical centers of the cathodes being found at four apexes of the lattice base of an imaginary octahedron; two holders, each of the holders adapted to hold an article located at each of the distal apexes of the octahedron opposite the lattice base; and a power source of all of the cathodes and anodes of the chamber.
Claim 14
Dependent Claim
109 words
The device as claimed in claim 11, wherein there are a plurality of discharge chambers arranged coaxially within a common sealed cover, and further comprising a drive means for moving holders adapted to hold articles to be coated along the line drawn through the distal apexes of the imaginary octahedrons of all the discharge chambers; and a stationary mask with apertures arranged between the article holders and the cathodes, on the path of atomic beams of sputtered substance, converging towards the distal apexes of the imaginary octahedrons, the geometric center of each of the apertures being found on the line connecting the distal apexes of the respective imaginary octahedron.
Claim 15
Dependent Claim
29 words
The device as claimed in claim 12, further comprising a cold-cathode ion pump installed at the inlet of the sealed cover and providing for differential pumping of active gases.
Claim 16
Dependent Claim
31 words
The device as claimed in claim 12, wherein at least one discharge chamber comprises ion cleaning means and further comprising a means for applying a negative potential to the article holders.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-09-19 | 1981-03-21 | 1981-09-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-09-19 | 1985-03-21 | 1985-09-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-09-19 | 1989-03-21 | 1989-09-20 | $7700.00 | Window Closed / Lapsed |