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US3590471A Expired / Lapsed US ⏱️ 0.0 years remaining

Fabrication of insulated gate field-effect transistors involving ion implantation

Assignee: AT&T Inc
•
Filing: 1969-02-04
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Granted: 1971-07-06
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Expires: 1989-02-04
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Abstract

Abstract An insulated gate field-effect transistor is made which utilizes both Schottky barrier connections and ion-implanted zones. The resultant structure incorporates source and drain zones, which are formed by ion implantation and whose spacing is fixed by the gate electrode, and source and drain electrodes which make ohmic connection to the implanted source and drain zones and rectifying connections to unimplanted material.

Inventors

  • 👤 Martin P Lepselter
  • 👤 Alfred U Macrae

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 00:47
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/83; H10D64/00; H10D64/60; H10D64/62; H10D99/00; H10P; H10P95/00; H10W; H10W20/00; H10W20/40; Y; Y10; Y10S; Y10S148/00; Y10S148/053; Y10S148/139; Y10S148/145

Claims Analysis

Total Claims: 3
Claim 1
Independent Claim 23 words
The method of claim 1 in which the semiconductive wafer is monocrystalline silicon and the insulating layer includes a layer of silicon oxide.
Claim 2
Dependent Claim 27 words
The method of claim 2 in which the surface portion of the silicon wafer is N-type and the layers of the conductive material are of platinum silicide.
Claim 3
Dependent Claim 22 words
The method of claim 3 in which the ions implanted are boron and the implanted parts of the wafer are made P-type.

References Cited (Backward Citations)

US3252003A Cited
US3290127A Cited
US3472712A Cited
US3463971A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1974-07-05 1975-01-04 1975-07-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1978-07-05 1979-01-04 1979-07-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1982-07-05 1983-01-04 1983-07-06 $7700.00 Window Closed / Lapsed

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