Patent US3705769A successfully refreshed from Google Patents.
US3705769A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical alignment and contact printing system with improved chuck assembly
Assignee: Individual
•
Filing: 1970-11-12
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Granted: 1972-12-12
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Expires: 1990-11-12
Abstract
Abstract A semiconductor wafer is loaded onto a pivotally-mounted portion of a chuck assembly and held in place by application of a vacuum to the lower surface of the wafer. The chuck assembly is then driven upward under fluid pressure to position the upper surface of the wafer in abutment upon the lower surface of a mask supported on a holder above the chuck assembly and to thereby align these surfaces in parallel planes. After this parallel plane alignment operation, the chuck assembly is lowered and moved relative to the mask holder to align a pattern on the upper surface of the wafer with a corresponding pattern on the lower surface of the mask. Once this pattern alignment operation has been completed, the chuck assembly is again driven upward under fluid pressure to position the upper surface of the wafer in abutment upon the lower surface of the mask. A first normally retracted seal ring supported by the chuck assembly around the wafer is then inflated to sealingly engage the lower surface of the mask. The region enclosed by the mask, the first seal ring, and the chuck assembly is thereupon evacuated clamping the chuck assembly, the wafer, and the mask together and permitting equalization of the pressure applied to the chuck assembly and the mask. A second normally retraced seal ring supported by the chuck assembly within the first seal ring beneath a peripheral portion of the wafer may also be inflated to sealingly engage the lower surface of the wafer. In this case, the region enclosed by the mask, the first seal ring, the portion of the chuck assembly between the first and second seal rings, the second seal ring, and the wafer is evacuated clamping the chuck assembly, the wafer, and the mask together and permitting equalization of the pressure applied to the wafer and the mask. In either case, a photosensitive film on the upper surface of the wafer is then exposed through the mask, the seal or seals deflated, the chuck assembly lowered, and the exposed wafer unloaded.
Inventors
- 👤 Karl-Heinz Johannsmeier
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 10:00
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
205 words
Apparatus for use in aligning a first element with respect to a second element and for clamping the first and second elements together after they are aligned, said apparatus comprising: first means for holding the first element on an element bearing surface thereof; second means for holding the second element; one of said first and second means being movable between a first position away from the other and a second position closer to the other; third means for relatively moving the first and second means in substantially parallel planes to align the first element with respect to the second element; fourth means normally retracted from the element bearing surface of the first means and operable for sealingly engaging both the first means and one of the second means and second element around the first element when said one of the first and second means is in the second position; and fifth means for at least partially evacuating a region enclosed between the first means, the second element, and the fourth means when it sealingly engages both the first means and said one of the second means and second element around the first element to clamp the first and second elemeNts together after they are aligned.
Claim 2
Dependent Claim
205 words
Apparatus for use in aligning a first element with respect to a second element and for clamping the first and second elements together after they are aligned, said apparatus comprising: first means for holding the first element on an element bearing surface thereof; second means for holding the second element; one of said first and second means being movable between a first position away from the other and a second position closer to the other; third means for relatively moving the first and second means in substantially parallel planes to align the first element with respect to the second element; fourth means normally retracted from the element bearing surface of the first means and operable for sealingly engaging both the first means and one of the second means and second element around the first element when said one of the first and second means is in the second position; and fifth means for at least partially evacuating a region enclosed between the first means, the second element, and the fourth means when it sealingly engages both the first means and said one of the second means and second element around the first element to clamp the first and second elemeNts together after they are aligned.
Claim 3
Dependent Claim
143 words
Apparatus as in claim 1 wherein: said apparatus includes sixth means normally retracted from the element bearing surface of the first means and operable for sealingly engaging both the first means and a peripheral portion of the first element when said one of the first and second means is in the second position; and said fifth means is operable for at least partially evacuating a region enclosed between the fourth means when it sealingly engages both said first means and said one of the second means and second element around the first element, the sixth means when it sealingly engages both the first means and the peripheral portion of the first element, a portion of the first means between the fourth and sixth means, the first element, and the second element to clamp the first and second elements together after they are aligned.
Claim 4
Dependent Claim
67 words
Apparatus as in claim 1 wherein said fourth means is supported by one of the first and second means and is normally retracted from the element bearing surface of the first means to permit the first element to be loaded onto and unloaded from the first means along the element bearing surface thereof when said one of the first and second means is in the first position.
Claim 5
Dependent Claim
299 words
Apparatus as in claim 1 wherein: said first means comprises chuck means for holding a workpiece comprising the first element on a plane surface of the chuck means; said second means comprises holder means for holding a mask comprising the second element; said first means further comprises drive means for moving the chuck means between the first position away from the holder means and the second position closer to the holder means; said chuck means is supported by the drive means for pivotal movement to orient a first surface of the workpiece and an adjacent first surface of the mask in substantially parallel planes when these adjacent surfaces are brought into abutment; said third means is operable for relatively moving the chuck means and the holder means in substantially parallel planes when the chuck means is in a third position between the first and second positions to align the workpiece with respect to the mask; said fourth means comprises a first resilient seal supported by one of the chuck means and drive means around the workpiece but normally retracted from the plane of the workpiece bearing surface of the chuck means; said first resilient seal is operable for sealingly engaging both said one of the chuck means and drive means and one of the holder means and mask around the workpiece when the chuck means is in the second position; said fifth means includes a conduit communicating with the region enclosed between the chuck means, the mask, and the first resilient seal when it sealingly engages both said one of the chuck means and drive means and said one of the holder means and mask around the workpiece; and said fifth means is operable for at least partially evacuating this region to clamp the workpiece and the mask together.
Claim 6
Dependent Claim
95 words
Apparatus as in claim 4 wherein: said apparatus includes a workpiece loading and unloading platform lying in substantially the same plane as the workpiece bearing surface of the chuck means; and said first resilient seal is normally retracted from the plane of the workpiece bearing surface of the chuck means to permit the workpiece to be loaded onto and unloaded from the chuck means along and parallel to the plane of the workpiece loading and unloading platform and the workpiece bearing surface of the chuck means when the chuck means is in the first position.
Claim 7
Dependent Claim
114 words
Apparatus as in claim 4 wherein: said chuck means comprises a wafer chuck for holding a semiconductive wafer comprising the workpiece on a plane surface of the wafer chuck; said holder means comprises a mask holder for holding the mask, said mask holder being supported above the wafer chuck; said apparatus includes optical means for viewing the wafer and thE mask held by the wafer chuck and the mask holder, respectively, while the wafer and the mask are being aligned; and said apparatus includes means for exposing a photosensitive film on the first surface of the wafer through the mask after the wafer and the mask are aligned and while they are clamped together.
Claim 8
Dependent Claim
54 words
Apparatus as in claim 4 wherein: said first resilient seal comprises a first inflatable seal ring supported by the chuck means around the workpiece; and said apparatus includes means for inflating the first inflatable seal ring to sealingly engage a marginal portion of the mask when the chuck means is in the second position.
Claim 9
Dependent Claim
54 words
Apparatus as in claim 4 wherein: said first resilient seal comprises a first inflatable seal ring supported by said drive means around the workpiece; and said apparatus includes means for inflating the first inflatable seal ring to sealingly engage a marginal portion of the mask when the chuck means is in the second position.
Claim 10
Dependent Claim
112 words
Apparatus as in claim 8 including: sixth means for preventing relative movement between the chuck means and the drive means except by a limited amount along a common vertical axis; and seventh means supported by one of the chuck means and drive means for slidably sealingly engaging the other of the chuck means and drive means; said fifth means being operable for at least partially evacuating a region enclosed between the drive means, the seventh means, the chuck means, the mask, and the first inflatable seal ring when it is inflated to sealingly engage the marginal portion of the mask to clamp the workpiece and the mask together after they are aligned.
Claim 11
Dependent Claim
107 words
Apparatus as in claim 9 wherein: said chuck means comprises a first member for holding the workpiece on a plane surface of the first member; said chuck means further comprises a second member for supporting the first member; said sixth means comprises means for clamping the first and second members together; said sixth means further comprises one or more spring elements attached to both the second member and the drive means for preventing relative movement therebetween except by a limited amount along the common vertical axis; and said seventh means comprises a resilient seal ring supported by the first member for slidably sealingly engaging the drive means.
Claim 12
Dependent Claim
171 words
Apparatus as in claim 4 wherein: said apparatus includes a second resilient seal supported by one of the chuck means and drive means; said second resilient seal is normally retracted from the plane of the workpiece bearing surface of the chuck means and is operable for sealingly engaging both a peripheral portion of the workpiece and said one of the chuck means and drive means when the chuck means is in the second position; and said fifth means is operable for at least partially evacuating a region enclosed between the first resilient seal when it sealingly engages both said one of the chuck means and drive means and said one of the holder means and mask, the second resilient seal when it sealingly engages both the peripheral portion of the workpiece and said one of the chuck means and drive means, a portion of the chuck means between the first and second resilient seals, the workpiece, and the mask to clamp the workpiece and the mask together after they are aligned.
Claim 13
Dependent Claim
110 words
Apparatus as in claim 11 wherein: said first resilient seal comprises a first inflatable seal ring supported by said chuck means around the workpiece; said second resilient seal comprises a second inflatable seal ring supported by said chuck means within the first inflatable seal ring and adjacent to the peripheral portion of the workpiece; and said apparatus includes means for inflating the first inflatable seal ring to sealingly engage a marginal portion of the mask when the chuck means is in the second position and for inflating the second inflatable seal ring to sealingly engage the peripheral portion of the workpiece when the chuck means is in the second position.
Claim 14
Dependent Claim
110 words
Apparatus as in claim 11 wherein: said first resilient seal comprises a first inflatable seal ring supported by said drive means around the workpiece; said second resilient seal comprises a second inflatable seal ring supported by said chuck means within the first inflatable seal ring and adjacent to the peripheral portion of the workpiece; and said apparatus includes means for inflating the first inflatable seal ring to sealingly engage a marginal portion of the mask when the chuck means is in the second position and for inflating the second inflatable seal ring to sealingly engage the peripheral portion of the workpiece when the chuck means is in the second position.
Claim 15
Dependent Claim
143 words
Apparatus as in claim 13 including: sixth means for preventing relative movement between the chuck means and the drive means except by a limited amount along a common vertical axis; and seventh means supported by one of the chuck means and drive means for slidably sealingly engaging the other of the chuck means and drive means; said fifth means being operable for at least partially evacuating a region enclosed between the first inflatable seal ring when it is inflated to sealingly engage the marginal portion of the mask, the second inflatable seal ring when it is inflated to sealingly engage the peripheral portion of the workpiece, a portion of the drive means and chuck means between the first and second inflatable seal rings, the seventh means, the workpiece, and the mask to clamp the workpiece and the mask together after they are aligned.
Claim 16
Dependent Claim
107 words
Apparatus as in claim 14 wherein: said chuck means comprises a first member for holding the workpiece on a plane surface of the first member; said chuck means further comprises a second member for supporting the first member; said sixth means comprises means for clamping the first and second members together; said sixth means further comprises one or more spring elements attached to both the second member and the drive means for preventing relative movement therebetween except by a limited amount along the common vertical axis; and said seventh means comprises a resilient seal ring supported by the first member for slidably sealingly engaging the drive means.
Claim 17
Dependent Claim
155 words
In a mask alignment instrument apparatus for engaging a semiconductive wafer with a mask, said apparatus comprising: a base; a mask holder mounted on said base for holding the mask; a chuck carrier mounted on said base for vertical movement relative to said mask holder; a wafer chuck for holding the wafer on a surface thereof; said wafer chuck being supported by said chuck carrier for vertical movement therewith to position the wafer in contact with the mask; a first seal supported by said wafer chuck and normally retracted from the wafer bearing surface thereof; said first seal being operable for sealingly engaging both said wafer chuck and a marginal portion of the mask around the wafer; an aperture in said wafer chuck; and means connected to said aperture for at least partially evacuating a region bounded by said first seal, said wafer chuck, and said mask to clamp the wafer and the mask together.
Claim 18
Dependent Claim
155 words
In a mask alignment instrument apparatus for engaging a semiconductive wafer with a mask, said apparatus comprising: a base; a mask holder mounted on said base for holding the mask; a chuck carrier mounted on said base for vertical movement relative to said mask holder; a wafer chuck for holding the wafer on a surface thereof; said wafer chuck being supported by said chuck carrier for vertical movement therewith to position the wafer in contact with the mask; a first seal supported by said wafer chuck and normally retracted from the wafer bearing surface thereof; said first seal being operable for sealingly engaging both said wafer chuck and a marginal portion of the mask around the wafer; an aperture in said wafer chuck; and means connected to said aperture for at least partially evacuating a region bounded by said first seal, said wafer chuck, and said mask to clamp the wafer and the mask together.
Claim 19
Dependent Claim
44 words
Apparatus as in claim 16 wherein: said first seal comprises a first inflatable seal ring supported by said wafer chuck around the wafer; and said apparatus includes means for inflating said first inflatable seal ring to sealingly engage the marginal portion of the mask.
Claim 20
Dependent Claim
98 words
Apparatus as in claim 16 wherein: said apparatus includes a second seal supported by said wafer chuck, positioned within said first seal, and normally retracted from the wafer bearing surface of said wafer chuck; said second seal is operable for sealingly engaging both said wafer chuck and a peripheral portion of the wafer; and said means is operable for at least partially evacuating a region bounded by said first seal, said second seal, a portion of saiD wafer chuck between said first and second seals, the wafer, and the mask to clamp the wafer and the mask together.
Claim 21
Dependent Claim
83 words
Apparatus as in claim 18 wherein: said first seal comprises a first inflatable seal ring supported by said wafer chuck around the wafer; said second seal comprises a second inflatable seal ring supported by said wafer chuck adjacent to a peripheral portion of the wafer; and said apparatus includes means for inflating said first inflatable seal ring to sealingly engage the marginal portion of the mask and for inflating said second inflatable seal ring to sealingly engage the peripheral portion of the wafer.
Claim 22
Dependent Claim
159 words
In a mask alignment instrument apparatus for engaging a semiconductive wafer with a mask, said apparatus comprising: a base; a mask holder mounted on said base for holding the mask; a chuck carrier mounted on said base for vertical movement relative to said mask holder; a wafer chuck for holding the wafer on a surface thereof; said wafer chuck being supported by said chuck carrier for vertical movement therewith to position the wafer in contact with the mask; a first seal supported by said chuck carrier around said wafer chuck and normally retracted from a plane including the wafer bearing surface of said wafer chuck; said first seal being operable for sealingly engaging both said chuck carrier and a marginal portion of the mask around the wafer; and first means for at least partially evacuating a region bounded by said first seal, said chuck carrier, said wafer chuck, and said mask to clamp the wafer and the mask together.
Claim 23
Dependent Claim
159 words
In a mask alignment instrument apparatus for engaging a semiconductive wafer with a mask, said apparatus comprising: a base; a mask holder mounted on said base for holding the mask; a chuck carrier mounted on said base for vertical movement relative to said mask holder; a wafer chuck for holding the wafer on a surface thereof; said wafer chuck being supported by said chuck carrier for vertical movement therewith to position the wafer in contact with the mask; a first seal supported by said chuck carrier around said wafer chuck and normally retracted from a plane including the wafer bearing surface of said wafer chuck; said first seal being operable for sealingly engaging both said chuck carrier and a marginal portion of the mask around the wafer; and first means for at least partially evacuating a region bounded by said first seal, said chuck carrier, said wafer chuck, and said mask to clamp the wafer and the mask together.
Claim 24
Dependent Claim
46 words
Apparatus as in claim 20 wherein: said first seal comprises a first inflatable seal ring supported by said chuck carrier around said wafer chuck; and said apparatus includes second means for inflating said first inflatable seal ring to sealingly engage the marginal portion of the mask.
Claim 25
Dependent Claim
96 words
Apparatus as in claim 21 including: third means for preventing relative movement between said wafer chuck and said chuck carrier except by a limited amount along a common vertical axis; and a second seal supported by one of said wafer chuck and chuck carrier for slidably sealingly engaging the other of said wafer chuck and chuck carrier; said first means being operable for at least partially evacuating a region bounded by said first inflatable seal ring, said chuck carrier, said second seal, said wafer chuck, and said mask to clamp the wafer and the mask together.
Claim 26
Dependent Claim
97 words
Apparatus as in claim 20 wherein: said apparatus includes a second seal supported by said wafer chuck and normally retracted from the wafer bearing surface of said wafer chuck; said second seal being operable for sealingly engaging both said wafer chuck and a peripheral portion of the wafer; and said first means is operable for at least partially evacuating a region bounded by said first seal, said second seal, a portion of said chuck carrier and wafer chuck between said first and second seals, the wafer, and the mask to clamp the wafer and the mask together.
Claim 27
Dependent Claim
85 words
Apparatus as in claim 23 wherein: said first seal comprises a first inflatable seal ring supported by said chuck carrier around said wafer chuck; said second seal comprises a second inflatable seal ring supported by said wafer chuck adjacent to a peripheral portion of the wafer; and said apparatus includes second means for inflating said first inflatable seal ring to sealingly engage the marginal portion of the mask and for inflating said second inflatable seal ring to sealingly engage the peripheral portion of the wafer.
Claim 28
Dependent Claim
116 words
Apparatus as in claim 24 including: third means for preventing relative movement between said wafer chuck and said chuck carrier except by a limited amount along a common vertical axis; and a third seal ring supported by one of said wafer chuck and chuck carrier for slidably sealingly engaging the other of said wafer chuck and chuck carrier; said first mEans being operable for at least partially evacuating a region bounded by said first inflatable seal ring, said second inflatable seal ring, said third seal ring, a portion of said chuck carrier and wafer chuck between said first and second inflatable seal rings, the wafer, and the mask to clamp the wafer and the mask together.
Claim 29
Dependent Claim
190 words
In a mask alignment instrument apparatus for engaging a semiconductive wafer with a mask, said apparatus comprising: a base; a mask holder mounted on said base for holding the mask; a chuck carrier mounted on said base for vertical movement relative to said mask holder; a wafer chuck for holding the wafer on a surface thereof; said wafer chuck being supported by said chuck carrier for vertical movement therewith to position the wafer in contact with the mask; a first seal supported by one of said chuck carrier and wafer chuck for sealingly engaging said one of said chuck carrier and wafer chuck and a marginal portion of the mask around the wafer; a second seal supported by one of said chuck carrier and wafer chuck for sealingly engaging said one of said chuck carrier and wafer chuck and a peripheral portion of the wafer; and first means for at least partially evacuating a region bounded by said first and second seals, a portion of said chuck carrier and wafer chuck between said first and second seals, the wafer, and the mask to clamp the wafer and the mask together.
Claim 30
Dependent Claim
190 words
In a mask alignment instrument apparatus for engaging a semiconductive wafer with a mask, said apparatus comprising: a base; a mask holder mounted on said base for holding the mask; a chuck carrier mounted on said base for vertical movement relative to said mask holder; a wafer chuck for holding the wafer on a surface thereof; said wafer chuck being supported by said chuck carrier for vertical movement therewith to position the wafer in contact with the mask; a first seal supported by one of said chuck carrier and wafer chuck for sealingly engaging said one of said chuck carrier and wafer chuck and a marginal portion of the mask around the wafer; a second seal supported by one of said chuck carrier and wafer chuck for sealingly engaging said one of said chuck carrier and wafer chuck and a peripheral portion of the wafer; and first means for at least partially evacuating a region bounded by said first and second seals, a portion of said chuck carrier and wafer chuck between said first and second seals, the wafer, and the mask to clamp the wafer and the mask together.
Claim 31
Dependent Claim
84 words
Apparatus as in claim 26 wherein: said first seal comprises a first inflatable seal ring supported by said wafer chuck around the wafer; said second seal comprises a second inflatable seal ring supported by said wafer chuck adjacent to the peripheral portion of the wafer; and said apparatus includes second means for inflating said first inflatable seal ring to sealingly engage the marginal portion of the mask and for inflating said second inflatable seal ring to sealingly engage the peripheral portion of the wafer.
Claim 32
Dependent Claim
85 words
Apparatus as in claim 26 wherein: said first seal comprises a first inflatable seal ring supported by said chuck carrier around said wafer chuck; said second seal comprises a second inflatable seal ring supported by said wafer chuck adjacent to the peripheral portion of the wafer; and said apparatus includes second means for inflating said first inflatable seal ring to sealingly engage the marginal portion of the mask and for inflating said second inflatable seal ring to sealingly engage the peripheral portion of the wafer.
Claim 33
Dependent Claim
113 words
Apparatus as in claim 28 including: third means for preventing relative movement between said wafer chuck and said chuck carrier except by a limited amount along a common vertical axis; and fourth means supported by one of said chuck carrier and wafer chuck for slidably sealingly engaging the other of said chuck carrier and wafer chuck; said first means being operable for at least partially evacuating a region bounded by said first inflatable seal ring, said second inflatable seal ring, said fourth means, a portion of said chuck carrier and wafer chuck between said first and second inflatable seal rings, the wafer, and the mask to clamp the wafer and the mask together.
Claim 34
Dependent Claim
103 words
Apparatus as in claim 29 wherein: said wafer chuck comprises a first member for holding the wafer on a surface thereof; said wafer chuck further comprises a second member for supporting the first member; said third means comprises means for clamping the first and second members together; said third means further comprises one or more spring elements attached to both said second member and said chuck carrier for preventing relative movement therebetween except by a limited amount along the common vertical axis; and said fourth means comprises a third seal ring supported by said wafer chuck for slidably sealingly engaging said chuck carrier.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-12-12 | 1976-06-12 | 1976-12-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-12-12 | 1980-06-12 | 1980-12-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-12-12 | 1984-06-12 | 1984-12-12 | $7700.00 | Window Closed / Lapsed |