US3632205A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electro-optical image-tracing systems, particularly for use with laser beams
Assignee: Thales SA
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Filing: 1970-01-26
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Granted: 1972-01-04
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Expires: 1990-01-26
Abstract
Abstract To provide for digital positioning, without inertia of moving parts, a laser beam is transmitted to a substrate which is to be exposed, etched, or the like, particularly when microcircuits are to be produced, by monitoring the displacement of the substrate, mechanically, in two mutually perpendicular directions and positioning the laser beam, as monitored, in at least one direction by controlling voltages applied to a deflector cell in the path of the laser beam, by digitally, selectively, energizing an electro optical crystal effective to rotate the polarized laser beam through a plane of 90*, followed by a doubly refracting crystal which deviates the path of the laser beam, depending on its direction of polarization with respect to the optical axis of the crystal, so that, by successive deflections, the beam, from the laser, can be positioned in predetermined locations on the substrate. The entire arrangement is preferably computer controlled, so that data inserted into the computer will cause deflection of the laser beam in accordance with a predetermined program.
Inventors
- 👤 Raymond Marcy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:08
CPC Classifications
H; H10; H10P; H10P72/00; B; B23; B23K; B23K26/00; B23K26/08; B23K26/083; B23K26/0853; B25; B25H; B25H7/00; G; G02; G02F; G02F1/00; G02F1/29; G02F1/31; G03; G03F; G03F7/00; G03F7/70; G03F7/70383; G03F7/704; G03F7/70425; G03F7/70466; G06; G06K; G06K1/00; G06K1/12; G06K1/126
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
114 words
An electro-optical tracing system in which a laser light beam (1) is transmitted to a substrate (6) comprising means (71, 72) monitoring the displacement of said substrate in two mutually perpendicular directions; a deflection control means (9); said deflection control means having at least two inputs respectively connected to said monitoring means (71, 72); motors (81, 82) positioning said substrate, said motors being connected to and controlled by data derived from said deflection control means (9); and a digital optical deflector (3) connected to said deflection control means (9) and controlled by data from said deflection control means inputs; said deflector being inserted in the laser beam (1) between its source and said substrate.
Claim 2
Dependent Claim
114 words
An electro-optical tracing system in which a laser light beam (1) is transmitted to a substrate (6) comprising means (71, 72) monitoring the displacement of said substrate in two mutually perpendicular directions; a deflection control means (9); said deflection control means having at least two inputs respectively connected to said monitoring means (71, 72); motors (81, 82) positioning said substrate, said motors being connected to and controlled by data derived from said deflection control means (9); and a digital optical deflector (3) connected to said deflection control means (9) and controlled by data from said deflection control means inputs; said deflector being inserted in the laser beam (1) between its source and said substrate.
Claim 3
Dependent Claim
24 words
System as claimed in claim 1 in which the digital deflector (3) is effective to deflect the beam in one of said directions only.
Claim 4
Dependent Claim
38 words
System as claimed in claim 1, including a light modulator (2) connected to and controlled by the deflection control means (9) arranged in the path of the laser beam between the laser source (1) and the deflector (3).
Claim 5
Dependent Claim
56 words
System as claimed in claim 1, wherein the deflection control means includes a computer (9) comprising two subsystems (91 and 92) to which there are respectively applied a program (93) relating to the control of the digital deflector (3), and a program (94) relating to the displacements of the substrate (6) by said motors (81, 82).
Claim 6
Dependent Claim
74 words
System as claimed in claim 4, in which the subsystem (91) of the computer (9), which is responsible for the control of the digital deflector (3), is characterized in that it comprises a binary counter (4) supplied with the data coming from one of the displacement monitoring means (72), said counter only operating in respect of one of said directions of displacement of the substrate (6) and remaining blocked in respect of the other.
Claim 7
Dependent Claim
63 words
System as claimed in claim 4, in which the subsystem (92) of the computer (9), which is responsible for the control of the displacements of the substrate (6), is characterized in that it comprises a command counter for each direction of displacement, as well as a circuit for comparing the data supplied by said counter, with those supplied by the corresponding program (94).
Claim 8
Dependent Claim
42 words
System as claimed in claim 1, characterized in that a device (3'') for selecting elementary patterns, is inserted in the laser beam between the laser source (1) and the digital deflector (3), said device being controlled by the deflection control means (9).
Claim 9
Dependent Claim
35 words
System as claimed in claim 7, in which the device (3'') for selecting elementary patterns is characterized in that it comprises a digital deflector associated with a plate carrying holograms of the said elementary patterns.
Claim 10
Dependent Claim
65 words
System as claimed in claim 1, in combination with an optical projection device (FIG. 2; 11) for projecting patterns which are to be reproduced and which are stored optically therein; a flashlamp (12) associated with said projection device; and a semireflective mirror (10), in the path of the beam between the digital deflector (3), the path of light from said projection device, and said substrate.
Claim 11
Dependent Claim
52 words
System as claimed in claim 9, including a control interconnection between the selection device (11), the flashlamp (12), and the deflection control means (9), to effect control thereof while controlling the digital deflector (3), in order to enable production of internal connections within projected patterns as well as the interconnections between patterns.
Claim 12
Dependent Claim
68 words
System as claimed in claim 9, further comprising an image system (13, 14) located behind the semireflective mirror (10); optical means including an optical projection system (15, 16) directing beams of light from said laser source (1) and said optical projection system (15, 16), towards the plane of said substrate to enable simultaneous tracing of a second pattern (602) identical to the first (601), on the substrate (6).
Claim 13
Dependent Claim
102 words
SysteM as claimed in claim 1 wherein the digital optical deflector, inserted in the path of said laser beam comprises a succession of cells, each one comprising in series: an electro-optical crystal effective to rotate polarized laser beam light through a plane of 90*, when energized, said voltage being applied, selectively, as controlled by said deflection control means (9); and a doubly reflecting crystal in the optical path of the light from said electro optical crystal and selectively deflecting, or not deflecting light transmitted therethrough depending upon the plane of polarization of light applied thereto, as controlled by said deflection control means.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-01-03 | 1975-07-05 | 1976-01-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-01-03 | 1979-07-05 | 1980-01-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-01-03 | 1983-07-05 | 1984-01-04 | $7700.00 | Window Closed / Lapsed |