EP0375251A2
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EP
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Optoelectronic device package method and apparatus
Assignee: AT&T Inc
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Filing: 1989-12-12
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Granted: —
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Expires: 2009-12-12
Abstract
Abstract Efficient coupling between an optoelectronic device (13) and an optical fiber (15) is obtained by using different monocrystalline elements of different crystallographic orientation for mounting, respectively, the fiber and the optoelectronic device. For example, the crystallographic orientation of an upper monocrystalline element (17) is chosen such that a horizontal groove (20) for supporting the optical fiber and a reflecting surface (19) for directing light into the fiber may both be made by anisotropic etching. The crystallographic orientation of a lower monocrystalline silicon element is chosen such that appropriate etching will yield a mounting surface (23) for the optoelectronic device (13) which is suitable for directing light from the reflecting surface (19) into the optical fiber (15) with maximum efficiency. In one illustrative embodiment, the upper monocrystalline element (17) is {100} silicon, and the lower monocrystalline element (18) is {112} silicon. As will be explained more fully later, this permits anisotropic etching so as to form a V -groove (20) that supports a horizontally-extending optic fiber, a reflecting surface (19) that extends at 54.74°, and a support surface (23) for the optoelectronic device that extends at 19.48° with respect to the horizontal. These relative angles provide for optimum optical coupling between the optoelectronic device and the optical fiber, while providing horizontal surfaces for supporting both electronic circuitry and the optical fiber, as is desired for secure packaging and integration of the package apparatus into a lightwave communications system.
Inventors
- 👤 Harold R. Clark
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 19:31
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/42; G02B6/4201; G02B6/4204; G02B6/4214
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
161 words
A method for making an optoelectronic device package comprising the steps of mounting an optical fiber such that it extends in a first direction; defining a reflective surface; mounting an optoelectronic device such that an optical path is described between the optoelectronic device and the optical fiber by way of the reflecting surface, characterized in that: the reflecting surface is defined by masking and etching a first monocrystalline element to a first crystallographic plane, the plane extending at a first angle with respect to the first direction, said first angle not being 45°; defining a mounting surface by masking and etching a second monocrystalline element to a second crystallographic plane at a second angle with respect to the first direction, the second monocrystalline element having a crystal orientation different from that of the first monocrystalline element; and mounting the optoelectronic device on the mounting surface, whereby the optoelectronic device is oriented at a predetermined angle with respect to the optical path.
Claim 2
Independent Claim
161 words
A method for making an optoelectronic device package comprising the steps of mounting an optical fiber such that it extends in a first direction; defining a reflective surface; mounting an optoelectronic device such that an optical path is described between the optoelectronic device and the optical fiber by way of the reflecting surface, characterized in that: the reflecting surface is defined by masking and etching a first monocrystalline element to a first crystallographic plane, the plane extending at a first angle with respect to the first direction, said first angle not being 45°; defining a mounting surface by masking and etching a second monocrystalline element to a second crystallographic plane at a second angle with respect to the first direction, the second monocrystalline element having a crystal orientation different from that of the first monocrystalline element; and mounting the optoelectronic device on the mounting surface, whereby the optoelectronic device is oriented at a predetermined angle with respect to the optical path.
Claim 3
Dependent Claim
22 words
The method of Claim 1 further characterized in that: the second angle is equal to 2α∼-∼90°, where α is the first angle.
Claim 4
Dependent Claim
46 words
The method of Claim 2 further characterized in that: the step of mounting the optical fiber comprises the step of masking and etching the first monocrystalline element so as to make a groove defined by crystallographic planes, and then bonding the optical fiber in the groove.
Claim 5
Dependent Claim
41 words
The method of Claim 3 further characterized in that: the first monocrystalline element is {100} silicon; the second monocrystalline element is {112} silicon; the first crystallographic plane is a {111} plane, and the second crystallographic plane is a {111} crystallographic plane.
Claim 6
Dependent Claim
28 words
The method of Claim 4 further characterized in that: the optical fiber is mounted in a V -groove defined by {111} planes in a first monocrystalline silicon element.
Claim 7
Dependent Claim
22 words
The method of Claim 5 further characterized in that: the first angle is substantially 54.74°, and the second angle is substantially 19.48°.
Claim 8
Dependent Claim
40 words
The method of Claim 3 further characterized in that: the first monocrystalline element is {110} silicon; the second monocrystalline element is {112} silicon; the first crystallographic plane is a {111} plane; and the second crystallographic plane is a {111} plane.
Claim 9
Dependent Claim
27 words
The method of Claim 7 further characterized in that: the optical fiber is mounted in a groove defined by {111} crystallographic planes in the first monocrystalline element.
Claim 10
Dependent Claim
22 words
The method of Claim 8 further characterized in that: the first angle is substantially 35.26°, and the second angle is substantially -19.48°.
Claim 11
Dependent Claim
133 words
An optoelectronic device package comprising an optic fiber that extends in a first direction; a reflective surface; and an optoelectronic device included in an optical path that includes the axis of the optical fiber and the reflective surface, characterized in that: the reflecting surface is defined by a first crystallographic plane of a first monocrystalline element, the plane extending at a first angle with respect to the first direction, said first angle not being 45°; the optoelectronic device is mounted on a second crystallographic plane of a second monocrystalline element having a crystal orientation different from that of the first monocrystalline element; the second crystallographic plane extending at a second angle with respect to the first direction, whereby the optoelectronic device is oriented at a predetermined angle with respect to the optical path.
Claim 12
Dependent Claim
133 words
An optoelectronic device package comprising an optic fiber that extends in a first direction; a reflective surface; and an optoelectronic device included in an optical path that includes the axis of the optical fiber and the reflective surface, characterized in that: the reflecting surface is defined by a first crystallographic plane of a first monocrystalline element, the plane extending at a first angle with respect to the first direction, said first angle not being 45°; the optoelectronic device is mounted on a second crystallographic plane of a second monocrystalline element having a crystal orientation different from that of the first monocrystalline element; the second crystallographic plane extending at a second angle with respect to the first direction, whereby the optoelectronic device is oriented at a predetermined angle with respect to the optical path.
Claim 13
Dependent Claim
24 words
The optoelectronic device package of Claim 10 further characterized in that: the second angle is equal to 2α∼-∼90°, where α is the first angle.
Claim 14
Dependent Claim
28 words
The optoelectronic device package of Claim 11 further characterized in that: the optical fiber is mounted in a groove defined by crystallographic planes in the first monocrystalline element.
Claim 15
Dependent Claim
42 words
The optoelectronic device package of Claim 12 further characterized in that: the first monocrystalline element is {100} silicon, the second monocrystalline element is {112} silicon; the first crystallographic plane is a {111} plane and the second crystallographic plane is a {111} plane.
Claim 16
Dependent Claim
29 words
The optoelectronic element of Claim 13 further characterized in that: the optical fiber is contained in a V -groove defined by {111} planes in the first monocrystalline silicon element.
Claim 17
Dependent Claim
23 words
The optoelectronic device of Claim 14 further characterized in that: the first angle is substantially 54.74° and the second angle is substantially 19.48°.
Claim 18
Dependent Claim
42 words
The optoelectronic device package of Claim 13 further characterized in that: the first monocrystalline element is {100} silicon, the second monocrystalline element is {112} silicon; the first crystallographic plane is a {111} plane; and the second crystallographic plane is a {111} plane.
Claim 19
Dependent Claim
28 words
The optoelectronic device of Claim 16 further characterized in that: the optical fiber is mounted in a groove defined by {111} crystallographic planes in the first monocrystalline element.
Claim 20
Dependent Claim
23 words
The optoelectric device of Claim 17 further characterized in that: the first angle is substantially 35.26°, and the second angle is substantially -19.48°.
References Cited (Backward Citations)
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