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US3795808A Expired / Lapsed US ⏱️ 0.0 years remaining

Electron microscopes

Assignee: Individual
•
Filing: 1972-05-17
•
Granted: 1974-03-05
•
Expires: 1992-05-17
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Abstract

Abstract In a scanning electron probe instrument such as a scanning electron microscope or X-ray micro-analyser the two-dimensional display of the image can have a manually controlled bright-up region or spot and the direct current signals which movement of this region generates can be switched in at will to the primary beam deflection to shift the scanning to the selected region without mechanically shifting the specimen; then by reducing the scanning amplitude automatically this region is magnified to fill the screen.

Inventors

  • 👤 W Drayton
  • 👤 P Knights

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 22:51
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/20; H01J37/18; H01J37/26; H01J37/28

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 243 words
A scanning electron probe instrument comprises means for generating a beam of electrons, a specimen stage adapted to receive a specimen at a position in the path of said beam, detecting means adapted to detect the effect of impact of said beam on said specimen, means for deflecting said beam laterally, a time base generator connected to said deflecting means and adapted to cause said beam to scan an area of the surface of said specimen, two-dimensional image display means, said display means being fed from said time base generator whereby to form an image synchronised with said beam, a connection between said detecting means and said display means such as to modulate said display means to produce an image of the scanned area of said specimen surface in accordance with the effect of the impact thereon of said beam, means for producing a local region on said image of different brightness from the remainder of the area of said image, said local region still being derived from the same said detector means as the remainder of said image, and differing from the remainder of said image only in the brightness thereof manually controlled means for shifting the position of said local region at will, and switchable means for shifting the main centre of deflection of said beam to a region of said specimen corresponding to said region of the image in accordance with the Manually selected position of said manually controlled means.
Claim 2
Dependent Claim 243 words
A scanning electron probe instrument comprises means for generating a beam of electrons, a specimen stage adapted to receive a specimen at a position in the path of said beam, detecting means adapted to detect the effect of impact of said beam on said specimen, means for deflecting said beam laterally, a time base generator connected to said deflecting means and adapted to cause said beam to scan an area of the surface of said specimen, two-dimensional image display means, said display means being fed from said time base generator whereby to form an image synchronised with said beam, a connection between said detecting means and said display means such as to modulate said display means to produce an image of the scanned area of said specimen surface in accordance with the effect of the impact thereon of said beam, means for producing a local region on said image of different brightness from the remainder of the area of said image, said local region still being derived from the same said detector means as the remainder of said image, and differing from the remainder of said image only in the brightness thereof manually controlled means for shifting the position of said local region at will, and switchable means for shifting the main centre of deflection of said beam to a region of said specimen corresponding to said region of the image in accordance with the Manually selected position of said manually controlled means.
Claim 3
Dependent Claim 42 words
The instrument set forth in claim 1 including scan-reducing means operable simultaneously with said switchable shifting means and acting on said deflecting means to reduce the area of specimen surface scanned and thereby increase effective magnification on shifting of said mean centre.
Claim 4
Dependent Claim 21 words
The instrument set forth in claim 1 wherein said local region comprises a rectangular area of similar shape to said image.
Claim 5
Dependent Claim 53 words
The instrument set forth in claim 3 wherein said display means comprise a cathode ray tube screen and said detecting means modulate the brightness of said screen, and wherein said local region is formed by a rectangular area on said screen of increased brightness in relation to the mean brightness of said image.

References Cited (Backward Citations)

US3087057A Cited
US3405264A Cited
US3617738A Cited
US3614311A Cited
US3679900A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-03-04 1977-09-03 1978-03-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-03-04 1981-09-03 1982-03-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-03-04 1985-09-03 1986-03-05 $7700.00 Window Closed / Lapsed

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