US3594301A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputter coating apparatus
Assignee: General Electric Co
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Filing: 1968-11-22
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Granted: 1971-07-20
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Expires: 1988-11-22
Abstract
Abstract APPARATUS FOR EFFICIENTLY PROVIDING IONIC CLEANING AND SPUTTER COATING OF MATERIALS. THE SPUTTERING APPARATUS BASICALLY INCLUDES AT LEAST TWO TARGETS (CATHODES) WITH A POROUS ANODE LOCATED THEREBETWEEN WITH THE MATERIAL OT BE COATED POSITIONED BETWEEN AT LEAST ONE OF THE TARGETS AND THE ANODE. THE USE OF A POROUS ANODE ALLOWS SPUTTERING ATOMS TO PASS THERETHROUGH TO PROVIDE SUBSTANTIALLY UNIFORM COATING OF THE MATERIAL.
Inventors
- 👤 Charles A Bruch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 09:28
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3464; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-07-19 | 1975-01-18 | 1975-07-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-07-19 | 1979-01-18 | 1979-07-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-07-19 | 1983-01-18 | 1983-07-20 | $7700.00 | Window Closed / Lapsed |