US3392069A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for producing pure polished surfaces on semiconductor bodies
Assignee: Siemens AG
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Filing: 1964-07-13
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Granted: 1968-07-09
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Expires: 1984-07-13
Abstract
No abstract record available.
Inventors
- 👤 Merkel Hans
- 👤 Leibenzeder Siegfried
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 18:16
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/02; C30B29/06; C30B25/00; C30B25/02; H; H10; H10P; H10P50/00; H10P50/20; H10P50/24; H10P50/242; H10P95/00; Y; Y10; Y10S; Y10S117/00; Y10S117/913; Y10S148/00; Y10S148/016; Y10S148/051; Y10S148/052; Y10S148/054; Y10S257/00; Y10S257/912
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
81 words
A METHOD OF PRODUCING PURE SURFACES OF SEMICONDUCTOR BODIES SELECTED FROM SILICON, GERMANIUM AND AIIIBV COMPOUNDS, WHICH COMPRISES PASSING A GAS MIXTURE, CONSISTING OF HYDROGEN, HYDROGEN CHLORIDE AND A CHLORIDE OF THE SEMICONDUCTOR MATERIAL, OVER A SEMICONDUCTOR SUBSTRATE BODY AT A TEMPERATURE OF ABOUT 50 TO 500*C. BELOW ITS MELTING POINT FOR A PERIOD OF 1 TO 60 MINUTES, SO THAT AN ETCHING REACTION IN THE SENSE OF A CONTROLLABLE ELIMINATION OF THE SEMICONDUCTOR SURFACE TOGETHER WITH A POLISHING TAKES PLACES.
Claim 2
Independent Claim
81 words
A METHOD OF PRODUCING PURE SURFACES OF SEMICONDUCTOR BODIES SELECTED FROM SILICON, GERMANIUM AND AIIIBV COMPOUNDS, WHICH COMPRISES PASSING A GAS MIXTURE, CONSISTING OF HYDROGEN, HYDROGEN CHLORIDE AND A CHLORIDE OF THE SEMICONDUCTOR MATERIAL, OVER A SEMICONDUCTOR SUBSTRATE BODY AT A TEMPERATURE OF ABOUT 50 TO 500*C. BELOW ITS MELTING POINT FOR A PERIOD OF 1 TO 60 MINUTES, SO THAT AN ETCHING REACTION IN THE SENSE OF A CONTROLLABLE ELIMINATION OF THE SEMICONDUCTOR SURFACE TOGETHER WITH A POLISHING TAKES PLACES.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-07-09 | 1972-01-08 | 1972-07-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-07-09 | 1976-01-08 | 1976-07-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-07-09 | 1980-01-08 | 1980-07-09 | $7700.00 | Window Closed / Lapsed |