Patent US3628014A successfully refreshed from Google Patents.
US3628014A
Expired / Lapsed
US
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Scanning electron microscope with color display means
Assignee: Boeing Co
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Filing: 1969-12-22
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Granted: 1971-12-14
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Expires: 1989-12-22
Abstract
Abstract A scanning electron microscope and system wherein small surface potential differences are rendered visible as color shifts on a color CRT (cathode-ray tube) display device. A plurality of different surface potentials are detected respectively by scintillation detectors which are coupled to photomultipliers and then amplifiers. The amplifier output signals representative of several different means surface potentials at scanned points of the specimen are coupled respectively to the three signal control grids of a color CRT in the case of a three scintillating detector-three channel system and the color combinations of the primary colors displayed are indicative of surface potentials in between the mean potentials thus making small differences of the specimen surface potential readily discernible to the eye as small color shifts.
Inventors
- 👤 Lee R Grubic Jr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 20:13
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/244; H01J37/22; H01J37/26; H01J37/266; H01J37/28; H01J2237/00; H01J2237/22; H01J2237/221; H01J2237/225
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
199 words
In a scanning electron microscope: beam generating means for emitting a primary electron beam, support means for supporting a specimen, at least one focusing electron lens of the magnetic type positioned between said beam generating means and said support means for focusing the primary electron beam on the specimen, first deflecting means positioned between said beam generating means and said focusing means for deflecting the primary electron beam to scan the specimen, first detector means for detecting secondary electrons having a first constant energy which are emitted from the portion of the specimen struck by the primary electron beam, second detector means for detecting secondary electrons having a second constant energy greater than said first constant energy which are emitted from the portion of the specimen struck by the primary electron beam, a color cathode-ray tube having first and second color control grids for modulating the intensities of first and second scanning electron beams in response to the output signals of said first and second detector means respectively, and second deflecting means for simultaneously deflecting the first and second scanning electron beams in the color cathode-ray tube in synchronous relation with the scanning operation of the primary electron beam.
Claim 2
Dependent Claim
199 words
In a scanning electron microscope: beam generating means for emitting a primary electron beam, support means for supporting a specimen, at least one focusing electron lens of the magnetic type positioned between said beam generating means and said support means for focusing the primary electron beam on the specimen, first deflecting means positioned between said beam generating means and said focusing means for deflecting the primary electron beam to scan the specimen, first detector means for detecting secondary electrons having a first constant energy which are emitted from the portion of the specimen struck by the primary electron beam, second detector means for detecting secondary electrons having a second constant energy greater than said first constant energy which are emitted from the portion of the specimen struck by the primary electron beam, a color cathode-ray tube having first and second color control grids for modulating the intensities of first and second scanning electron beams in response to the output signals of said first and second detector means respectively, and second deflecting means for simultaneously deflecting the first and second scanning electron beams in the color cathode-ray tube in synchronous relation with the scanning operation of the primary electron beam.
Claim 3
Dependent Claim
115 words
A scanning electron microscope comprising electron beam generating means for generating and directing a beam of primary electrons along a beam path towards a specimen, means for mounting said specimen, means for focusing said electron beam into a spot on said specimen, means for raster scanning said focused electron spot over the surface of said specimen, means for detecting secondary electrons at different discrete energy levels thereof, a color cathode-ray tube, and means for coupling the output of said means for detecting secondary electrons to said color cathode-ray tube whereby the display intensities of the primary colors thereof are responsive respectively to the outputs of said detecting means at said different discrete energy levels thereof.
Claim 4
Dependent Claim
115 words
A scanning electron microscope comprising electron beam generating means for generating and directing a beam of primary electrons along a beam path towards a specimen, means for mounting said specimen, means for focusing said electron beam into a spot on said specimen, means for raster scanning said focused electron spot over the surface of said specimen, means for detecting secondary electrons at different discrete energy levels thereof, a color cathode-ray tube, and means for coupling the output of said means for detecting secondary electrons to said color cathode-ray tube whereby the display intensities of the primary colors thereof are responsive respectively to the outputs of said detecting means at said different discrete energy levels thereof.
Claim 5
Dependent Claim
39 words
The apparatus of claim 2 wherein said means for detecting secondary electrons at discrete energy levels comprises a plurality of photomultiplier-coupled scintillation detectors mounted adjacent said specimen in position to detect secondary electrons at said different discrete energy levels.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-12-13 | 1975-06-14 | 1975-12-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-12-13 | 1979-06-14 | 1979-12-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-12-13 | 1983-06-14 | 1983-12-14 | $7700.00 | Window Closed / Lapsed |