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US3619607A Expired / Lapsed US ⏱️ 0.0 years remaining

Electron microscope including an electromagnetic electron energy analyzing lens

Assignee: Individual
•
Filing: 1970-06-24
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Granted: 1971-11-09
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Expires: 1990-06-24
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Abstract

Abstract Apparatus for analyzing the energy of an electron beam in an electron microscope includes a cylindrical lens of the magnetic field type inserted additionally or in place of a conventional intermediate lens, and a slit member cooperating with said cylindrical lens, said cylindrical lens being excited under preselected conditions.

Inventors

  • 👤 Takeo Ichinokawa

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 18:27
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/44; H01J49/46; H01J29/00; H01J29/84; H01J29/845; H01J37/00; H01J37/02; H01J37/04; H01J37/05

Claims Analysis

Total Claims: 3
Claim 1
Independent Claim 27 words
In apparatus for analyzing the energy of an electron beam, the improvement claimed in claim 1, in which said electromagnetically energized cylindrical lens is said intermediate lens.
Claim 2
Dependent Claim 33 words
In apparatus for analyzing the energy of an electron beam, the improvement claimed in claim 1, in which said electromagnetically energized cylindrical lens is positioned between said intermediate lens and said projection lens.
Claim 3
Dependent Claim 64 words
In apparatus for analyzing the energy of an electron beam, the improvement claimed in claim 1, in which said electromagnetically energized cylindrical lens includes two pairs of magnetizable pole pieces, each pole piece being semicylindrical and said pole pieces being arranged to form a substantially complete cylinder for passage of the electron beam between facing pole faces of the pole pieces of both pairs.

References Cited (Backward Citations)

US3256433A Cited
US3374346A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1974-11-08 1975-05-10 1975-11-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1978-11-08 1979-05-10 1979-11-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1982-11-08 1983-05-10 1983-11-09 $7700.00 Window Closed / Lapsed

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