EP0329610A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Silicium-containing positive photoresist compositions with 1,2 disulfones
Assignee: Novartis AG
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Filing: 1989-02-06
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Granted: —
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Expires: 2009-02-06
Abstract
Abstract The invention relates to positive photoresist compositions essentially containing, in an organic solvent, at least one each of a) a silylated phenolic resin b) a sensitiser, and, optionally, further standard additives which contain, as sensitiser, a 1,2-disulphone compound of the formula I R<1>-SO2-SO2-R<2> with the meanings specified for R<1> and R<2>. n
Inventors
- 👤 Reinhard Dr. Schulz
- 👤 Ekkehard Dr. Bartmann
- 👤 Horst Dr. Münzel
- 👤 Gregor Dr. Wehner
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 20:19
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0757; G03F7/0758
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