Radiation-sensitive composition

Claim 2

The radiation-sensitive composition according to Claim 1, wherein the polymer consists essentially of a recurring structure unit represented by formula (I) or a combination thereof with at least one recurring structure unit selected from those represented by formulas (II)(a), (II)(b) and (II)(c) and those corresponding to the structures formed by splitting the vinyl group of maleic anhydride, vinylpyridine, vinylpyrrolidone, vinylimidazole, vinylaniline, fumaronitrile, acrylamide and acrylonitrile: wherein R¹ , R² and R³, which may be the same or different, represent hydrogen atoms, alkyl groups having 1-4 carbon atoms, phenyl groups or benzyl groups; R⁴ and R⁵, which may be the same or different, represent hydrogen atoms, halogen atoms, hydroxyl groups or alkyl groups having 1-4 carbon atoms; R⁶ represents a hydrogen atom or a methyl group; R⁷, R⁸ and R⁹, which may be the same or different, represent hydrogen atoms, halogen atoms, hydroxyl groups, amino groups, alkyl groups having 1-4 carbon atoms or alkoxy groups having 1-4 carbon atoms; R¹⁰ represents a hydrogen atom or a methyl group; R¹¹ represents an alkyl group having 1-4 carbon atoms; R¹² represents a hydrogen atom or a methyl group; and R¹³ represents a hydrogen atom,.a phenyl group or a hydroxyphenyl group.

Claim 3

The radiation-sensitive composition according to Claim 2, wherein the polymer consists essentially of a recurring structure unit represented by formula (I) and a recurring structure unit represented by formula (II)(a).

Claim 4

The radiation-sensitive composition according to Claim 3, wherein the recurring structure unit represented by formula (II)(a) is that represented by formula (III): wherein R¹⁴ and R¹⁵, which may be the same or different, represent hydrogen atoms, halogen atoms or alkyl groups having 1-4 carbon atoms; and R¹⁶ represents a hydrogen atom or a methyl group.

Claim 5

The radiation-sensitive composition according to Claim 1, wherein the radiation-sensitive acid-forming agent is at least one member selected from the group consisting of (1) an onium salt represented by one of the following formulas: wherein R¹⁷, R¹⁸ and R¹⁹, which may be the same or different, represent hydrogen atoms, amino groups, nitro groups, cyano groups, alkyl groups having 1-4 carbon atoms or alkoxy groups having 1-4 carbon atoms; and X represents SbF₆, AsF₆, PF₆, BF₄, CF₃CO₂, ClO₄, CF₃SO₃, or in which R²⁰ represents a hydrogen atom, an amino group, an anilino group, an alkyl group having 1-4 carbon atoms or an alkoxy group having 1-4 carbon atoms; R²¹ represents an alkoxy group having 1-4 carbon atoms; and R²² represents a hydrogen atom, an amino group, an anillino group, an alkyl group having 1-4 carbon atoms or an alkoxy group having 1-4 carbon atoms, (2) a halogen-containing compound represented by one of the following formulas: wherein R²³ represents a trichloromethyl group, a phenyl group, a methoxyphenyl group, a naphthyl group or a methoxynaphthyl group; R²⁴, R²⁵ and R²⁶, which may be the same or different, represent hydrogen atoms, halogen atoms, alkyl groups having 1-4 carbon atoms, alkoxy groups having 1-4 carbon atoms or hydroxyl groups, (3) an o-quinonediazide compound represented by one of the following formulas: wherein Ar¹ is in which D is a hydrogen atom or a quinonediazidesulfonyl group and m and n are integers of 0-3; and Ar² is or in which D is as defined above, (4) a nitrobenzyl compound represented by the following formula: wherein R²⁷ represents an alkyl group having 1-4 carbon atoms; p represents an integer of 1-3; R²⁸ represents a hydrogen atom or a methyl group; and R²⁹ represents in which R³⁰ is a hydrogen atom or an alkyl group having 1-4 carbon atoms and R³¹ is an alkoxy group having 1-4 carbon atoms, (5) a sulfonic acid ester compound represented by one of the following formulas: wherein R³² and R³⁵, which may be the same or different, represent hydrogen atoms or alkyl groups having 1-4 carbon atoms; R³³ and R³⁴, which may be the same or different, represent hydrogen atoms, alkyl groups having 1-4 carbon atoms, substituted or unsubstituted aryl groups having 6-20 carbon atoms or substituted or unsubstituted aralkyl groups having 7-20 carbon atoms, wherein R³⁶ represents a hydrogen atom or an alkyl group having 1-4 carbon atoms; R³⁷ and R³⁸, which may be the same or different, represent alkyl groups having 1-4 carbon atoms, substituted or unsubstituted aryl groups having 6-20 carbon atoms, provided they may be bonded to each other to form a ring, and wherein R³⁹ represents a methyl group, a trichloromethyl group, a trifluoromethyl group, a phenyl group, a tolyl group, a cyanophenyl group, a trichlorophenyl group or a trifluoromethylphenyl group, and (6) a sulfone compound represented by the following formula: wherein Y represents or -SO₂-; R⁴⁰, R⁴¹, R⁴² and R⁴³, which may be the same or different, represent alkyl groups having 1-4 carbon atoms, aralkyl groups having 7-20 carbon atoms or halogen atoms; and m represents an integer of 0-3.

Claim 6

The radiation-sensitive composition according to Claim 5, wherein the radiation-sensitive acid-forming agent is the onium salt.

Claim 7

The radiation-sensitive composition according to Claim 1, wherein the weakly basic, nitrogen-containing compound is at least one member selected from the group consisting of a compound represented by formula (i): wherein R⁴⁴, R⁴⁵ and R⁴⁶, which may be the same or different, represent hydrogen atoms, alkyl groups having 1-6 carbon atoms, aminoalkyl groups having 1-6 carbon atoms, hydroxyalkyl groups having 1-6 carbon atoms or substituted or unsubstituted aryl groups having 6-20 carbon atoms, provided that R⁴⁵ and R⁴⁶ may be bonded to each other to form a ring, and a compound having at least one structure selected from those represented by formulas (ii) to (v): wherein R⁴⁷, R⁴⁸, R⁴⁹ and R⁵⁰, which may be the same or different, represent alkyl groups having 1-6 carbon atoms.

Claim 8

The radiation-sensitive composition according to Claim 1, wherein the weakly basic, nitrogen-containing compound is ammonia, triethylamine, tripropylamine, tributylamine, anillne, N-methylaniline, N,N-dimethylaniline, 2-methylaniline, 3-methylaniline, 4-methylaniline, 4-nitroaniline, 1-naphthylamine, 2-naphtylamine, diphenylamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine, pyrrolidine or piperidine.

Claim 9

The radiation-sensitive composition according to Claim 1, wherein the weakly basic, nitrogen-containing compound is imidazole, 4-methylimidazole, 4-methyl-2-phenylimidazole or thiabendazole.

Claim 10

The radiation-sensitive composition according to Claim 1, wherein the weakly basic, nitrogen-containing compound is pyridine, 2-methylpyridine, 4-ethylpyridine, 1-methyl-4-phenylpyridine, 2-(1-ethylpropyl)pyridine, nicotinamide, dibenzoylthiamine or riboflavine tetrabutyrate.

Claim 11

The radiation-sensitive composition according to Claim 1, wherein the weakly basic, nitrogen-containing compound is 4,4′-diaminodiphenylmethane, 4,4′-diaminodiphenyl ether, 3,4′-diaminodiphenyl ether, 4,4′-diaminobenzophenone, 4,4′-diaminodiphenylamine, 2,2-bis(4-aminophenyl)propane, 2-(3-aminophenyl)-2-(4-aminophenyl)propane, 2-(4-aminophenyl)-2-(4-hydroxyphenyl)propane, 1,4-bis[1-(4-aminophenyl)-4-methylethyl]benzene or 1,3-bis[1-(4-aminophenyl)-1-methylethyl]benzene.

Claim 12

The radiation-sensitive composition according to Claim 1, wherein the weakly basic, nitrogen-containing compound is dimethyl succinate-1-(2-hydroxyethyl)-4-hydroxy-2,2,6,6-tetramethylpiperidine polycondensate, poly{[6-(1,1,3,3-tetramethylbutyl)imino-1,3,5-triazine-2,4-diyl][(2,2,6,6-tetramethyl-4-piperidyl)imino]hexamethylene[(2,2,6,6-tetramethyl-4-piperidyl)imino]} or bis (1,2,2,6,6-pentamethyl-4-piperidyl)2-(3,5-di-t-butyl-4-hydroxybenzyl)-2-n-butylmalonate.

Claim 13

The radiation-sensitive composition according to Claim 1, wherein the polymer having acid-decomposable silyl groups has a polystyrene-reduced weight average molecular weight of 10,000-300,000.

Claim 14

The radiation-sensitive composition according to Claim 2, wherein the content of the recurring structure unit represented by formula (I) is 15 mole% or more.

Claim 15

The radiation-sensitive composition according to Claim 1, wherein the radiation-sensitive acid-forming agent is contained in a proportion of 0.1-20 parts by weight per 100 parts by weight of the polymer having acid-decomposable silyl groups.

Claim 16

The radiation-sensitive composition according to Claim 1, wherein the weakly basic, nitrogen-containing compound is contained in a proportion of 0.001-10 parts by weight per 100 parts by weight of the polymer having acid-decomposable silyl groups.