US3916190A
Expired / Lapsed
US
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Depth profile analysis apparatus
Assignee: Kratos Analytical Ltd
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Filing: 1974-03-01
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Granted: 1975-10-28
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Expires: 1994-03-01
Abstract
Abstract An apparatus and method for depth profile analysis in which atoms are removed from a surface by sputtering thereby forming a crater from successively exposed portions of a solid, which portions are then elementally analyzed. The improvement of the present invention comprises deflecting a primary ion beam across the surface to form a crater extending about a predetermined region of the surface and enabling the production of a signal indicative of surface atoms of a given mass only when the primary ion beam is impinging upon a smaller portion of the predetermined region, thereby ensuring that the signal is representative of atoms within the smaller portion, such as at the bottom of the crater.
Inventors
- 👤 Alastair Valentine
- 👤 Robert F Goff
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 21:15
CPC Classifications
G; G01; G01N; G01N23/00; G01N23/20; G01N23/203
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
206 words
A method for improved compositioNal depth profile analysis comprising the steps of a. providing a target support for supporting in a predetermined location a sample at least a portion of which is to be depth profile analyzed; b. producing a beam of primary ions having a known mass substantially the same known kinetic energy; c. directing said primary ions along a beam axis towards a surface of said sample; d. transmitting scattered primary ions having a second known kinetic energy value less than the original kinetic energy of the primary ions indicative of surface atoms within a predetermined region of said surface as have a given mass; and e. receiving the transmitted ions and converting the received ions into an electronic signal; wherein the improvement comprises f. moving said primary ion beam with respect to said sample to cause said beam to traverse and to impinge on said predetermined region; and g. sensing the position of the primary ion beam on said predetermined region and enabling the production of said electronic signal when the beam is within a smaller portion of the predetermined region to produce a signal associated with only such surface atoms as have said given mass and are located within said smaller portion.
Claim 2
Independent Claim
206 words
A method for improved compositioNal depth profile analysis comprising the steps of a. providing a target support for supporting in a predetermined location a sample at least a portion of which is to be depth profile analyzed; b. producing a beam of primary ions having a known mass substantially the same known kinetic energy; c. directing said primary ions along a beam axis towards a surface of said sample; d. transmitting scattered primary ions having a second known kinetic energy value less than the original kinetic energy of the primary ions indicative of surface atoms within a predetermined region of said surface as have a given mass; and e. receiving the transmitted ions and converting the received ions into an electronic signal; wherein the improvement comprises f. moving said primary ion beam with respect to said sample to cause said beam to traverse and to impinge on said predetermined region; and g. sensing the position of the primary ion beam on said predetermined region and enabling the production of said electronic signal when the beam is within a smaller portion of the predetermined region to produce a signal associated with only such surface atoms as have said given mass and are located within said smaller portion.
Claim 3
Dependent Claim
60 words
A method according to claim 1, wherein the step of producing said beam of primary ions comprises producing a beam of primary ions having a known mass and substantially the same known kinetic energy, and said transmitting step comprises transmitting scattered primary ions having a second known kinetic energy value less than the original kinetic energy of the primary ions.
Claim 4
Dependent Claim
30 words
A method according to claim 1, wherein said transmitting step comprises transmitting such ions as are produced upon sputtering atoms from within said predetermined region and have a given mass.
Claim 5
Dependent Claim
71 words
A method according to claim 1, wherein the step of moving the primary ion beam further comprises moving the beam with respect to said sample in at least two directions such that said predetermined region is defined by an area scanned by said primary beam and wherein the step of sensing and enabling further comprises gating said electronic signal when the beam is within a smaller portion of said scanned area.
Claim 6
Independent Claim
210 words
An apparatus for compositional depth profile analysis comprising a. a target support for supporting in a predetermined location a sample at least a portion of which is to be depth profile analyzed; b. ion generator means producing a beam of primary ions having a known mass and substantially the same known kinetic energy; c. means for directing said primary ions along a beam axis towards a surface of said sample; d. means for transmitting ions having a second known kinetic energy value less than the original primary ion indicative of surface atoms within a predetermined region of said surface as have a given mass; and e. means for receiving the transmitted ions and converting the received ions into an electronic signal; wherein the improvement comprises f. means for moving said primary ion beam with respect to said sample to cause said beam to traverse and to impinge on said predetermined region; and g. means for sensing the position of the primary ion beam on said predetermined region and for enabling the production of said electronic signal when the beam is within a smaller portion of the predetermined region to produce a signal associated with only such surface atoms as have said given mass and are located within said smaller portion.
Claim 7
Independent Claim
210 words
An apparatus for compositional depth profile analysis comprising a. a target support for supporting in a predetermined location a sample at least a portion of which is to be depth profile analyzed; b. ion generator means producing a beam of primary ions having a known mass and substantially the same known kinetic energy; c. means for directing said primary ions along a beam axis towards a surface of said sample; d. means for transmitting ions having a second known kinetic energy value less than the original primary ion indicative of surface atoms within a predetermined region of said surface as have a given mass; and e. means for receiving the transmitted ions and converting the received ions into an electronic signal; wherein the improvement comprises f. means for moving said primary ion beam with respect to said sample to cause said beam to traverse and to impinge on said predetermined region; and g. means for sensing the position of the primary ion beam on said predetermined region and for enabling the production of said electronic signal when the beam is within a smaller portion of the predetermined region to produce a signal associated with only such surface atoms as have said given mass and are located within said smaller portion.
Claim 8
Dependent Claim
66 words
An apparatus according to claim 5, wherein said means for producing said beam of primary ions comprises means for producing a beam of primary ions having a known mass and substantially the same known kinetic energy, and said means for transmitting ions comprises means for transmitting scattered primary ions having a second known kinetic energy value less than the original kinetic energy of the primary ions.
Claim 9
Dependent Claim
32 words
An apparatus according to claim 5, wherein said transmittiNg means comprises means for transmitting such ions as are produced upon sputtering atoms from within said predetermined region and have a given mass.
Claim 10
Dependent Claim
75 words
An apparatus according to claim 5, wherein said means for moving the primary ion beam further comprises means for moving the beam with respect to said sample in at least two directions such that said predetermined region is defined by an area scanned by said primary beam and wherein said means for sensing and enabling further comprises means for gating said electronic signal when the beam is within a smaller portion of said scanned area.
Claim 11
Dependent Claim
28 words
An apparatus according to claim 8, wherein said moving means is adapted to repetitively deflect said beam of primary ions in two substantially orthogonal directions across said area.
Claim 12
Dependent Claim
49 words
An apparatus according to claim 9, wherein said gating means comprises means synchronized to said repetitive deflection and adapted for sensing a predetermined time interval after the onset of each deflection, said predetermined time interval corresponding to the interval during which said primary beam is within said smaller portion.
Claim 13
Dependent Claim
74 words
An apparatus according to claim 9, wherein said moving means comprises at least two beam deflection members and is adapted for applying gradually varying amplitude signals to each of said members to form force fields resulting in said deflection and wherein said gating means comprises means adapted for sensing predetermined segments of each of said gradually varying amplitude signals corresponding to the interval during which said primary ion beam is within said smaller portion.
Claim 14
Dependent Claim
101 words
An apparatus according to claim 11, wherein said gating means further comprises means for setting said predetermined segment, means coupled to said moving means for receiving a said varying amplitude signal corresponding to that applied to each of said deflection members, means for comparing said predetermined segments with said varying amplitude signals and for providing trigger signals whenever the level of either of said varying amplitude signals are within said predetermined segments, and gate means responsive to said trigger signals for providing an enable signal whenever trigger signals indicating that both said varying amplitude signals within said predetermined segments are present.
References Cited (Backward Citations)
US3341704A
Cited
US3614311A
Cited
US3686499A
Cited
US3665182A
Cited
US3699304A
Cited
US3795808A
Cited
US3840743A
Cited
US3881108A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-10-27 | 1979-04-28 | 1979-10-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-10-27 | 1983-04-28 | 1983-10-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-10-27 | 1987-04-28 | 1987-10-28 | $7700.00 | Window Closed / Lapsed |