Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
124 words
A method for making an optical device comprising the steps of: making in a first surface of a first member a first V-shaped groove having first and second side walls; making in the first surface a second V-shaped groove which intersects the first groove and defines a first V-shaped edge in the first side wall of the first groove; seating a spherical lens in the first groove such that it bears against two points of the first V-shaped edge and against one point of the second side wall of the first V-shaped groove; and permanently bonding the seated spherical lens to the first member, whereby the spherical lens is bonded at a location determined by the geometry of the first and second V-shaped grooves.
Claim 2
Dependent Claim
27 words
The method of claim 1 wherein: the first member is made of crystalline material and the first and second grooves are made by masking and anisoaopic etching.
Claim 3
Dependent Claim
63 words
The method of claim 2 further comprising the steps of: mounting a photonic device on a second member so as to be in a predetermined relationship with a first surface of the second member; abutting the first member against the second member and sealing together the first and second members, such that the spherical lens is in predetermined registration with the photonic device.
Claim 4
Dependent Claim
22 words
The method of claim 3 further comprising the step of: making a cavity in the first member for receiving the photonic device.
Claim 5
Dependent Claim
31 words
The method of claim 4 wherein: the first surface of the first member is abutted against the first surface of the second member to align the lens with the photonic device.
Claim 6
Dependent Claim
12 words
The method of claim 5 wherein: the photonic device is a laser.
Claim 7
Dependent Claim
36 words
The method of claim 6 further comprising the steps of: defining in the second member a reflecting surface; and mounting on the first member a photodetector adapted to receive laser light reflected from the reflecting surface.
Claim 8
Dependent Claim
127 words
The method of claim 7 further comprising the steps of: making in the first surface of the first member a third V-shaped groove having first and second side walls; making in the first surface of the first member a fourth V-shaped groove which intersects the third groove and defines a second V-shaped edge in the first side wall of the third groove; seating a second spherical lens in the third groove such that it bears against two points of the second V-shaped edge and against the second side wall of the third V-shaped groove; and permanently bonding the seated second spherical lens to the first member, whereby the second spherical lens is bonded at a location determined by the geometry of the third and fourth V-shaped grooves.
Claim 9
Dependent Claim
31 words
The method of claim 8 wherein: the second lens is positioned with respect to the laser such as to direct laser light to the photodetector by way of the reflecting surface.
Claim 10
Dependent Claim
37 words
The method of claim 9 wherein: the first and second members are monocrystalline silicon; the first and second surfaces are <100> surfaces, and the side walls of the V-shaped grooves and the reflecting surface are <111> surfaces.
Claim 11
Dependent Claim
86 words
The method of claim 3 wherein: the first member includes on a first surface at least one first bonding pad and the second member includes at least one second bonding pad; and further comprising the step of texturing the first or second bonding pad, or both, the texturing having a feature size of between 0.1 and ten microns; and wherein the abutting and sealing steps comprise the step of pressing together the first and second bonding pads with a sufficient force to cause them to bond.
Claim 12
Dependent Claim
31 words
The method of claim 11 wherein: the step of texturing comprises the step of masking and anisoaopically etching monocrystalline material to form triangular projections having side walls defined by crystallographic planes.