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US3280715A Expired / Lapsed US ⏱️ 0.0 years remaining

Micropattern aligning device

Assignee: RTX Corp
•
Filing: 1964-06-11
•
Granted: 1966-10-25
•
Expires: 1984-06-11
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Abstract

No abstract record available.

Inventors

  • 👤 Edwin A Corl
  • 👤 Andrew P Koehm

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 03:01
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; H; H10; H10P; H10P72/00; H10P72/50; H10P72/57; Y; Y10; Y10S; Y10S101/00; Y10S101/36

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 189 words
A MICROPATTERN ALIGNING DEVICE INCLUDING IN COMBINATION A BASE, A PEDESTAL FORMED WITH A FLANGE, MEANS MOUNTING SAID PEDESTAL ON SAID BASE, SAID FLANGE HAVING A POLISHED SURFACE, SAID SURFACE BEING WITH AN ANNULAR GROOVE, A CHUCK FORMED WITH A FLANGE, SAID FLANGE HAVING A POLISHED SURFACE, SAID SURFACE OF SAID FLANGE AND WITH A GROOVE, THE POLISHED SURFACE OF SAID FLANGE AND THE POLISHED SURFACE OF SAID PEDESTAL BEING ADAPTED TO MATE, A VISCOUS FLUID POSITIONED BETWEEN SAID MATING SURFACES, SAID GROOVES BEING ADAPTED TO FORM A RESERVOIR FOR SAID VISCOUS FLUID, SAID CHUCK BEING FORMED WITH A BORE AND PROVIDED WITH AN OPENING COMMUNICATING WITH THE ATMOSPHERE THROUGH WHICH REDUCED PRESSURE IS ADAPTED TO BE APPLIED TO THE INTERIOR OF SAID CHUCK, A RIGID MICROPOROUS DISC CARRIED BY THE UPPER PORTION OF SAID CHUCK AND COMMUNICATING WITH SAID BORE, A RESILIENT FORAMINOUS DISC CARRIED BY SAID RIGID MICROPOROUS DISC, A CARRIER, MEANS FOR SUPPORTING SAID CARRIER ON SAID BASE AROUND SAID CHUCK, AN ANNULAR ELECTROMAGNET CARRIED BY SAID CARRIER, MEANS FOR MOVING SAID CARRIER AWAY FROM AND TOWARD SAID BASE, A PLURALITY OF SPRINGS CARRIED BY SAID
Claim 2
Dependent Claim 189 words
A MICROPATTERN ALIGNING DEVICE INCLUDING IN COMBINATION A BASE, A PEDESTAL FORMED WITH A FLANGE, MEANS MOUNTING SAID PEDESTAL ON SAID BASE, SAID FLANGE HAVING A POLISHED SURFACE, SAID SURFACE BEING WITH AN ANNULAR GROOVE, A CHUCK FORMED WITH A FLANGE, SAID FLANGE HAVING A POLISHED SURFACE, SAID SURFACE OF SAID FLANGE AND WITH A GROOVE, THE POLISHED SURFACE OF SAID FLANGE AND THE POLISHED SURFACE OF SAID PEDESTAL BEING ADAPTED TO MATE, A VISCOUS FLUID POSITIONED BETWEEN SAID MATING SURFACES, SAID GROOVES BEING ADAPTED TO FORM A RESERVOIR FOR SAID VISCOUS FLUID, SAID CHUCK BEING FORMED WITH A BORE AND PROVIDED WITH AN OPENING COMMUNICATING WITH THE ATMOSPHERE THROUGH WHICH REDUCED PRESSURE IS ADAPTED TO BE APPLIED TO THE INTERIOR OF SAID CHUCK, A RIGID MICROPOROUS DISC CARRIED BY THE UPPER PORTION OF SAID CHUCK AND COMMUNICATING WITH SAID BORE, A RESILIENT FORAMINOUS DISC CARRIED BY SAID RIGID MICROPOROUS DISC, A CARRIER, MEANS FOR SUPPORTING SAID CARRIER ON SAID BASE AROUND SAID CHUCK, AN ANNULAR ELECTROMAGNET CARRIED BY SAID CARRIER, MEANS FOR MOVING SAID CARRIER AWAY FROM AND TOWARD SAID BASE, A PLURALITY OF SPRINGS CARRIED BY SAID

References Cited (Backward Citations)

US2437229A Cited
US3192844A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1969-10-24 1970-04-25 1970-10-25 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1973-10-24 1974-04-25 1974-10-25 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1977-10-24 1978-04-25 1978-10-25 $7700.00 Window Closed / Lapsed

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