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Semiconductor element and semiconductor memory device using the same

Assignee: Hitachi Ltd
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Filing: 1994-08-12
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Granted: —
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Expires: 2014-08-12
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Abstract

Abstract A semiconductor element, comprising a source region (19), a drain region (20),a channel forming region (21) connecting said source region and said drain region, a gate (22) applying an electric field to said channel forming region, and a carrier confinement region (24) isolated from said channel forming region by a potential barrier between said channel forming region and the carrier confinement region, wherein said carrier confinement region is formed of a conductor or semiconductor grains disposed between said channel forming region and said gate and surrounded by an insulator, wherein the distance between said carrier confinement region and said channel forming region is larger than 3 nm.

Inventors

  • 👤 Kazuo Yano
  • 👤 Tomoyuki Ishii
  • 👤 Takashi Hashimoto
  • 👤 Koichi Seki
  • 👤 Masakazu Aoki
  • 👤 Takeshi Sakata
  • 👤 Yoshinobu Nakagome
  • 👤 Kan Takeuchi

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-09 09:15
CPC Classifications
H; H10; H10B; H10B12/00; B; B82; B82Y; B82Y10/00; G; G11; G11C; G11C11/00; G11C11/21; G11C11/22; G11C11/34; G11C11/40; G11C11/401; G11C11/403; G11C11/404; G11C16/00; G11C16/02; G11C16/04; G11C16/0466; G11C16/06; G11C16/10; G11C16/26; G11C16/28; H10B41/00; H10B41/20; H10B41/40; H10B41/42; H10B41/49; H10B69/00; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0411; H10D30/40; H10D30/402; H10D30/60; H10D30/68; H10D30/688; H10D30/6891; H10D30/6892; H10D64/00; H10D64/01; H10D64/031; H10D64/035; H10D64/60; H10D64/66; H10D64/68; H10D64/681; H10D64/685; H10D84/00; H10D84/01; H10D84/02; H10D84/03; H10D84/038; H10D88/00; H10D88/01; G11C2216/00; G11C2216/02; G11C2216/06; G11C2216/08; H10D30/62; H10D86/00; H10D86/201

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 111 words
A semiconductor element, comprising a source region (19); a drain region (20); a channel forming region (21) connecting said source region and said drain region; a gate (22) for applying an electric field to said channel forming region; and a carrier confinement region (24) isolated from said channel forming region by a potential barrier between said channel forming region and the carrier confinement region, wherein said carrier confinement region is formed of a conductor or semiconductor grains disposed between said channel forming region and said gate and surrounded by an insulator, characterized in that the distance between said carrier confinement region and said channel forming region is larger than 3 nm.
Claim 2
Dependent Claim 25 words
The semiconductor element according to claim 1, wherein the grain size of said carrier confinement region has a diameter of no more then 30 nm.
Claim 3
Dependent Claim 19 words
The semiconductor element according to claim 1 or 2, wherein a plurality of said carrier confinement regions are provided.
Claim 4
Dependent Claim 20 words
The semiconductor element according to any of claims 1 to 3, wherein said carrier confinement region is comprised of silicon.
Claim 5
Dependent Claim 20 words
The semiconductor element according to any of the preceding claims, wherein said carrier confinement region is comprised of monocrystalline grains.
Claim 6
Dependent Claim 24 words
The semiconductor element according to any of the preceding claims, wherein said carrier confinement region has a capacitance of no more than 3 aF.
Claim 7
Dependent Claim 18 words
The semiconductor element according to any of the preceding claims, wherein said insulator is comprised of silicon oxide.
Claim 8
Dependent Claim 23 words
The semiconductor element according to any of the preceding claims, wherein the length and width of said gate are smaller than 1 micron.
Claim 9
Dependent Claim 96 words
A semiconductor element comprising a channel (21) establishing a carrier path; crystal grains disposed over said channel and isolated from said channel and a first insulator (25) formed between the channel and the crystal grains; and a gate electrode (22) disposed on said crystal grains and isolated from said channel by said first insulator, said crystal grains and a second insulator formed between the gate electrode and the crystal grains, characterized in that the distance between said crystal grains and said gate electrode is larger than the distance between said channel region and said crystal grains.
Claim 10
Dependent Claim 26 words
A semiconductor element according to claims 9, wherein the carrier value flowing into said channel region changes in accordance with carriers captured by said crystal grains.
Claim 11
Dependent Claim 16 words
A semiconductor element according to claim 9 or 10, wherein said crystal grains are monocrystalline silicone.
Claim 12
Dependent Claim 26 words
A semiconductor element according to any of claims 9 to 11, wherein said crystal grains are disposed over said channel in the form of plural grains.

References Cited (Backward Citations)

US537134A Cited
DE2149303A1 Cited
DE2152225A1 Cited
EP0107039A2 Cited
JPH03141676A Cited
JPH05129630A Cited
EP0642173A1 Cited
EP0933820A1 Cited

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