US3192844A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mask alignment fixture
Assignee: Kulicke and Soffa Manufacturing Co
•
Filing: 1963-03-05
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Granted: 1965-07-06
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Expires: 1983-03-05
Abstract
No abstract record available.
Inventors
- 👤 Peter R Szasz
- 👤 Jr Frederick W Kulicke
- 👤 Soffa Albert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 06:31
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; H10P72/57; Y; Y10; Y10S; Y10S101/00; Y10S101/36; Y10S148/00; Y10S148/102; Y10T; Y10T29/00; Y10T29/53; Y10T29/5313; Y10T29/53261
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
164 words
AN ALIGNMENT FIXTURE FOR ORIENTING GEOMETRIC INDICIA ON A MASK HAVING PARALLEL PLANE SURFACES WITH RESPECT TO A SEMI-CONDUCTOR WAFER SURFACE COMPRISING A FRAME, A MASK CHUCK HOLDING THE MASK IN SAID FRAME SO THAT THE SURFACES OF THE MASK ARE EXPOSED, A WAFER CHUCK HOLDING A WAFER IN SAID FRAME SO THAT ONE WAFER CHUCK IS ADJACENTLY SPACED FROM ONE OF THE MASK SURFACES, PISTON MEANS TO SLIDE SAID MASK AND WAFER CHUCKS TOWARD ONE ANOTHER IN A STRAIGHT LINE AND RESILIENTLY PRESS OPPOSED SURFACES OF THE MASK AND THE WAFER INTO ABUTMENT WITH EACH OTHER, UNIVERSAL JOINT MEANS AUTOMATICALLY ORIENTING SAID MASK AND WAFER CHUCKS WITH RESPECT TO EACH OTHER AND COLLOCATING THE OPPOSED SURFACES OF THE MASK AND WAFER INTO A COMMON PLANE INTERFACE AS THEY ARE PRESSED TOGETHER, MEANS TO SLIDE SAID MASK AND WAFER CHUCKS APART IN A STRAIGHT LINE WHILE MAINTAINING SAID OPPOSITED MASK AND WAFER SURFACES IN JUXTAPOSED SPACED APART PARALLEL PLANES, AND MANIPULATING MEANS IN SAID
Claim 2
Dependent Claim
164 words
AN ALIGNMENT FIXTURE FOR ORIENTING GEOMETRIC INDICIA ON A MASK HAVING PARALLEL PLANE SURFACES WITH RESPECT TO A SEMI-CONDUCTOR WAFER SURFACE COMPRISING A FRAME, A MASK CHUCK HOLDING THE MASK IN SAID FRAME SO THAT THE SURFACES OF THE MASK ARE EXPOSED, A WAFER CHUCK HOLDING A WAFER IN SAID FRAME SO THAT ONE WAFER CHUCK IS ADJACENTLY SPACED FROM ONE OF THE MASK SURFACES, PISTON MEANS TO SLIDE SAID MASK AND WAFER CHUCKS TOWARD ONE ANOTHER IN A STRAIGHT LINE AND RESILIENTLY PRESS OPPOSED SURFACES OF THE MASK AND THE WAFER INTO ABUTMENT WITH EACH OTHER, UNIVERSAL JOINT MEANS AUTOMATICALLY ORIENTING SAID MASK AND WAFER CHUCKS WITH RESPECT TO EACH OTHER AND COLLOCATING THE OPPOSED SURFACES OF THE MASK AND WAFER INTO A COMMON PLANE INTERFACE AS THEY ARE PRESSED TOGETHER, MEANS TO SLIDE SAID MASK AND WAFER CHUCKS APART IN A STRAIGHT LINE WHILE MAINTAINING SAID OPPOSITED MASK AND WAFER SURFACES IN JUXTAPOSED SPACED APART PARALLEL PLANES, AND MANIPULATING MEANS IN SAID
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1968-07-05 | 1969-01-04 | 1969-07-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1972-07-05 | 1973-01-04 | 1973-07-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1976-07-05 | 1977-01-04 | 1977-07-06 | $7700.00 | Window Closed / Lapsed |