Patent US7712198B2 successfully refreshed from Google Patents.
US7712198B2
Active / In Force
US
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Microneedle array device and its fabrication method
Assignee: Industrial Technology Research Institute
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Filing: 2007-05-29
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Granted: 2010-05-11
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Expires: 2027-05-29
Abstract
Abstract A microneedle array device and its fabrication method are provided. The microneedle array device comprises a supporting pad and a plurality of microneedles. Each microneedle has a top portion with a via thereon, thereby the microfluid may flow in or out. The intersection between the top portion and the inner tube of a microneedle forms a convex needle structure, and is almost perpendicular to the upper surface. For each microneedle, a hollow closed tube is formed between the top portion and the supporting pad. The fabrication method uses substrates with high transmittance and a plurality of convex area thereon as upper and lower caps, and applies a photolithography process to fabricate a microneedle array mold. It then sputters or electroplates metal material on the mold. The microneedle array is formed after having taken off the mold.
Inventors
- 👤 Shih-Chi Kuo
- 👤 Yu-Kon Chou
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 11:53
CPC Classifications
B; B81; B81C; B81C1/00; B81C1/00015; B81C1/00023; B81C1/00111; A; A61; A61B; A61B17/00; A61B17/20; A61B17/205; A61M; A61M37/00; A61M37/0015; A61M2037/0053; B81B; B81B2201/00; B81B2201/05; B81B2201/055; Y; Y10; Y10T; Y10T29/00; Y10T29/30; Y10T29/301; Y10T29/302; Y10T29/303; Y10T29/304; Y10T29/308; Y10T29/49; Y10T29/4998; Y10T29/49982
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
103 words
A method of fabricating a microneedle array device, comprising the steps of: (1) providing a substrate, and forming a plurality of concave areas on a surface of said substrate; (2) coating a layer of photo-sensitive material on top of said substrate, and coating a layer of light transmission material on top of said photo-sensitive material; (3) using a patterned mask for exposure and development of said photo-sensitive material on said light transmission material to obtain a polymer hollow microneedle array mold using said light transmission material as a base; and (4) forming a microneedle array device using said polymer hollow microneedle array mold.
Claim 2
Independent Claim
103 words
A method of fabricating a microneedle array device, comprising the steps of: (1) providing a substrate, and forming a plurality of concave areas on a surface of said substrate; (2) coating a layer of photo-sensitive material on top of said substrate, and coating a layer of light transmission material on top of said photo-sensitive material; (3) using a patterned mask for exposure and development of said photo-sensitive material on said light transmission material to obtain a polymer hollow microneedle array mold using said light transmission material as a base; and (4) forming a microneedle array device using said polymer hollow microneedle array mold.
Claim 3
Dependent Claim
18 words
The method as claimed in claim 1 , wherein said substrate in step (1) is made of silicon.
Claim 4
Dependent Claim
26 words
The method as claimed in claim 1 , wherein said plurality of concave areas on said substrate in step (1) are formed by an etching technique.
Claim 5
Dependent Claim
17 words
The method as claimed in claim 3 , wherein said etching technique is anisotropic wet etching technique.
Claim 6
Dependent Claim
34 words
The method as claimed in claim 1 , wherein said plurality of concave areas on said substrate in step (1) are formed by X-ray etching, ultra-violet etching, ion beam etching, or excimer laser micromachining.
Claim 7
Dependent Claim
28 words
The method as claimed in claim 1 , wherein said plurality of concave areas on said substrate in step (1) are formed by micro electro discharge machining technique.
Claim 8
Dependent Claim
20 words
The method as claimed in claim 1 , wherein said photo-sensitive material in said step (2) is SU-8 or JSR430N.
Claim 9
Dependent Claim
21 words
The method as claimed in claim 1 , wherein said light transmission material in said step (2) is PMMA or glass.
Claim 10
Dependent Claim
27 words
The method as claimed in claim 1 , wherein said step (3) further comprises a step of using a patterned mask to define the shape of microneedles.
Claim 11
Dependent Claim
76 words
The method as claimed in claim 9 , wherein said patterned mask comprises a plurality of pairs of closed curves, each said pair of closed curves comprise a first closed curve and a second closed curve, said first closed curve encompasses said second closed curve, said second closed curve has a circumference smaller than that of said first closed curve, and remaining areas are masked except the area between said first and said second closed curves.
Claim 12
Dependent Claim
23 words
The method as claimed in claim 9 , wherein said step (3) further comprises a step of forming at least a reservoir layer.
Claim 13
Dependent Claim
24 words
The method as claimed in claim 11 , wherein the shape of each said reservoir layer is defined by using a corresponding patterned mask.
Claim 14
Dependent Claim
24 words
The method as claimed in claim 11 , wherein the depth of each said reservoir layer is controlled by adjusting exposure dosage of light.
Claim 15
Dependent Claim
64 words
The method as claimed in claim 1 , wherein said step (4) further comprises the following sub-steps of: ( 4 a ) coating a metal layer on outer surfaces of said polymer hollow microneedle array mold and said light transmission material to form said microneedle array device; and ( 4 b ) removing said polymer hollow microneedle array mold from said microneedle array device.
Claim 16
Dependent Claim
28 words
The method as claimed in claim 14 , wherein coating said metal layer in said step ( 4 a ) is by electroplating, electroless plating, evaporation, or sputtering.
Claim 17
Dependent Claim
29 words
The method as claimed in claim 14 , wherein said metal layer is chosen from one of Cu, Cr, Ni, Fe, Au, Pt, Pd, stainless steel and their alloys.
Claim 18
Dependent Claim
39 words
The method as claimed in claim 14 , wherein removing said polymer hollow microneedle array mold in said step ( 4 b ) uses one of oxygen removal, thermal removal, solvent removal, aqueous removal, photo-degradation removal, and their combinations.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2013-05-10 | 2013-11-09 | 2014-05-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2017-05-10 | 2017-11-09 | 2018-05-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2021-05-10 | 2021-11-09 | 2022-05-11 | $7700.00 | Window Closed / Lapsed |