Abstract An ion micro-analyzer, wherein a finely collimated ion beam is projected onto the surface of a sample to be analyzed, the projected ion beam repeatedly scans the sample surface while, one time in fixed scanning-frequency intervals, a fixed point on the sample surface is bombarded by the ion beam for a constant time, the image of the secondary electrons from the sample surface is projected on the screen of a Braun tube oscilloscope sweeped synchronously with the ion beam and observed by performing intensity modulation of the oscilloscope in correspondence with the amount of the secondary electrons emitted from the sample surface, the fixed position on the sample surface bombarded by the ion beam in the way described above is moved to a position for analysis while observing the brilliant point on the image of secondary electrons which corresponds to the fixed point on the sample bombarded by the ion beam, and then a mass-spectroscopic analysis of the secondary ions emitted from the fixed point on the sample surface is done while the fixed position on the sample desired for analysis is bombarded by the ion beam.
Inventors
👤 Itiro Omura
👤 Toshio Kondo
👤 Hifumi Tamura
Bibliographic Details
Application Number—
JurisdictionUS
Data Sourcegoogle_patents
Last Synchronized2026-10-27 16:37
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/252; H01J37/256
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
180 words
In an ion micro-analyzer having means for projecting a primary ion beam on a surface of a sample to be analyzed, electric deflecting means for scanning the sample surface with the primary ion beam, means for detecting secondary electrons emitted from the sample surface in response to the irradiation with the primary ion beam, an oscilloscope for displaying the secondary-electron image of said sample surface, which is sweeped synchronously with the scanning of the primary ion beam and which is intensity-modulated by the output signal from said detecting means, and mass-spectroscopic analyzer means for analyzing secondary ions emitted from a fixed position on the sample surface by the irradiation with the primary ion beam, the improvement which comprises a saw-tooth voltage generator for generating a saw-tooth voltage, a rectangular voltage generator for generating a rectangular voltage, means for adding the rectangular voltage to the trailing edge of the saw-tooth voltage, thereby producing a scanning signal consisting of both voltages, means for applying the scanning signal to said electric deflecting means and said oscilloscope, and means for adjusting the rectangular voltage.
Claim 2
Dependent Claim
180 words
In an ion micro-analyzer having means for projecting a primary ion beam on a surface of a sample to be analyzed, electric deflecting means for scanning the sample surface with the primary ion beam, means for detecting secondary electrons emitted from the sample surface in response to the irradiation with the primary ion beam, an oscilloscope for displaying the secondary-electron image of said sample surface, which is sweeped synchronously with the scanning of the primary ion beam and which is intensity-modulated by the output signal from said detecting means, and mass-spectroscopic analyzer means for analyzing secondary ions emitted from a fixed position on the sample surface by the irradiation with the primary ion beam, the improvement which comprises a saw-tooth voltage generator for generating a saw-tooth voltage, a rectangular voltage generator for generating a rectangular voltage, means for adding the rectangular voltage to the trailing edge of the saw-tooth voltage, thereby producing a scanning signal consisting of both voltages, means for applying the scanning signal to said electric deflecting means and said oscilloscope, and means for adjusting the rectangular voltage.
Claim 3
Dependent Claim
59 words
An ion micro-analyzer according to claim 1, which further comprises means for deriving the rectangular voltage from said rectangular voltage generator, means for determining the fixed position of the primary ion beam on the sample surface from the derived rectangular voltage and means for recording said position as well as the analysis data obtained by said mass-spectroscopic analyzer means.