US3840743A
Expired / Lapsed
US
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Ion microanalyzer
Assignee: Hitachi Ltd
•
Filing: 1973-01-29
•
Granted: 1974-10-08
•
Expires: 1993-01-29
Abstract
Abstract An ion microanalyzer wherein the intensity of a condenser lens for focusing an ion beam is periodically varied, to vary the spot diameter of the ion beam which is to impinge on a specimen, whereby the precision of analysis in the direction of the depth of the specimen can be enhanced.
Inventors
- 👤 H Tamura
- 👤 T Kondo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:40
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/252; H01J37/256; H01J49/00; H01J49/26; H01J49/28; H01J49/284; H01J49/286
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
132 words
In an ion microanalyzer comprising ion beam generating means including an ion source device for emitting an ion beam; at least one ion lens disposed along the path of said ion beam for focusing said ion beam on a specimen, first deflecting means for deflecting said ion beam; mass analyzing means for analyzing secondary ions emitted from said specimen by ion impingement; and detecting means for detecting the output of said mass analyzing device, the improvement which comprises first control means for periodically varying the focus of said ion lens, said first control means including first signal source means for supplying a first periodic signal to said ion lens, and second control means for periodically inhibiting the output of said detecting means in synchronism with the intensity variation of said ion lens.
Claim 2
Dependent Claim
132 words
In an ion microanalyzer comprising ion beam generating means including an ion source device for emitting an ion beam; at least one ion lens disposed along the path of said ion beam for focusing said ion beam on a specimen, first deflecting means for deflecting said ion beam; mass analyzing means for analyzing secondary ions emitted from said specimen by ion impingement; and detecting means for detecting the output of said mass analyzing device, the improvement which comprises first control means for periodically varying the focus of said ion lens, said first control means including first signal source means for supplying a first periodic signal to said ion lens, and second control means for periodically inhibiting the output of said detecting means in synchronism with the intensity variation of said ion lens.
Claim 3
Dependent Claim
35 words
An ion microanalyzer according to claim 1, wherein said second coNtrol means includes means for periodically varying the analyzing operation of said mass analyzing device in synchronism with the intensity variation of the ion lens.
Claim 4
Dependent Claim
33 words
An ion microanalyzer according to claim 1, wherein said second control means includes means for varying the output of said mass analyzing device in synchronism with the intensity variation of the ion lens.
Claim 5
Dependent Claim
32 words
An ion microanalyzer according to claim 1, wherein said second control means includes means for varying the sensitivity of said detecting device in synchronism with the intensity variation of the ion lens.
Claim 6
Dependent Claim
33 words
An ion microanalyzer according to claim 1 wherein said ion lens includes three electrodes disposed in parallel with one another, the intermediate one of said electrodes being connected to said first control means.
Claim 7
Dependent Claim
53 words
An ion microanalyzer according to claim 1 wherein said second control means comprises second deflecting means disposed between said specimen and said mass analyzing device for deflecting said secondary ions and second signal source means for supplying a second periodic signal to said second deflecting means in synchronism with the first periodic signal.
Claim 8
Dependent Claim
50 words
An ion microanalyzer according to claim 2 wherein said mass analyzing device includes an electric field device and a magnetic field device, and said second control means comprises second signal source means for supplying a second periodic signal to said electric field device in synchronism with the first periodic signal.
Claim 9
Dependent Claim
49 words
An ion microanalyzer according to claim 2 wherein said mass analyzing device includes an electric field device and a magnetic field device, and said second control means comprises second signal source means for supplying a second periodic signal to said magnetic field in synchronism with the first periodic signal.
Claim 10
Dependent Claim
39 words
An ion microanalyzer according to claim 3 wherein said second control means includes third deflecting means and second signal source means for supplying a second periodic signal to said third deflecting means in synchronism with the first periodic signal.
Claim 11
Dependent Claim
92 words
Method of measurement of the concentration distribution in the direction of the depth of a specimen, comprising the steps of generating an ion beam, focusing said ion beam on a portion of a specimen, mass analyzing the secondary ions generated by impingement of said ion beam on said specimen, detecting the mass analyzed secondary ions in synchronism with variation of the focusing of said ion beam to vary the diameter of the ion beam impinging on said specimen so as to vary the penetration pattern of said ion beam in said specimen.
Claim 12
Dependent Claim
92 words
Method of measurement of the concentration distribution in the direction of the depth of a specimen, comprising the steps of generating an ion beam, focusing said ion beam on a portion of a specimen, mass analyzing the secondary ions generated by impingement of said ion beam on said specimen, detecting the mass analyzed secondary ions in synchronism with variation of the focusing of said ion beam to vary the diameter of the ion beam impinging on said specimen so as to vary the penetration pattern of said ion beam in said specimen.
Claim 13
Dependent Claim
34 words
Method as defined in claim 10 wherein said focusing is varied periodically between first and second values and said detecting is performed in synchronism with one of said first and second values of focusing.
Claim 14
Dependent Claim
35 words
Method as defined in claim 10 wherein said focusing is varied periodically between first and second values and said mass analyzing is performed in synchronism with one of said first and second values of focusing.
Claim 15
Dependent Claim
37 words
Method as defined in claim 10 wherein said focusing is varied periodically between first and second values and the sensitivity of said detecting is varied in synchronism with one of said first and second values of focusing.
Claim 16
Dependent Claim
40 words
Method as defined in claim 10 wherein said focusing is varied periodically between first and second values and the generation of secondary ions at said specimen is inhibited in synchronism with one of said first and second values of focusing.
Claim 17
Dependent Claim
126 words
An ion microanalyzer comprising: means for emitting a primary ion beam; means for irradiating a specimen with said primary ion beam, said means including at least one electrostatic lens disposed along the path of said ion beam; means for varying alternately the spot diameter of the ion beam which is irradiated on a specimen by varying alternately a potential applied to said electrostatic lens; means for deflecting said ion beam; means for analyzing secoNdary ions emitted from said specimen, said means consisting of a mass analyzer; means for detecting and recording the output of said means for analyzing secondary ions in synchronism with said varying means; whereby a precision analysis of the concentration distribution in the direction toward the depth of said specimen can be enhanced.
Claim 18
Dependent Claim
126 words
An ion microanalyzer comprising: means for emitting a primary ion beam; means for irradiating a specimen with said primary ion beam, said means including at least one electrostatic lens disposed along the path of said ion beam; means for varying alternately the spot diameter of the ion beam which is irradiated on a specimen by varying alternately a potential applied to said electrostatic lens; means for deflecting said ion beam; means for analyzing secoNdary ions emitted from said specimen, said means consisting of a mass analyzer; means for detecting and recording the output of said means for analyzing secondary ions in synchronism with said varying means; whereby a precision analysis of the concentration distribution in the direction toward the depth of said specimen can be enhanced.
Claim 19
Dependent Claim
33 words
An ion microanalyzer according to claim 15, in which said means for varying alternately the spot diameter of the ion beam comprises means for varying periodically the spot diameter of the ion beam.
Claim 20
Dependent Claim
52 words
An ion microanalyzer according to claim 15, which further comprises means for shielding the specimen and means for controlling the ability of said secondary ions emitted from said specimen to enter said means for analyzing secondary ions in synchronism with said means for varying alternately the spot diameter of the ion beam.
Claim 21
Dependent Claim
41 words
An ion microanalyzer according to claim 16, which further comprises means for controlling the output of secondary ions of said means for analyzing secondary ions, and said means for detecting and recording the output of said means for analyzing secondary ions.
Claim 22
Dependent Claim
47 words
An ion microanalyzer according to claim 18, in which said means for controlling the output of secondary ions comprises means for controlling the transmission of said secondary ions through said mass analyzer in synchronism with said means for varying alternately the spot diameter of the ion beam.
Claim 23
Dependent Claim
26 words
An ion microanalyzer according to claim 19, in which said mass analyzer comprises at least one of an electric field device and a magnetic field device.
Claim 24
Dependent Claim
30 words
An ion microanalyzer according to claim 20, in which said means for controlling the output of secondary ions comprises a deflecting electrode provided between said sample and said mass analyzer.
Claim 25
Dependent Claim
41 words
An ion microanalyzer according to claim 20, in which said means for controlling the output of secondary ions is a deflecting electrode provided between said mass analyzer and said means for detecting the output of said means for analyzing secondary ions.
Claim 26
Dependent Claim
29 words
An ion microanalyzer according to claim 20, in which said means for controlling the output of secondary ions comprises means for controlling the intensity of said electric field device.
Claim 27
Dependent Claim
29 words
An ion microanalyzer according to claim 20, in which said means for controlling the output of secondary ions comprises means for controlling the intensity of said magnetic field device.
Claim 28
Dependent Claim
40 words
An ion microanalyzer according to claim 15, in which said means for controlling the output of secondary ions comprises means for controlling the sensitivity of said means for detecting and recording the output of said means for analyzing secondary ions.
Claim 29
Dependent Claim
47 words
An ion microanalyzer according to claim 25, in which said means for detecting the output of said means for analyzing secondary ions comprises a photomultiplier, and said means for controlling the output of secondary ions comprises means for controlling the sensitivity to secondary ions of said photomultiplier.
Claim 30
Dependent Claim
52 words
An ion microanalyzer according to claim 25, in which said means for detecting the output of said means for analyzing secondary ions comprises a photomultiplier and an amplifier connected to said photomultiplier, and said means for controlling the output of secondary ions comprises means for controlling the amplification factor of said amplifier.
Claim 31
Dependent Claim
49 words
An ion microanalyzer according to claim 15, in which said electrostatic lens consists of a group of three electrodes disposed in parallel with one another, and said means for varying alternately the spot diameter of the ion beam is connected to an intermediate electrode of said three electrode group.
Claim 32
Dependent Claim
117 words
Method of measurement of the concentration distribution in the direction of the depth of a specimen, comprising the steps of emitting a primary ion beam; irradiating on a specimen with said ion beam having large spot diameter to etch said specimen; irradiating a specimen with said ion beam having a small spot Diameter; mass analyzing secondary ions emitted with irradiation of said primary ion beam; repeating the irradiation of said specimen with said ion beam having large and small spot diameters; detecting and recording an output of said secondary ions being mass analyzed; and controlling the output of secondary ions in synchronism with irradiation of said specimen with said primary ion beam having large and small diameters.
Claim 33
Dependent Claim
117 words
Method of measurement of the concentration distribution in the direction of the depth of a specimen, comprising the steps of emitting a primary ion beam; irradiating on a specimen with said ion beam having large spot diameter to etch said specimen; irradiating a specimen with said ion beam having a small spot Diameter; mass analyzing secondary ions emitted with irradiation of said primary ion beam; repeating the irradiation of said specimen with said ion beam having large and small spot diameters; detecting and recording an output of said secondary ions being mass analyzed; and controlling the output of secondary ions in synchronism with irradiation of said specimen with said primary ion beam having large and small diameters.
Claim 34
Dependent Claim
16 words
Method as defined in claim 29, in which said irradiation of the specimen is repeated periodically.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-10-07 | 1978-04-08 | 1978-10-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-10-07 | 1982-04-08 | 1982-10-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-10-07 | 1986-04-08 | 1986-10-08 | $7700.00 | Window Closed / Lapsed |