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US3770518A
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Method of making gallium arsenide semiconductive devices
Assignee: Varian Medical Systems Inc
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Filing: 1971-01-28
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Granted: 1973-11-06
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Expires: 1991-01-28
Abstract
Abstract Germanium is disclosed as a p-type dopant useful in gallium arsenide semiconductive devices such as varactors, IMPATT diodes, photocathodes, and the like. p-n junction gallium arsenide devices are fabricated by successively sliding a germanium doped melt of gallium arsenide in gallium and an n-doped melt of gallium arsenide in gallium over a gallium arsenide seed crystal for growing successive epitaxial p and n or n and p layers on the substrate while exposing the substrate to only one thermal cycle, whereby improved p-n junction devices are obtained.
Inventors
- 👤 F Rosztoczy
- 👤 C Casau
- 👤 J Kinoshita
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 21:34
CPC Classifications
C; C30; C30B; C30B19/00; C30B19/06; C30B19/063; H; H10; H10D; H10D99/00; H10P; H10P14/00; H10P14/20; H10P14/26; H10P14/263; H10P14/265; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2911; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3221; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444; Y; Y10; Y10S; Y10S252/00; Y10S252/95
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
28 words
The method of claim 1 wherein the substrate and charge material are raised to a temperature of about 740* C, before exposing the substrate to the charge melt.
Claim 2
Dependent Claim
66 words
The method of claim 1 wherein the GaAs substrate is doped with n type material, and is first exposed to the n type charge melt and then exposed to the p type charge melt containing the germanium p type dopant, causing the resulting device to have the p doped layer outer most and the n doped layer intermediate between the substrate and the p doped layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-11-05 | 1977-05-07 | 1977-11-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-11-05 | 1981-05-07 | 1981-11-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-11-05 | 1985-05-07 | 1985-11-06 | $7700.00 | Window Closed / Lapsed |