US3522118A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gas phase etching
Assignee: Motorola Solutions Inc
•
Filing: 1965-08-17
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Granted: 1970-07-28
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Expires: 1985-08-17
Abstract
No abstract record available.
Inventors
- 👤 William E Taylor
- 👤 Howard N Klink
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 18:15
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/24; H10P50/242; Y; Y10; Y10S; Y10S148/00; Y10S148/051; Y10S148/054; Y10S148/079; Y10S438/00; Y10S438/974
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-07-27 | 1974-01-26 | 1974-07-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-07-27 | 1978-01-26 | 1978-07-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-07-27 | 1982-01-26 | 1982-07-28 | $7700.00 | Window Closed / Lapsed |