Patent US3797935A successfully refreshed from Google Patents.
US3797935A
Expired / Lapsed
US
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Systems for writing patterns on photosensitive substrates
Assignee: Thales SA
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Filing: 1972-04-25
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Granted: 1974-03-19
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Expires: 1992-04-25
Abstract
Abstract To carry out the exposure of a photoresist at a pattern scale of 1 : 1, a laser writing-in beam is projected onto the latter. The substrate carrying the photoresist undergoes displacements in at least one of two mutually perpendicular directions. Positioning of the laser beam is obtained through the medium of a deflection system comprising a device for generating pulse trains which control a digital optical deflector. The pulse trains are triggered by electrical pulses supplied from interferometric means monitoring the displacement of the substrate. The whole duration of each one of said pulse trains is smaller than the time interval between the triggering pulses.
Inventors
- 👤 R Marcy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 22:53
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70383; G03F7/704; G02; G02F; G02F1/00; G02F1/29; G02F1/31; Y; Y10; Y10S; Y10S430/00; Y10S430/146
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
191 words
A system controlling the displacement of a luminous spot having a predetermined width 1, for inscribing a predetermined pattern onto a photosensitive substrate carried by a table undergoing a translatory motion along a first translation axis, said system comprising: a source of radiant energy emitting a beam for projection of said spot onto said substrate, n positions deflector means located between said source and said table for deflecting said beam along a direction at an angle with said first translation axis, interferometric measuring means associated with said table for supplying triggering pulses respectively emitted in accordance with quantized displacement Delta X of said table along said first translation axis, pulse train generator means having a control input for receiving said triggering pulses and an output delivering pulse trains including a plurality of successive control pulses; motor means being provided for driving said table along said first translation axis: said deflector means having a control input coupled to the output of said pulse train generator means; the whole duration of each one of said pulse trains being smaller than the time interval between one and the next one of said triggering pulses.
Claim 2
Independent Claim
191 words
A system controlling the displacement of a luminous spot having a predetermined width 1, for inscribing a predetermined pattern onto a photosensitive substrate carried by a table undergoing a translatory motion along a first translation axis, said system comprising: a source of radiant energy emitting a beam for projection of said spot onto said substrate, n positions deflector means located between said source and said table for deflecting said beam along a direction at an angle with said first translation axis, interferometric measuring means associated with said table for supplying triggering pulses respectively emitted in accordance with quantized displacement Delta X of said table along said first translation axis, pulse train generator means having a control input for receiving said triggering pulses and an output delivering pulse trains including a plurality of successive control pulses; motor means being provided for driving said table along said first translation axis: said deflector means having a control input coupled to the output of said pulse train generator means; the whole duration of each one of said pulse trains being smaller than the time interval between one and the next one of said triggering pulses.
Claim 3
Dependent Claim
52 words
A system as claimed in claim 1, wherein said pulse train generator means provide trains of N pulses, N being substantially equal to n Delta x/1; the whole duration of each one of said pulse trains being smaller than the time interval between one and the next one of said triggering pulses.
Claim 4
Dependent Claim
39 words
A system as claimed in claim 1, wherein said pulse train generator means comprise: a monostable trigger stage triggered by said triggering pulses, and a clock generator delivering said pulse trains under the control of said monostable trigger stage.
Claim 5
Dependent Claim
46 words
A system as claimed in claim 1, wherein said n positions deflector means comprise: a binary counter having an input for receiving successive control pulses and a plurality of outputs; said n position deflector means further comprising a multistage deflector assembly controlled by said binary counter.
Claim 6
Dependent Claim
20 words
A system as claimed in claim 1, further comprising computer means supplying positioning data; said data controlling said motor means.
Claim 7
Dependent Claim
62 words
A system as claimed in claim 5, further comprising: means for displacing said table along a second translation axis at an angle with said first translation axis, and further interferometric means supplying to said computer means pulses corresponding to quantized displacements of said table along said second translation axis; the positioning data supplied from said computer means controlling said further displacing means.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-03-18 | 1977-09-17 | 1978-03-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-03-18 | 1981-09-17 | 1982-03-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-03-18 | 1985-09-17 | 1986-03-19 | $7700.00 | Window Closed / Lapsed |