US3524394A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Monolithic circuit manufacture and photoresist exposure technique utilized therein
Assignee: International Business Machines Corp
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Filing: 1966-11-16
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Granted: 1970-08-18
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Expires: 1986-11-16
Abstract
No abstract record available.
Inventors
- 👤 Brian Sunners
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 15:35
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/47; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70383; G03F7/704; H10W20/00; H10W20/40
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-08-17 | 1974-02-16 | 1974-08-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-08-17 | 1978-02-16 | 1978-08-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-08-17 | 1982-02-16 | 1982-08-18 | $7700.00 | Window Closed / Lapsed |