US4045318A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of transferring a surface relief pattern from a poly(olefin sulfone) layer to a metal layer
Assignee: RCA Corp
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Filing: 1976-07-30
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Granted: 1977-08-30
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Expires: 1996-07-30
Abstract
Abstract This invention pertains to a method of transferring a surface relief pattern from a poly(olefin sulfone) layer to a metal layer wherein the poly(olefin sulfone) layer is exposed to ultra violet radiation prior to sputter etching the surface relief pattern into the metal layer.
Inventors
- 👤 Richard Joseph Himics
- 👤 Nitin Vithalbhai Desai
- 👤 Eugene Samuel Poliniak
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 05:30
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; C23F; C23F4/00; G; G03; G03F; G03F7/00
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
61 words
A method of transferring a surface relief pattern formed in a poly(olefin sulfone) layer to a metal layer in contact with said poly(olefin sulfone) layer which comprises exposing said poly(olefin sulfone) layer to ultra violet radiation and bombarding the irradiated surface with sufficient ions to substantially remove the poly(olefin sulfone) layer thereby forming the surface relief pattern in the metal layer.
Claim 2
Independent Claim
61 words
A method of transferring a surface relief pattern formed in a poly(olefin sulfone) layer to a metal layer in contact with said poly(olefin sulfone) layer which comprises exposing said poly(olefin sulfone) layer to ultra violet radiation and bombarding the irradiated surface with sufficient ions to substantially remove the poly(olefin sulfone) layer thereby forming the surface relief pattern in the metal layer.
Claim 3
Dependent Claim
24 words
A method according to claim 1 wherein the poly(olefin sulfone) is selected from the group consisting of poly(1-methyl-1-cyclopentene sulfone), poly(3-methyl-1-cyclopentene sulfone), and poly(3-ethyl-1-cyclopentene sulfone).
Claim 4
Dependent Claim
20 words
A method according to claim 1 wherein the poly(olefin sulfone) layer is from about 0.3 to about 1.0 micron thick.
Claim 5
Dependent Claim
22 words
A method according to claim 1 wherein the metal layer is selected from the group consisting of gold, copper, aluminum, and nickel.
Claim 6
Dependent Claim
19 words
A method according to claim 1 wherein the ultra violet wavelength spectrum is from about 1,700 to 4,000 angstroms.
Claim 7
Dependent Claim
20 words
A method according to claim 1 wherein the ultra violet exposure is from about 150 to 3,000 millijoules/cm 2 .
Claim 8
Independent Claim
83 words
A method for forming a surface relief pattern in a metal layer which comprises: a. exposing a poly(olefin sulfone) layer in contact with the metal layer to a modulated beam of electrons; b. developing the exposed poly(olefin sulfone) layer to form a surface relief pattern therein; c. exposing the developed poly(olefin sulfone) layer to ultra violet radiation; and d. bombarding the irradiated surface with sufficient ions to substantially remove the poly(olefin sulfone) layer and etch the surface relief pattern into the metal layer.
Claim 9
Independent Claim
83 words
A method for forming a surface relief pattern in a metal layer which comprises: a. exposing a poly(olefin sulfone) layer in contact with the metal layer to a modulated beam of electrons; b. developing the exposed poly(olefin sulfone) layer to form a surface relief pattern therein; c. exposing the developed poly(olefin sulfone) layer to ultra violet radiation; and d. bombarding the irradiated surface with sufficient ions to substantially remove the poly(olefin sulfone) layer and etch the surface relief pattern into the metal layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-08-29 | 1981-02-28 | 1981-08-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-08-29 | 1985-02-28 | 1985-08-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-08-29 | 1989-02-28 | 1989-08-30 | $7700.00 | Window Closed / Lapsed |