Patent JPS639948A successfully refreshed from Google Patents.
JPS639948A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
semiconductor equipment
Assignee: NEC Corp
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Filing: 1986-06-30
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Granted: —
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Expires: 2006-06-30
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Masaru Tsukiji
- 👤 優 築地
- 👤 Mitsuru Sakamoto
- 👤 充 坂本
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-31 23:22
CPC Classifications
—
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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