US3575588A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron beam circuit pattern generator for tracing microcircuit wire patterns on photoresist overlaid substrates
Assignee: International Business Machines Corp
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Filing: 1968-09-09
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Granted: 1971-04-20
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Expires: 1988-09-09
Abstract
Abstract The tracing of microcircuit wire patterns on photoresist overlaid substrates (circuit boards) by means of an electron beam. Pattern tracing is achieved by controlling the deflection of the beam in conjunction with the oscillatory motion of the substrate mounted on an oscillating stage. A feedback system from a grating on the stage provides synchronized pulses to a clock which in conjunction with the control data derived from a computer, provides control information for a desired circuit pattern.
Inventors
- 👤 Karl Hermann
- 👤 Warren R Wrenner
- 👤 Joseph V Riley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 11:41
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/0073; H05K3/0082
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
140 words
A circuit pattern generator for tracing a waveform pattern on an emulsion side of a circuit board, or the like, comprising: mechanical means for oscillating said circuit board, an electron beam focused on the emulsion side of said circuit board, deflection control means for deflecting said beam, voltage generating means including a street selection network for generating street level voltage, a staircase voltage generator for producing positive and negative staircase voltages, a mixer for mixing said staircase voltages with a desired street level voltage and issuing a deflection output voltage to said deflection control means to cause deflection of said beam during oscillations of said circuit board to produce a desired waveform Pattern in the emulsion side of said circuit board, and synchronizing means synchronizing the oscillating movements of said circuit board with the issuance of said deflection output voltage.
Claim 2
Dependent Claim
140 words
A circuit pattern generator for tracing a waveform pattern on an emulsion side of a circuit board, or the like, comprising: mechanical means for oscillating said circuit board, an electron beam focused on the emulsion side of said circuit board, deflection control means for deflecting said beam, voltage generating means including a street selection network for generating street level voltage, a staircase voltage generator for producing positive and negative staircase voltages, a mixer for mixing said staircase voltages with a desired street level voltage and issuing a deflection output voltage to said deflection control means to cause deflection of said beam during oscillations of said circuit board to produce a desired waveform Pattern in the emulsion side of said circuit board, and synchronizing means synchronizing the oscillating movements of said circuit board with the issuance of said deflection output voltage.
Claim 3
Dependent Claim
43 words
A circuit pattern generator as in claim 1 further including a clock connected to said synchronizing means for providing clock pulses to said voltage generating means for effecting the synchronization between the oscillations of said circuit board and the deflections of said beam.
Claim 4
Dependent Claim
49 words
A circuit pattern generator as in claim 2 further including a computer interconnected with said clock and said voltage generating means for selectively applying street level voltages with selected positive and negative staircase voltages to produce different desired waveform patterns on different selected street areas of said circuit board.
Claim 5
Dependent Claim
40 words
A circuit pattern generator as in claim 3 further including a counter interconnected between said clock and said computer to provide the latter with a count of the number of clock pulses issued during an oscillation of said circuit board.
Claim 6
Dependent Claim
36 words
A circuit pattern generator as in claim 4 further including voltage return control means for said staircase generators and means under control of said computer to apply control signal for energizing said voltage return control means.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-04-19 | 1974-10-19 | 1975-04-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-04-19 | 1978-10-19 | 1979-04-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-04-19 | 1982-10-19 | 1983-04-20 | $7700.00 | Window Closed / Lapsed |