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US3852803A Expired / Lapsed US ⏱️ 0.0 years remaining

Heat sink cooled power semiconductor device assembly having liquid metal interface

Assignee: General Electric Co
•
Filing: 1973-06-18
•
Granted: 1974-12-03
•
Expires: 1993-06-18
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Abstract

Abstract A power semiconductor device is bonded between thin metallic cup members and the edges of the assembly are provided with an electrical insulator to form the necessary creepage path. Liquid metal interfaces are provided between the cup members and heat sinks to provide high thermal and electrical conductivity joints therebetween. Since the liquid metal joint transmits heat and electricity, there is no need for high pressure joints, and since it does not permit a shear stress to be transmitted from the heat sink to the thin and fragile semiconductor device-cup member assembly, then the assembly is not stressed as with a high pressure joint. The excellent thermal characteristics of the joints result in reduced steady-state thermal resistance and improved transient response of the thin assembly and liquid metal interfaces.

Inventors

  • 👤 M Mclaughlin
  • 👤 G Walmet
  • 👤 J Corman

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 20:41
CPC Classifications
H; H10; H10W; H10W40/00; H10W40/70; H10W40/73; H10W40/60; H10W40/611; H10W72/00; H10W76/00; H10W76/10; H10W76/12; H10W76/13; H10W76/138

Claims Analysis

Total Claims: 29
Claim 1
Independent Claim 508 words
A HIGH PRESSURE-INTERFACE-FREE HEAT-PIPE COOLED POWER SEMICONDUCTOR DEVICE ASSEMBLY COMPRISING A PRESSURE-INTERFACE-FREE THIN INTEGRAL POWER SEMICONDUCTOR DEVICE-CUP MEMBER UNIT INCLUDING A POWER SEMICONDUCTOR DEVICE CONSISTING OF A BODY OF SEMICONDUCTOR MATERIAL DEFINED BY FIRST AND SECOND FLAT PARALLEL MAJOR SURFACES, FIRST AND SECOND THIN CUP-LIKE MEMBERS HAVING OUTER BOTTOM SURFACES RESPECTIVELY BONDED DIRECTLY TO THE FIRST AND SECOND FLAT PARALLEL SURFACES OF THE BODY OF SEMICONDUCTOR MATERIAL SO THAT THE INTEGRAL POWER SEMICONDUCTOR DEVICECUP MEMBER UNIT IS PRESSURE-INTERFACE-FREE, SAID CUP-LIKE MEMBERS FABRICATED OF A GOOD ELECTRICALLY AND THERMALLY CONDUCTIVE MATERIAL, AND CREEPAGE PATH LENGTHENING MEANS FORMED ALONG OUTER SIDE WALL PORTIONS OF SAID CUP-LIKE MEMBERS FOR INCREASING THE CREEPAGE PATH ACROSS SAID POWER SEMICONDUCTOR DEVICE, SAID POWER SEMICONDUCTOR DEVICE DEFINED AS DEVELOPING A THERMAL DENSITY OF AT LEAST 100 WATTS PER SQUARE INCH OF SURFACE AREA, A FIRST LONG NONWICKED GRAVITY-RETURN HEAT PIPE HAVING AN EVAPORATING SURFACE END WALL IN THERMAL CONTACT WITH AN INNER BOTTOM SURFACE OF SAID FIRST CUP-LIKE MEMBER FOR REMOVINMG HEAT THEREFROM, SAID FIRST NONWICKED GRAVITY-RETURN HEAT PIPES COMPRISING A FIRST ENCLOSED ELONGATED HOLLOW CHAMBER HAVING AN EVAPORATIO SECTION AT A FIRST END THEREOF RESPECTIVELY DEFINED BY THE EVAPORATING SURFACE END WALL AND A CONDENSER SECTION AT A SECOND END THEREOF REMOTE FROM THE FIRST END, AND A TWO-PHASE FLUID COOLANT CONTAINED WITHIN SAID FIRST CHAMBER AND BEING OF SUFFICIENT VOLUME IN THE LIQUID STATE TO CAUSE FULL IMMERSION OF AT LEAST THE HEATED PORTION OF THE EVAPORATING SURFACE, FIRST AND SECOND ELECTRICAL CONDUCTORS RESPECTIVELY CONNECTED TO SAID ASSEMBLY FOR SUPPLYING ELECTRICAL POWER TO SAID POWER SEMICONDUCTOR DEVICE, A STATIC FIRST THIN FILM OF A HIGH THERMAL AND ELECTRICAL CONDUCTIVITY METAL DISPOSED EXTERNAL OF SAID INTEGRAL SEMICONDUCTOR DEVICE-CUP MEMBER UNIT BETWEEN THE INNER BOTTOM SURFACE OF SAID FIRST CUP-LIKE MEMBER AND EVAPORATING SURFACE END WALL OF SAID FIRST HEAT PIPE AND IN WETTING CONTACT THEREWITH AND FORMING A STATIC FIRST THIN LIQUID METAL INTERFACE THEREBETWEEN DURING OPERATION OF SAID SEMICONDUCTOR DEVICE, SAID FIRST THIN FILM OF METAL OF THICKNESS IN THE RANGE OF 1/10 TO 5 MOLS, THE THIN LIQUID METAL INTERFACE NOT MECHANICALLY STRESSING THE THIN INTEGRAL POWER SEMICONDUCTOR DEVICE-CUP MEMBER UNIT AND THE HIGH THERMAL AND ELECTRICAL CONDUCTIVITY OF THE LIQUID METAL PERMITTING THE COOLING OF LARGE DIAMETER SEMICONDUCTOR DEVICES WITHOUT THE NEED FOR LARGE CLAMPING FORCES TO OBTAIN HIGH PRESSURE JOINTS BETWEEN SAID HEAT PIPE AND SAID THIN INTEGRAL POWER SEMICONDUCTOR DEVICE-CUP MEMBER UNIT, THE CLOSE SPACING BETWEEN THE FIRST HEAT PIPE AND HEAT-EMITTING POWER SEMICONDUCTOR DEVICE AND LACK OF PRESSURE INTERFACES THEREBETWEEN AND IN THE INTEGRAL POWER SEMICONDUCTOR DEVICE-CUP MEMBER UNIT SUBSTANTIALLY DECREASING THE STEADY-STATE THERMAL RESISTANCE AS WALL AS IMPROVING THE TRANSIENT RESPONSE OF THE HEAT-PIPE COOLED POWER SEMICONDUCTOR DEVICE ASSEMBLY TO OBTAIN IMPROVED SINGLE-SIDED COOLING OF THE DEVICE WITHOUT REQUIRING A COSTLY AND MECHANICALLY COMPLEX CLAMPING DEVICE, AND MEANS CONNECTED ONLY TO THE EVAPORATING SURFACE OF SAID FIRST HEAT PIPE FOR ENHANCING THE EVAPORATING SURFACE SO AS TO INCREASE THE RATE OF HEAT TRANSFER FROM THE FIRST CUP-LIKE MEMBER TO THE FLUID COOLANT IN SAID FIRST HEAT PIPE.
Claim 2
Dependent Claim 508 words
A HIGH PRESSURE-INTERFACE-FREE HEAT-PIPE COOLED POWER SEMICONDUCTOR DEVICE ASSEMBLY COMPRISING A PRESSURE-INTERFACE-FREE THIN INTEGRAL POWER SEMICONDUCTOR DEVICE-CUP MEMBER UNIT INCLUDING A POWER SEMICONDUCTOR DEVICE CONSISTING OF A BODY OF SEMICONDUCTOR MATERIAL DEFINED BY FIRST AND SECOND FLAT PARALLEL MAJOR SURFACES, FIRST AND SECOND THIN CUP-LIKE MEMBERS HAVING OUTER BOTTOM SURFACES RESPECTIVELY BONDED DIRECTLY TO THE FIRST AND SECOND FLAT PARALLEL SURFACES OF THE BODY OF SEMICONDUCTOR MATERIAL SO THAT THE INTEGRAL POWER SEMICONDUCTOR DEVICECUP MEMBER UNIT IS PRESSURE-INTERFACE-FREE, SAID CUP-LIKE MEMBERS FABRICATED OF A GOOD ELECTRICALLY AND THERMALLY CONDUCTIVE MATERIAL, AND CREEPAGE PATH LENGTHENING MEANS FORMED ALONG OUTER SIDE WALL PORTIONS OF SAID CUP-LIKE MEMBERS FOR INCREASING THE CREEPAGE PATH ACROSS SAID POWER SEMICONDUCTOR DEVICE, SAID POWER SEMICONDUCTOR DEVICE DEFINED AS DEVELOPING A THERMAL DENSITY OF AT LEAST 100 WATTS PER SQUARE INCH OF SURFACE AREA, A FIRST LONG NONWICKED GRAVITY-RETURN HEAT PIPE HAVING AN EVAPORATING SURFACE END WALL IN THERMAL CONTACT WITH AN INNER BOTTOM SURFACE OF SAID FIRST CUP-LIKE MEMBER FOR REMOVINMG HEAT THEREFROM, SAID FIRST NONWICKED GRAVITY-RETURN HEAT PIPES COMPRISING A FIRST ENCLOSED ELONGATED HOLLOW CHAMBER HAVING AN EVAPORATIO SECTION AT A FIRST END THEREOF RESPECTIVELY DEFINED BY THE EVAPORATING SURFACE END WALL AND A CONDENSER SECTION AT A SECOND END THEREOF REMOTE FROM THE FIRST END, AND A TWO-PHASE FLUID COOLANT CONTAINED WITHIN SAID FIRST CHAMBER AND BEING OF SUFFICIENT VOLUME IN THE LIQUID STATE TO CAUSE FULL IMMERSION OF AT LEAST THE HEATED PORTION OF THE EVAPORATING SURFACE, FIRST AND SECOND ELECTRICAL CONDUCTORS RESPECTIVELY CONNECTED TO SAID ASSEMBLY FOR SUPPLYING ELECTRICAL POWER TO SAID POWER SEMICONDUCTOR DEVICE, A STATIC FIRST THIN FILM OF A HIGH THERMAL AND ELECTRICAL CONDUCTIVITY METAL DISPOSED EXTERNAL OF SAID INTEGRAL SEMICONDUCTOR DEVICE-CUP MEMBER UNIT BETWEEN THE INNER BOTTOM SURFACE OF SAID FIRST CUP-LIKE MEMBER AND EVAPORATING SURFACE END WALL OF SAID FIRST HEAT PIPE AND IN WETTING CONTACT THEREWITH AND FORMING A STATIC FIRST THIN LIQUID METAL INTERFACE THEREBETWEEN DURING OPERATION OF SAID SEMICONDUCTOR DEVICE, SAID FIRST THIN FILM OF METAL OF THICKNESS IN THE RANGE OF 1/10 TO 5 MOLS, THE THIN LIQUID METAL INTERFACE NOT MECHANICALLY STRESSING THE THIN INTEGRAL POWER SEMICONDUCTOR DEVICE-CUP MEMBER UNIT AND THE HIGH THERMAL AND ELECTRICAL CONDUCTIVITY OF THE LIQUID METAL PERMITTING THE COOLING OF LARGE DIAMETER SEMICONDUCTOR DEVICES WITHOUT THE NEED FOR LARGE CLAMPING FORCES TO OBTAIN HIGH PRESSURE JOINTS BETWEEN SAID HEAT PIPE AND SAID THIN INTEGRAL POWER SEMICONDUCTOR DEVICE-CUP MEMBER UNIT, THE CLOSE SPACING BETWEEN THE FIRST HEAT PIPE AND HEAT-EMITTING POWER SEMICONDUCTOR DEVICE AND LACK OF PRESSURE INTERFACES THEREBETWEEN AND IN THE INTEGRAL POWER SEMICONDUCTOR DEVICE-CUP MEMBER UNIT SUBSTANTIALLY DECREASING THE STEADY-STATE THERMAL RESISTANCE AS WALL AS IMPROVING THE TRANSIENT RESPONSE OF THE HEAT-PIPE COOLED POWER SEMICONDUCTOR DEVICE ASSEMBLY TO OBTAIN IMPROVED SINGLE-SIDED COOLING OF THE DEVICE WITHOUT REQUIRING A COSTLY AND MECHANICALLY COMPLEX CLAMPING DEVICE, AND MEANS CONNECTED ONLY TO THE EVAPORATING SURFACE OF SAID FIRST HEAT PIPE FOR ENHANCING THE EVAPORATING SURFACE SO AS TO INCREASE THE RATE OF HEAT TRANSFER FROM THE FIRST CUP-LIKE MEMBER TO THE FLUID COOLANT IN SAID FIRST HEAT PIPE.
Claim 3
Dependent Claim 360 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 1 and further comprising a second long nonwicked gravity-return heat pipe having an evaporating surface end wall in thermal contact with an inner bottom surface of said second cup-like member for removing heat therefrom, said second nonwicked gravity-return heat pipe comprising a second enclosed elongated hollow chamber having an evaporator section at a first end thereof respectively defined by the evaporating surface end wall and a condenser section at a second end thereof remote from the first end, a two-phase fluid coolant contained within said second chamber and being of sufficient volume in the liquid state to cause full immersion of at least the heated portion of the evaporating surface, and a static second thin film of a high thermal and electrical conductivity metal disposed external of said integral semiconductor device-cup member unit between the inner bottom surface of said second cup-like member and evaporating surface end wall of said second heat pipe and in wetting contact therewith and forming a static second thin liquid metal interface therebetween during operation of said semiconductor device, said second thin film of metal of thickness in the range of 1/10 to 5 mils, the close spacing between said first and second heat pipes as determined by the small thickness dimensIons of said thin integral semiconductor device-cup member unit and first and second liquid metal interfaces and lack of pressure interfaces therebetween substantially decreasing the steady-state thermal resistance as well as improving the transient response to obtain improved double-sided cooling of the device, means connected only to the evaporating surfaces of said second heat pipe for enhancing the evaporating surface so as to increase the rate of heat transfer from the second cup-like member to the fluid coolant in said second heat pipe, and clamping means for retaining said integral power semiconductor device-cup member unit between said first and second heat pipes in a single assembly, said clamping means providing only a low clamping force which thereby results in said integral power semiconductor device-cup member unit not being stressed as when utilizing high pressure joints and being an easily removable and replaceable component.
Claim 4
Dependent Claim 33 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 2 wherein said first and second thin films of metal are each of thickness in the range of 1/10 to 1 mil.
Claim 5
Dependent Claim 35 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 2 wherein said first and second thin films of metal are each formed from low melting temperature eutectic alloys of combinations of particular metals.
Claim 6
Dependent Claim 20 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 4 wherein the particular metals are sodium and potassium.
Claim 7
Dependent Claim 24 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 4 wherein the particular metals are indium, tin, lead, antimony, bismuth and cadmium.
Claim 8
Dependent Claim 32 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 2 wherein said first and second thin films of metal are each formed from a particular low melting temperature pure metal.
Claim 9
Dependent Claim 18 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 7 wherein the particular metal is gallium.
Claim 10
Dependent Claim 28 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 1 wherein said cup-like members are each of thickness in the range of 2 to 10 mils.
Claim 11
Dependent Claim 30 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 9 wherein said cup-like members are fabricated of a metal selected from the group consisting of copper and aluminum.
Claim 12
Dependent Claim 28 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 1 wherein said cup-like members are each of thickness in the range of 2 to 6 mils.
Claim 13
Dependent Claim 30 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 11 wherein said cup-like members are fabricated of a metal selected from the group consisting of tungsten and molybdenum.
Claim 14
Dependent Claim 39 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 1 wherein said creepage path lengthening means comprises a unitary layer of an electrically insulating material formed along outer side surfaces of said first and second cup-like members.
Claim 15
Dependent Claim 31 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 13 wherein the unitary layer is of a ceramic composition, and provides a hermetic seal around said power semiconductor device.
Claim 16
Dependent Claim 33 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 13 wherein the unitary layer is of a rubber composition and fills the entire void between said first and second cup-like members.
Claim 17
Dependent Claim 40 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 2 wherein at least a substantial portion of each of said first and second heat pipes is oriented at an angle greater than 0* with respect to the horizontal.
Claim 18
Dependent Claim 32 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 2 and further comprising a third electrical conductor connected to said power semiconductor device which is of the three electrode type.
Claim 19
Dependent Claim 42 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 2 wherein the condenser sections of said chambers are provided with cooling fins along the outer surfaces thereof for increasing the rate of heat transfer to ambient air surrounding said assembly.
Claim 20
Dependent Claim 37 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 2 wherein said evaporating surface enhancing means is a pair of porous metallic layer structures which are sintered to the evaporating surfaces of said heat pipes.
Claim 21
Dependent Claim 32 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 19 wherein said porous metallic layer structures are each of substantially uniform thickness in the range of 10 to 50 mils.
Claim 22
Dependent Claim 34 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 20 wherein said porous metallic structures are each fabricated of a metal selected from the group consisting of copper, nickel and stainless steel.
Claim 23
Dependent Claim 37 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 2 wherein said evaporating surface enhancing means is an irregular surface connected to the evaporating surfaces of said heat pipes for increasing the surface area thereof.
Claim 24
Dependent Claim 26 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 22 wherein said irregular surface consists of small fins formed of a heat conductive material.
Claim 25
Dependent Claim 34 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 22 wherein said irregular surface consists of a plurality of small solid metallic members bonded to the evaporating surfaces of said heat pipes.
Claim 26
Dependent Claim 23 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 24 wherein said small solid metallic members are circular in cross section.
Claim 27
Dependent Claim 23 words
The heat-pipe cooled power semiconductor device assembly set forth in claim 24 wherein said small solid metallic members are square in cross section.
Claim 28
Dependent Claim 24 words
The heat-pipe cooled power semiconductor device set forth in claim 24 wherein said small solid metallic members are each approximately 0.15 inch in height.
Claim 29
Dependent Claim 36 words
The heat-pipe cooled power semiconductor device set forth in claim 24 wherein said small solid metallic members are fabricated of a metal selected from the group consisting of aluminum, copper, nickel, stainless steel, molybdenum and tungsten.

References Cited (Backward Citations)

US3226608A Cited
US3248615A Cited
US3736474A Cited
US3746947A Cited
US3739234A Cited
US3673306A Cited
US3739235A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-12-02 1978-06-03 1978-12-03 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-12-02 1982-06-03 1982-12-03 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-12-02 1986-06-03 1986-12-03 $7700.00 Window Closed / Lapsed

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