Patent US7230284B2 successfully refreshed from Google Patents.
US7230284B2
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Insulating gate AlGaN/GaN HEMT
Assignee: Wolfspeed Inc
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Filing: 2002-07-23
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Granted: 2007-06-12
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Expires: 2022-07-23
Abstract
Abstract AlGaN/GaN HEMTs are disclosed having a thin AlGaN layer to reduce trapping and also having additional layers to reduce gate leakage and increase the maximum drive current. One HEMT according to the present invention comprises a high resistivity semiconductor layer with a barrier semiconductor layer on it. The barrier layer has a wider bandgap than the high resistivity layer and a 2DEG forms between the layers. Source and drain contacts contact the barrier layer, with part of the surface of the barrier layer uncovered by the contacts. An insulating layer is included on the uncovered surface of the barrier layer and a gate contact is included on the insulating layer. The insulating layer forms a barrier to gate leakage current and also helps to increase the HEMT's maximum current drive. The invention also includes methods for fabricating HEMTs according to the present invention. In one method, the HEMT and its insulating layer are fabricated using metal-organic chemical vapor deposition (MOCVD). In another method the insulating layer is sputtered onto the top surface of the HEMT in a sputtering chamber.
Inventors
- 👤 Primit Parikh
- 👤 Umesh Mishra
- 👤 Yifeng Wu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 14:13
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/40; H10D30/47; H10D30/471; H10D30/475; H10D30/4755; H10D30/473; H10D30/4732; H10D64/00; H10D64/60; H10D64/66; H10D64/68; H10D64/691; H10D64/693; H10D62/00; H10D62/80; H10D62/85; H10D62/8503; H10D64/602; H10W; H10W74/00; H10W74/10; H10W74/131; H10W74/137; H10W74/40; H10W74/43
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
153 words
A high electron mobility transistor (HEMT), comprising: a GaN based high resistivity semiconductor layer; a GaN based barrier semiconductor layer on said high resistivity semiconductor layer, said barrier layer having a wider bandgap than said high resistivity semiconductor layer; a two-dimensional electron gas between said barrier layer and said high resistivity semiconductor layer; respective source and drain contacts directly contacting said barrier layer and said GaN based high resistivity semiconductor layer; an insulating layer positioned on said barrier layer; and a gate contact on said insulating layer, said insulating layer forming a barrier against gate leakage current and increasing the HEMT's maximum current drive, wherein said insulating layer comprises a layer of silicon nitride and a layer of aluminum nitride, said aluminum nitride layer providing a spacer between said barrier layer and said silicon nitride insulating layer to reduce doping and degradation of said barrier layer during growth of said silicon nitride layer.
Claim 2
Dependent Claim
153 words
A high electron mobility transistor (HEMT), comprising: a GaN based high resistivity semiconductor layer; a GaN based barrier semiconductor layer on said high resistivity semiconductor layer, said barrier layer having a wider bandgap than said high resistivity semiconductor layer; a two-dimensional electron gas between said barrier layer and said high resistivity semiconductor layer; respective source and drain contacts directly contacting said barrier layer and said GaN based high resistivity semiconductor layer; an insulating layer positioned on said barrier layer; and a gate contact on said insulating layer, said insulating layer forming a barrier against gate leakage current and increasing the HEMT's maximum current drive, wherein said insulating layer comprises a layer of silicon nitride and a layer of aluminum nitride, said aluminum nitride layer providing a spacer between said barrier layer and said silicon nitride insulating layer to reduce doping and degradation of said barrier layer during growth of said silicon nitride layer.
Claim 3
Dependent Claim
22 words
The HEMT of claim 1 , further comprising a dielectric layer covering the exposed surfaces of said insulating layer between said contacts.
Claim 4
Dependent Claim
160 words
A high electron mobility transistor (HEMT), comprising: a Group-III nitride based high resistivity semiconductor layer; a Group-III nitride barrier semiconductor layer on said high resistivity semiconductor layer, said barrier layer having a wider bandgap then said high resistivity semiconductor layer; a two-dimensional electron gas between said barrier layer and said high resistivity semiconductor layer; respective source and drain contacts directly contacting said barrier layer and said Group-III nitride based high resistivity semiconductor layer; an insulating layer positioned on said barrier layer; and a gate contact on said insulating layer, said insulating layer forming a barrier against gate leakage current and increasing the HEMT's maximum current drive wherein said insulating layer covers the surface of said barrier layer between said source and drain contacts and wherein said insulating layer comprises a AlN layer and a SiN layer, with said AlN layer sandwiched between said barrier layer and said SiN layer to protect said barrier layer during formation of said SiN layer.
Claim 5
Dependent Claim
160 words
A high electron mobility transistor (HEMT), comprising: a Group-III nitride based high resistivity semiconductor layer; a Group-III nitride barrier semiconductor layer on said high resistivity semiconductor layer, said barrier layer having a wider bandgap then said high resistivity semiconductor layer; a two-dimensional electron gas between said barrier layer and said high resistivity semiconductor layer; respective source and drain contacts directly contacting said barrier layer and said Group-III nitride based high resistivity semiconductor layer; an insulating layer positioned on said barrier layer; and a gate contact on said insulating layer, said insulating layer forming a barrier against gate leakage current and increasing the HEMT's maximum current drive wherein said insulating layer covers the surface of said barrier layer between said source and drain contacts and wherein said insulating layer comprises a AlN layer and a SiN layer, with said AlN layer sandwiched between said barrier layer and said SiN layer to protect said barrier layer during formation of said SiN layer.
Claim 6
Dependent Claim
21 words
The HEMT of claim 3 , further comprising a dielectric layer on the surface of said insulating layer between said contacts.
Claim 7
Dependent Claim
209 words
A high electron mobility transistor (HEMT), comprising: a GaN semiconductor layer that has a high resistivity; a AlGaN semiconductor barrier layer on said GaN layer, said AlGaN layer having a wider bandgap than said GaN layer; a two dimensional electron gas (2-DEG) between said AlGaN barrier layer and said GaN layer; source and drain contacts directly contacting said AlGaN layer and said GaN semiconductor layer; a gate contact electrically coupled with said 2-DEC through said barrier layer; and a means for forming a barrier against gate leakage current between said gate contact and said barrier layer, said barrier also increasing the HEMT's maximum current drive, wherein said means for forming a barrier comprises double insulating layers each made from a different material, on said barrier layer with said gate contact on said double insulating layers, the first layer of said double insulating layers providing a spacer between said barrier layer and the second layer of said double insulating layers to prevent doping or degradation to said barrier layer when said second layer of said double insulating layers is deposited, wherein said double insulating layers comprise a layer of AlN and a layer of SiN, said AlN layer serving as said spacer between said barrier layer and said SiN layer.
Claim 8
Dependent Claim
209 words
A high electron mobility transistor (HEMT), comprising: a GaN semiconductor layer that has a high resistivity; a AlGaN semiconductor barrier layer on said GaN layer, said AlGaN layer having a wider bandgap than said GaN layer; a two dimensional electron gas (2-DEG) between said AlGaN barrier layer and said GaN layer; source and drain contacts directly contacting said AlGaN layer and said GaN semiconductor layer; a gate contact electrically coupled with said 2-DEC through said barrier layer; and a means for forming a barrier against gate leakage current between said gate contact and said barrier layer, said barrier also increasing the HEMT's maximum current drive, wherein said means for forming a barrier comprises double insulating layers each made from a different material, on said barrier layer with said gate contact on said double insulating layers, the first layer of said double insulating layers providing a spacer between said barrier layer and the second layer of said double insulating layers to prevent doping or degradation to said barrier layer when said second layer of said double insulating layers is deposited, wherein said double insulating layers comprise a layer of AlN and a layer of SiN, said AlN layer serving as said spacer between said barrier layer and said SiN layer.
Claim 9
Dependent Claim
25 words
The HEMT of claim 5 , further comprising a dielectric layer on the surfaces of said double insulating layers and barrier layer between said contacts.
Claim 10
Dependent Claim
111 words
A transistor, comprising: a Group-III nitride high resistivity semiconductor layer; a Group-III nitride barrier semiconductor layer on said high resistivity semiconductor layer; source and drain contacts directly contacting said barrier layer and said Group-III nitride high resistivity semiconductor layer; an insulating layer positioned on said barrier layer; and a gate contact on said insulating layer, said insulating layer forming a barrier against gate leakage current, wherein said insulating layer comprises multiple layers comprising a layer of silicon nitride on a layer of aluminum nitride, wherein said aluminum nitride layer serves as a spacer to minimize doping and degradation of said barrier layer during formation of the rest of said multiple layers.
Claim 11
Dependent Claim
111 words
A transistor, comprising: a Group-III nitride high resistivity semiconductor layer; a Group-III nitride barrier semiconductor layer on said high resistivity semiconductor layer; source and drain contacts directly contacting said barrier layer and said Group-III nitride high resistivity semiconductor layer; an insulating layer positioned on said barrier layer; and a gate contact on said insulating layer, said insulating layer forming a barrier against gate leakage current, wherein said insulating layer comprises multiple layers comprising a layer of silicon nitride on a layer of aluminum nitride, wherein said aluminum nitride layer serves as a spacer to minimize doping and degradation of said barrier layer during formation of the rest of said multiple layers.
Claim 12
Dependent Claim
18 words
The transistor of claim 7 , wherein said insulating layer increases the maximum current drive of said transistor.
Claim 13
Dependent Claim
25 words
The transistor of claim 7 , wherein said barrier semiconductor layer has a thickness that allows said transistor to produce efficient gain at microwave frequencies.
Claim 14
Dependent Claim
22 words
The transistor of claim 7 , wherein said aluminum nitride layer is sandwiched between said barrier layer and said silicon nitride layer.
Claim 15
Dependent Claim
21 words
The transistor of claim 7 , further comprising a dielectric layer on the surface of said insulating layer between said contacts.
Claim 16
Dependent Claim
38 words
The transistor of claim 7 , wherein said barrier layer has a wider bandgap than said high resistivity semiconductor layer, said transistor further comprising a two-dimensional electron gas between said barrier layer and said high resistivity semiconductor layer.
Claim 17
Dependent Claim
13 words
The transistor of claim 7 , comprising a high electron mobility transistor (HEMT).
Claim 18
Dependent Claim
12 words
The transistor of claim 7 , comprising a field effect transistor (FET).
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