Three-dimensional integrated circuit inductor

Claim 2

The inductor as recited in claim 1, wherein said magnetic core is placed horizontally over said substrate.

Claim 3

The inductor as recited in claim 1, wherein said magnetic core is selected from a group that includes permalloy and ferromagnetic material.

Claim 4

The inductor as recited in claim 1, wherein said magnetic core is made of Fe x Ni 80-x Si 5 .

Claim 5

The inductor as recited in claim 1, wherein the inductance of said inductor approximates: L = (U 0 * U r * W * t * N ** 2) / ℓ, wherein U 0 =   the vacuum permeability = 1.257 10 -6 H/m, U r =   relative magnetic permeability of the core, W =   width of the magnetic core, t =   thickness of the magnetic core, N =   number of turns of the "metal coils", and ℓ =   the length of the magnetic core.

Claim 6

The inductor as recited in claim 1, wherein said first and second conductive lines each have either an "L" or a "V" shape.

Claim 7

The inductor as recited in claim 1, wherein said magnetic core is a solid plate and comprises an array of spaced metallic conductors.

Claim 8

The inductor as recited in claim 1, wherein said first and second plurality of conductive lines are selected from a group that consists of Cu, Al, and alloys thereof.

Claim 9

The inductor as recited in claim 1, wherein said substrate is selected from a group that consists of Si, GaAs, Ge, SiC and glass.

Claim 10

The inductor as recited in claim 1, wherein said insulation is selected from a group that consists of oxide, nitride, and polymer.

Claim 11

The inductor as recited in claim 1, further comprising a third and fourth plurality of conductive lines separated from each other by said magnetic core and respectively connected to each other by a second set of conducting vias, thereby forming a second continuous electric path independent and insulated from said first electric path.

Claim 12

The inductor as recited in claim 1, further comprising electrical connections to circuit elements, wherein said circuit elements include active and passive elements.

Claim 13

In a monolithic integrated circuit, a transformer comprising: at least two first sets of conductive lines on a substrate; at least two second sets of conductive lines separated from said at least two first sets of conductive lines; a magnetic core placed between said first sets of conductive lines and said second sets of conductive lines; insulating material separating said at least two first sets of conductive lines and said at least two second sets of conductive lines from said magnetic core; a first plurality of conducting vias extending through said insulating material and spaced from said core, connecting the first of said at least two first sets of conductive lines to the first of said at least two second sets of conductive lines; a second plurality of conductive vias extending through said insulating material and spaced from said core, connecting the second of said at least two first sets of conductive lines to the second of said at least two second sets of conductive lines, wherein said first of said at least two first sets and said first of said at least two second sets of conductive lines form, respectively, with said first plurality of conducting vias a first independent contiguous conductive coil about said magnetic core, and said second of said at least two first sets and said second of said two at least second sets of conductive lines form, respectively, with said second plurality of conducting vias a second independent contiguous conductive coil about said magnetic core, thereby providing a primary and a secondary winding of the transformer.

Claim 14

In a monolithic integrated circuit, a method of fabricating an inductor, comprising the steps of: providing a substrate; depositing on said substrate a first plurality of conducting lines; depositing over said first plurality of conducting lines a magnetic core insulated from said first plurality of conducting lines; depositing over said magnetic core a second plurality of conductive lines insulated from said magnetic core; and forming conducting vias connecting said first and second plurality of conductive lines through said insulation and spaced from said magnetic core, thereby providing a contiguous conductive coil about said magnetic core.

Claim 15

The method of fabricating an inductor as recited in claim 14, further comprising the step of: depositing a first insulating layer over said first plurality of conductive lines.

Claim 16

The method of fabricating an inductor as recited in claim 14, further comprising the step of: depositing a second insulating layer over said magnetic core to provide insulation between said magnetic core and said second plurality of conductive lines.

Claim 17

The method of fabricating an inductor as recited in claim 14, wherein the step of forming conducting vias includes placing said vias around the periphery of said magnetic core.

Claim 18

The method of fabricating an inductor as recited in claim 14, wherein said magnetic core is placed horizontally over said substrate.

Claim 19

The method of fabricating an inductor as recited in claim 14, wherein said steps of depositing said first and said second plurality of conductive lines includes forming conductive lines each having an "L" or a "V" shape.

Claim 20

The method of fabricating an inductor as recited in claim 14, wherein said magnetic core is selected from a group that consists of permalloy and ferromagnetic material.

Claim 21

The method of fabricating an inductor as recited in claim 14, wherein said magnetic core is made of Fe x Ni 80-x Si 5 .

Claim 22

The method of fabricating an inductor as recited in claim 14, wherein said magnetic core forms a solid plate and comprises an array of metallic conductors.

Claim 23

The method of fabricating an inductor as recited in claim 14, further comprising forming electrical connections to circuit elements, wherein said circuit elements include active and passive elements.