Patent US4377804A successfully refreshed from Google Patents.
Patent US3845495A successfully refreshed from Google Patents.
US3845495A
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High voltage, high frequency double diffused metal oxide semiconductor device
Assignee: Signetics Corp
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Filing: 1973-10-12
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Granted: 1974-10-29
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Expires: 1993-10-12
Abstract
Abstract High voltage, high frequency metal oxide semiconductor device having a precisely controlled channel extending to the surface and in which a metallization overlies a thick insulating layer and substantially covers the depletion region in the drain for breakdown voltage control. In the method, a double diffusion is carried out through the same opening in an oxide or insulating layer to obtain a very narrow precise channel region with a minimum of spreading and, in addition, metallization is formed which covers the depletion region.
Inventors
- 👤 T Cauge
- 👤 J Kocsis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 03:12
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/60; H10D30/64; H10D30/65; H10D30/657; H10D30/67; H10D30/6704; H10D30/6713; H10D30/6715; H10D30/6717; H10D30/6729; H10D30/673; H10D30/6731; H10D30/674; H10D30/6741; H10D30/6743; H10D30/6745; H10D62/00; H10D62/10; H10D62/124; H10D62/126; H10D62/127; H10D64/00; H10D64/111; H10D64/20; H10D64/27; H10D64/311; H10D64/411; H10D64/511; H10D64/514; H10D64/516; Y; Y10; Y10S; Y10S148/00; Y10S148/049; Y10S148/085; Y10S148/15; Y10S148/167
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
267 words
IN A HIGH VOLTAGE, HIGH FREQUENCY METAL INSULATOR SEMICONDUCTOR DEVICE, A SEMICONDUCTOR BODY HAVING A CONDUCTIVITY OF ONE TYPE AND FORMING A SUBSTANTIALLY UNIFORM LIGHTLY DOPED DRAIN REGION, SAIID SEMICONDUCTOR BODY HAVING A SUBSTANTIALLY PLANAR SURFACE, A HEAVILY DOPED DRAIN CONTACT REGION FORMED IN THE DRAIN REGION AND EXTENDING TO SAID SURFACE A LAYER OF INSULATING MATERIAL FORMED ON SAID SURFACE, A CHANNEL REGION FORMED IN THE SEMICONDUCTOR BODY HAVING A CONDUCTIVITY OPPOSITE THAT OF THE SEMICONDUCTOR BODY TO FORM A FIRST P-N JUNCTION EXTENDING TO THE SURFACE BENEATH SAID LAYER OF INSULATING MATERIAL, A SOURCE REGION FORMED WITHIN THE CHANNEL REGION OF THE FIRST NAMED CONDUCTIVITY TYPE AND FORMING A SECOND P-N JUNCTION EXTENDING TO SAID SURFACE BENEATH SAID LAYER OF INSULATING MATERIAL, SAID FIRST AND SECOND P-N JUNCTIONS EXTENDING TO SAID SURFACE BENEATH SAID LAYER OF INSULATING MATERIAL, SAID FIRST AND SECOND P-N JUNCTIONS DEFINING A CHANNEL OF PRECISE LENGTH, METALLIZATION FORMING GATE, SOURCE AND DRAIN CONTACTS, SAID METALLIZATION OVERLYING SAID LAYER OF INSULATING MATERIAL AND MAKING CONTACT THROUGH THE INSULATING LAYER IWTH THE DRAIN CONTACT AND SOURCE REGIONS, SAID METALLIZATION OVERLYING THE CHANNEL AND BEING SEPARATED FROM THE CHANNEL BY SAID LAYER OF INSULATING MATERIAL TO FORM THE GATE CONTACT, AND ADDITIONAL METALLIZATION FORMED ON SAID LAYER OF INSULATING MATERIAL AND EXTENDING BETWEEN THE METALLIZATION WHICH PROVIDE SAID GATE AND DRAIN CONTACTS AND IN SUCH A MANNER SO THAT THE ADDITIONA METALLIZATION IS DISPOSED UNSYMMETRICALLY WITH RESPECT TO THE CHANNEL, SAID ADDITIONAL METALLIZATION EXTENDINNG OVER A DRIFT REGION FORMED IN THE UNIFORMLY LIGHTLY DOPED REGION BETWEEN THE CHANNEL AND THE HEAVILY DOPED CONTACT REGION.
Claim 2
Dependent Claim
267 words
IN A HIGH VOLTAGE, HIGH FREQUENCY METAL INSULATOR SEMICONDUCTOR DEVICE, A SEMICONDUCTOR BODY HAVING A CONDUCTIVITY OF ONE TYPE AND FORMING A SUBSTANTIALLY UNIFORM LIGHTLY DOPED DRAIN REGION, SAIID SEMICONDUCTOR BODY HAVING A SUBSTANTIALLY PLANAR SURFACE, A HEAVILY DOPED DRAIN CONTACT REGION FORMED IN THE DRAIN REGION AND EXTENDING TO SAID SURFACE A LAYER OF INSULATING MATERIAL FORMED ON SAID SURFACE, A CHANNEL REGION FORMED IN THE SEMICONDUCTOR BODY HAVING A CONDUCTIVITY OPPOSITE THAT OF THE SEMICONDUCTOR BODY TO FORM A FIRST P-N JUNCTION EXTENDING TO THE SURFACE BENEATH SAID LAYER OF INSULATING MATERIAL, A SOURCE REGION FORMED WITHIN THE CHANNEL REGION OF THE FIRST NAMED CONDUCTIVITY TYPE AND FORMING A SECOND P-N JUNCTION EXTENDING TO SAID SURFACE BENEATH SAID LAYER OF INSULATING MATERIAL, SAID FIRST AND SECOND P-N JUNCTIONS EXTENDING TO SAID SURFACE BENEATH SAID LAYER OF INSULATING MATERIAL, SAID FIRST AND SECOND P-N JUNCTIONS DEFINING A CHANNEL OF PRECISE LENGTH, METALLIZATION FORMING GATE, SOURCE AND DRAIN CONTACTS, SAID METALLIZATION OVERLYING SAID LAYER OF INSULATING MATERIAL AND MAKING CONTACT THROUGH THE INSULATING LAYER IWTH THE DRAIN CONTACT AND SOURCE REGIONS, SAID METALLIZATION OVERLYING THE CHANNEL AND BEING SEPARATED FROM THE CHANNEL BY SAID LAYER OF INSULATING MATERIAL TO FORM THE GATE CONTACT, AND ADDITIONAL METALLIZATION FORMED ON SAID LAYER OF INSULATING MATERIAL AND EXTENDING BETWEEN THE METALLIZATION WHICH PROVIDE SAID GATE AND DRAIN CONTACTS AND IN SUCH A MANNER SO THAT THE ADDITIONA METALLIZATION IS DISPOSED UNSYMMETRICALLY WITH RESPECT TO THE CHANNEL, SAID ADDITIONAL METALLIZATION EXTENDINNG OVER A DRIFT REGION FORMED IN THE UNIFORMLY LIGHTLY DOPED REGION BETWEEN THE CHANNEL AND THE HEAVILY DOPED CONTACT REGION.
Claim 3
Dependent Claim
26 words
A device as in claim 1 wherein said first named metallization and the additional metallization are isolated from each other by said layer of insulating material.
Claim 4
Dependent Claim
20 words
A device as in claim 1 wherein the metallization which forms the gate contact and the additional metallization are interconnected.
Claim 5
Dependent Claim
20 words
A device as in claim 3 wherein the metallization forming the gate contact and the additional metallization are formed integrally.
Claim 6
Dependent Claim
16 words
A device as in claim 1 wherein said first and second P-N junctions are substantially dish-shaped.
Claim 7
Dependent Claim
49 words
A device as in claim 1 wherein said semiconductor body is in the form of a thin layer together with a support structure formed of an insulator carrying said thin layer and wherein said first and second P-N junctions extend completely through the thin layer to the support body.
Claim 8
Dependent Claim
32 words
A device as in claim 1 wherein said semiconductor body is in the form of an epitaxial layer together with a support body formed of a semiconductor material carrying said epitaxial layer.
Claim 9
Dependent Claim
49 words
A device as in claim 1 wherein said semiconductor body is in the form of an island of semiconductor material together with a support body and means for dielectrically isolating the island of semiconductor material from the support body and from any other islands carried by the support body.
Claim 10
Dependent Claim
31 words
A device as in claim 1 wherein the layer of insulating material overlying the channel is relatively thin and wherein the remainder of the layer of insulating material is relatively thick.
Claim 11
Dependent Claim
19 words
A device as in claim 1 wherein said metallization also forms a contact making contact to said channel region.
Claim 12
Dependent Claim
35 words
A device as in claim 10 wherein said channel has the length which is substantially greater at one portion of the surface of the semiconductor body to facilitate making the contact to the channel region.
Claim 13
Dependent Claim
245 words
In a high voltage, high frequency metal insulator semiconductor device, a semiconductor body having a conductivity of one type and forming a substantially lightly uniformly doped drain region, said semiconductor body having a substantially planar surface, a heavily doped drain contact region formed in the drain region and extending to said surface a layer of insulating material formed on said surface, a channel region formed in the semiconductor body and having a conductivity opposite that of the semiconductor body to form a first P-N junction extending to the surface beneath said layer of insulating material, a source region formed within the channel region of the first named conductivity type and forming a second P-N junction extending to said surface beneath said layer of insulating material, said first and second P-N junctions defining a channel of precise length, source and drain metallization formed on said layer of insulating material and extending through said layer of insulating material and making contact with the drain contact and source region, gate metallization separate from said source and drain metallization and overlying said insulating layer in the region of the channel, said gate metallization being formed uniformly so that it is unsymmetrical with respect to the channel and extends over a drift region formed in the lightly doped drain region between the channel and the heavily doped drain contact region whereby the depletion region spreads into the drift region to make it possible for the device to withstand high voltages.
Claim 14
Dependent Claim
245 words
In a high voltage, high frequency metal insulator semiconductor device, a semiconductor body having a conductivity of one type and forming a substantially lightly uniformly doped drain region, said semiconductor body having a substantially planar surface, a heavily doped drain contact region formed in the drain region and extending to said surface a layer of insulating material formed on said surface, a channel region formed in the semiconductor body and having a conductivity opposite that of the semiconductor body to form a first P-N junction extending to the surface beneath said layer of insulating material, a source region formed within the channel region of the first named conductivity type and forming a second P-N junction extending to said surface beneath said layer of insulating material, said first and second P-N junctions defining a channel of precise length, source and drain metallization formed on said layer of insulating material and extending through said layer of insulating material and making contact with the drain contact and source region, gate metallization separate from said source and drain metallization and overlying said insulating layer in the region of the channel, said gate metallization being formed uniformly so that it is unsymmetrical with respect to the channel and extends over a drift region formed in the lightly doped drain region between the channel and the heavily doped drain contact region whereby the depletion region spreads into the drift region to make it possible for the device to withstand high voltages.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-10-28 | 1978-04-29 | 1978-10-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-10-28 | 1982-04-29 | 1982-10-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-10-28 | 1986-04-29 | 1986-10-29 | $7700.00 | Window Closed / Lapsed |