US7064346B2
Expired / Lapsed
US
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Transistor and semiconductor device
Assignee: Japan Science and Technology Agency
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Filing: 2004-01-29
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Granted: 2006-06-20
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Expires: 2024-01-29
Abstract
Abstract In an npn-type transistor, the emitter 42 and the collector 43 are formed of an n-type transparent semiconductor, and the base 41 is formed by a p-type transparent semiconductor. The base electrode 44 , the emitter electrode 45 and the collector electrode 46 are formed respectively on the base 41 , the emitter 42 and the collector 43 . As the n-type transparent semiconductor, for example, n-type ZnO is used. The n-type ZnO is ZnO doped with, for example, group III elements, group VII elements. As the p-type transparent semiconductor, for example, p-type ZnO is used. The p-type ZnO is ZnO doped with, for example, group I elements and group V elements.
Inventors
- 👤 Masashi Kawasaki
- 👤 Hideo Ohno
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 10:44
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/80; H01; H01S; H01S5/00; H01S5/02; H01S5/026; H01S5/0261; H10D10/00; H10D10/311; H10D30/60; H10D30/67; H10D30/6704; H10D30/6713; H10D30/6729; H10D30/6737; H10D30/6739; H10D30/674; H10D30/6755; H10D64/00; H10D64/60; H10D64/62; H10D64/66; H10D64/68; H10D64/691; H10H; H10H29/00; H10H29/10; H10D62/00; H10D62/80; H10D62/86; H10H20/00; H10H20/80; H10H20/81; H10H20/822; H10H20/823
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
211 words
A transistor, comprising: an emitter, a collector and a base selected from the group consisting of: (a) an emitter and a collector made of a transparent n-type semiconductor, and a base made of a transparent p-type semi conductor, and (b) a base made of a transparent n-type semiconductor, and an emitter and a collector made of a transparent p-type semiconductor, said n-type semiconductor comprising any one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O and cadmium oxide CdO, doped with group III elements or group VII elements, and said transparent p-type semiconductor comprising any one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O and cadmium oxide CdO, doped with group I elements or group V elements; and a base electrode, an emitter electrode and a collector electrode, in which (1) a transparent conductive material doped or undoped with any one of group III elements, group VII elements and group I elements, (2) a transparent conductor, or (3) an untransparent electrode material are used partially or entirely, the base electrode, the emitter electrode and the collector electrode being respectively formed on said base, said emitter and said collector.
Claim 2
Dependent Claim
211 words
A transistor, comprising: an emitter, a collector and a base selected from the group consisting of: (a) an emitter and a collector made of a transparent n-type semiconductor, and a base made of a transparent p-type semi conductor, and (b) a base made of a transparent n-type semiconductor, and an emitter and a collector made of a transparent p-type semiconductor, said n-type semiconductor comprising any one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O and cadmium oxide CdO, doped with group III elements or group VII elements, and said transparent p-type semiconductor comprising any one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O and cadmium oxide CdO, doped with group I elements or group V elements; and a base electrode, an emitter electrode and a collector electrode, in which (1) a transparent conductive material doped or undoped with any one of group III elements, group VII elements and group I elements, (2) a transparent conductor, or (3) an untransparent electrode material are used partially or entirely, the base electrode, the emitter electrode and the collector electrode being respectively formed on said base, said emitter and said collector.
Claim 3
Dependent Claim
51 words
A semiconductor device, comprising: the transistor according to claim 1 ; and a light emission portion formed of a region continuous to said collector or said emitter of said transistor or a region of another semiconductor connected to said collector or said emitter, and a semiconductor layer joined to said region.
Claim 4
Dependent Claim
62 words
A semiconductor device, comprising: the transistor according to claim 1 , and a capacitor formed of a region continuous to said collector and said emitter of said transistor or a region of another semiconductor or a conductor connected to said collector or said emitter, an insulating layer on said region, and a semiconductor layer or a conductive layer on said insulating layer.
Claim 5
Dependent Claim
33 words
A semiconductor device, wherein a plurality of the semiconductor devices according to claim 3 are arranged in a matrix shape, and a capacitor or a light emission portion is driven by each transistor.
Claim 6
Dependent Claim
70 words
A semiconductor device, comprising a plurality of transistors according to claim 1 , and an insulating layer, said insulating layer is between transistors of said plurality of transistors; wherein said insulating layer comprises a transparent insulating material including at least one of insulative ZnO doped with elements capable of taking a valence of one as a valence number or group V elements, a transparent insulating oxide, and a transparent insulator.
Claim 7
Dependent Claim
77 words
A semiconductor device, comprising: a plurality of transistors according to claim 1 ; and wiring between said plurality of transistors, wherein said wiring comprises a transparent conductive material including at least one of conductive ZnO doped or undoped with group III elements, group VII elements, group I elements and group V elements, a transparent conductor comprising at least one of In 2 O 3 , SnO 2 and , (In—Sn)O x , or a un-transparent electrode material.
Claim 8
Dependent Claim
66 words
A semiconductor device, comprising: the transistor according to claim 1 ; and an inductor comprising a transparent conductive material, said transparent conductive material comprising at least one of conductive ZnO doped or undoped with group III elements, group VII elements, group I elements and group V elements, and a transparent conductor comprising at least one of In 2 O 3 ,SnO 2 and (In—Sn)O x .
Claim 9
Dependent Claim
33 words
A semiconductor device, wherein a plurality of the semiconductor devices according to claim 2 are arranged in a matrix shape, and a capacitor or a light emission portion is driven by each transistor.
Claim 10
Dependent Claim
25 words
The transistor of claim 1 , wherein said transparent n-type semiconductor includes at least conductive ZnO doped with group III elements or group VII elements.
Claim 11
Dependent Claim
25 words
The transistor of claim 1 , wherein said transparent p-type semiconductor includes at least conductive ZnO doped with group I elements or group V elements.
Claim 12
Dependent Claim
37 words
The transistor of claim 1 , wherein said transparent conductive material includes at least one conductive ZnO undoped and conductive ZnO doped with at least one of group III elements, group VII elements, and group I elements.
Claim 13
Dependent Claim
27 words
The transistor of claim 1 , wherein said transparent conductive material includes at least one of In 2 O 3 , SnO 2 and (In—Sn)O x .
Claim 14
Dependent Claim
17 words
The transistor of claim 1 , wherein said base is made of a transparent n-type semi conductor.
Claim 15
Dependent Claim
17 words
The transistor of claim 1 , wherein said base is made of a transparent p-type semi conductor.
Claim 16
Independent Claim
273 words
A method of making a transistor, comprising: depositing an emitter, a collector, and a base, wherein said emitter, said collector and said base are selected from the group consisting of: (a) an emitter and a collector made of a transparent n-type semiconductor, and a base made of a transparent p-type semiconductor, and (b) a base made of a transparent n-type semiconductor, and an emitter and a collector made of a transparent p-type semiconductor, said n-type semiconductor comprising any one of ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said n-type semiconductor is doped with group III elements or group VII elements; depositing a base, an emitter and a collector, wherein said base, or said emitter and said collector are made of a transparent p-type semiconductor comprising at least one of ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, said p-type semiconductor doped with group I elements or group V elements; and depositing a base electrode, an emitter electrode and a collector electrode, wherein said base electrode, said emitter electrode and said collector electrode comprise a transparent conductive material comprising conductive ZnO doped or undoped with any one of group III elements, group VII elements and group I elements, or a transparent conductive material comprising at least one of In 2 O 3 , SnO 2 and (In—Sn)O x ,or an untransparent electrode material and wherein said base electrode, said emitter electrode and said collector electrode are respectively formed on said base, said emitter, and said collector.
Claim 17
Independent Claim
273 words
A method of making a transistor, comprising: depositing an emitter, a collector, and a base, wherein said emitter, said collector and said base are selected from the group consisting of: (a) an emitter and a collector made of a transparent n-type semiconductor, and a base made of a transparent p-type semiconductor, and (b) a base made of a transparent n-type semiconductor, and an emitter and a collector made of a transparent p-type semiconductor, said n-type semiconductor comprising any one of ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said n-type semiconductor is doped with group III elements or group VII elements; depositing a base, an emitter and a collector, wherein said base, or said emitter and said collector are made of a transparent p-type semiconductor comprising at least one of ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, said p-type semiconductor doped with group I elements or group V elements; and depositing a base electrode, an emitter electrode and a collector electrode, wherein said base electrode, said emitter electrode and said collector electrode comprise a transparent conductive material comprising conductive ZnO doped or undoped with any one of group III elements, group VII elements and group I elements, or a transparent conductive material comprising at least one of In 2 O 3 , SnO 2 and (In—Sn)O x ,or an untransparent electrode material and wherein said base electrode, said emitter electrode and said collector electrode are respectively formed on said base, said emitter, and said collector.
Claim 18
Dependent Claim
25 words
The method of claim 15 , wherein said transparent n-type semiconductor includes at least conductive ZnO doped with group III elements or group VII elements.
Claim 19
Dependent Claim
25 words
The method of claim 15 , wherein said transparent p-type semiconductor includes at least conductive ZnO doped with group I elements or group V elements.
Claim 20
Dependent Claim
37 words
The method of claim 15 , wherein said transparent conductive material includes at least one of conductive ZnO undoped and conductive ZnO doped with any one of group III elements, group VII elements and group I elements.
Claim 21
Dependent Claim
27 words
The method of claim 15 , wherein said transparent conductive material includes at least one of In 2 O 3 , SnO 2 and (In—Sn)O x .
Claim 22
Dependent Claim
16 words
The method of claim 15 , wherein said base is made of a transparent n-type semiconductor.
Claim 23
Dependent Claim
16 words
The method of claim 15 , wherein said base is made of a transparent p-type semiconductor.
Claim 24
Independent Claim
297 words
A method of making a transistor, comprising: providing an emitter and a collector, or a base, wherein said emitter, said collector and said base are selected from the group consisting of: (a) an emitter and a collector made of a transparent n-type semiconductor, and a base made of a transparent p-type semiconductor, and (b) a base made of a transparent n-type semiconductor, and an emitter and a collector made of a transparent p-type semiconductor, said n-type semiconductor comprising at least one of ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said n-type semiconductor is doped with at least one of group III elements and group VII elements; providing a base, or an emitter and a collector, wherein said base, or said emitter and said collector are made of a transparent p-type semiconductor comprising at least one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said p-type semiconductor is doped at least one of with group I elements and group V elements; and providing a base electrode, an emitter electrode, and a collector electrode; wherein said base electrode, said emitter electrode, and said collector electrode respectively are formed on said base, said emitter, and said collector; wherein said base electrode, said emitter electrode, and said collector electrode comprise: (1) a transparent conductive material comprising conductive ZnO that is undoped and conductive ZnO that is doped with at least one of group III elements, group VII elements, and group I elements; or (2) a transparent conductor comprising at least one of In 2 O 3 , SnO 2 and (In—Sn)O x ; or (3) an un-transparent electrode material.
Claim 25
Independent Claim
297 words
A method of making a transistor, comprising: providing an emitter and a collector, or a base, wherein said emitter, said collector and said base are selected from the group consisting of: (a) an emitter and a collector made of a transparent n-type semiconductor, and a base made of a transparent p-type semiconductor, and (b) a base made of a transparent n-type semiconductor, and an emitter and a collector made of a transparent p-type semiconductor, said n-type semiconductor comprising at least one of ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said n-type semiconductor is doped with at least one of group III elements and group VII elements; providing a base, or an emitter and a collector, wherein said base, or said emitter and said collector are made of a transparent p-type semiconductor comprising at least one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said p-type semiconductor is doped at least one of with group I elements and group V elements; and providing a base electrode, an emitter electrode, and a collector electrode; wherein said base electrode, said emitter electrode, and said collector electrode respectively are formed on said base, said emitter, and said collector; wherein said base electrode, said emitter electrode, and said collector electrode comprise: (1) a transparent conductive material comprising conductive ZnO that is undoped and conductive ZnO that is doped with at least one of group III elements, group VII elements, and group I elements; or (2) a transparent conductor comprising at least one of In 2 O 3 , SnO 2 and (In—Sn)O x ; or (3) an un-transparent electrode material.
Claim 26
Independent Claim
312 words
A method of using a transistor, said transistor comprising: an emitter and a collector, or a base, wherein said emitter, said collector and said base are selected from the group consisting of: (a) an emitter and a collector made of a transparent n-type semiconductor, and a base made of a transparent p-type semiconductor, and (b) a base made of a transparent n-type semiconductor, and an emitter and a collector made of a transparent p-type semiconductor, said n-type semiconductor comprising any one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said n-type semiconductor is doped with at least one of group III elements and group VII elements; or a base, or an emitter and a collector, wherein said base, or said emitter and said collector are made of a transparent p-type semiconductor comprising any one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said p-type semiconductor is doped with at least one of group I elements and group V elements; a base electrode, an emitter electrode, and a collector electrode; wherein said base electrode, said emitter electrode, and the collector electrode are respectively formed on said base, said emitter, and said collector; wherein said base electrode, said emitter electrode, and said collector electrode comprise: (1) a transparent conductive material comprising one of conductive ZnO that is undoped and conductive ZnO that is doped with at least one of group III elements, group VII elements, and group I elements; or (2) a transparent conductor comprising at least one of In 2 O 3 , SnO 2 and (In—Sn)O x ,or (3) an un-transparent electrode material; and said method comprising applying a voltage across at least one electrode of said transistor.
Claim 27
Independent Claim
312 words
A method of using a transistor, said transistor comprising: an emitter and a collector, or a base, wherein said emitter, said collector and said base are selected from the group consisting of: (a) an emitter and a collector made of a transparent n-type semiconductor, and a base made of a transparent p-type semiconductor, and (b) a base made of a transparent n-type semiconductor, and an emitter and a collector made of a transparent p-type semiconductor, said n-type semiconductor comprising any one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said n-type semiconductor is doped with at least one of group III elements and group VII elements; or a base, or an emitter and a collector, wherein said base, or said emitter and said collector are made of a transparent p-type semiconductor comprising any one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said p-type semiconductor is doped with at least one of group I elements and group V elements; a base electrode, an emitter electrode, and a collector electrode; wherein said base electrode, said emitter electrode, and the collector electrode are respectively formed on said base, said emitter, and said collector; wherein said base electrode, said emitter electrode, and said collector electrode comprise: (1) a transparent conductive material comprising one of conductive ZnO that is undoped and conductive ZnO that is doped with at least one of group III elements, group VII elements, and group I elements; or (2) a transparent conductor comprising at least one of In 2 O 3 , SnO 2 and (In—Sn)O x ,or (3) an un-transparent electrode material; and said method comprising applying a voltage across at least one electrode of said transistor.
Claim 28
Dependent Claim
288 words
A transistor, comprising: an emitter, a collector and a base made of a transparent n-type semiconductor selected from the group consisting of: (a) an emitter and a collector made of a transparent n-type semiconductor, and a base made of a transparent p-type semiconductor, and (b) a base made of a transparent n-type semiconductor, and an emitter and a collector made of a transparent p-type semiconductor, said transparent n-type semiconductor comprising at least one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said transparent n-type semiconductor is doped with at least one of group III elements and group VII elements; a base, or an emitter and a collector made of a transparent p-type semiconductor, said transparent p-type semiconductor comprising any one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said transparent p-type semiconductor is doped with at least one of group I elements and group V elements; and a base electrode, an emitter electrode, and a collector electrode; wherein said base electrode, said emitter electrode, and said collector electrode are respectively formed on said base, said emitter, and said collector; and wherein said base electrode, said emitter electrode, and said collector electrode comprise: (1) a transparent conductive material comprising one of conductive ZnO that is un-doped and conductive ZnO that is doped with at least one of group III elements, group VII elements, and group I elements; or (2) a transparent conductor comprising at least one of In 2 O 3 , SnO 2 , and (In—Sn)O x , or (3) an un-transparent electrode material.
Claim 29
Dependent Claim
288 words
A transistor, comprising: an emitter, a collector and a base made of a transparent n-type semiconductor selected from the group consisting of: (a) an emitter and a collector made of a transparent n-type semiconductor, and a base made of a transparent p-type semiconductor, and (b) a base made of a transparent n-type semiconductor, and an emitter and a collector made of a transparent p-type semiconductor, said transparent n-type semiconductor comprising at least one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said transparent n-type semiconductor is doped with at least one of group III elements and group VII elements; a base, or an emitter and a collector made of a transparent p-type semiconductor, said transparent p-type semiconductor comprising any one of zinc oxide ZnO, zinc magnesium oxide Mg x Zn 1-x O, zinc cadmium oxide Cd x Zn 1-x O, and cadmium oxide CdO, and said transparent p-type semiconductor is doped with at least one of group I elements and group V elements; and a base electrode, an emitter electrode, and a collector electrode; wherein said base electrode, said emitter electrode, and said collector electrode are respectively formed on said base, said emitter, and said collector; and wherein said base electrode, said emitter electrode, and said collector electrode comprise: (1) a transparent conductive material comprising one of conductive ZnO that is un-doped and conductive ZnO that is doped with at least one of group III elements, group VII elements, and group I elements; or (2) a transparent conductor comprising at least one of In 2 O 3 , SnO 2 , and (In—Sn)O x , or (3) an un-transparent electrode material.
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