Patent US4887715A successfully refreshed from Google Patents.
Patent US6821686B2 successfully refreshed from Google Patents.
US6821686B2
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US
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Method of defect repairing in graytone part in graytone mask
Assignee: Hoya Corp
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Filing: 2002-03-28
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Granted: 2004-11-23
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Expires: 2022-03-28
Abstract
Abstract Repairing patterns 3 a ′ and 3 b ′ different in width and position respectively from regular patterns 3 a and 3 b by partially removing a repairing film 8 in the form and/or the disposition of achieving a graytone effect equal to the graytone effect of a regular pattern after forming the repairing film 8 in an area containing clear defects.
Inventors
- 👤 Kenji Nakayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 10:31
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/68; G03F1/72; G03F1/50
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
142 words
A method of repairing a defect in a graytone mask, wherein the graytone mask comprises an opaque part, a transmission part and a graytone part including an opaque pattern, wherein the defect causes the graytone part to differ from an intended graytone part including an intended opaque pattern which does not exceed a resolution limit of an exposure apparatus using the intended graytone mask so that the intended graytone part has a graytone effect in which an amount of light transmitted through the intended graytone part is attenuated thereby selectively varying a thickness of a photoresist film to be exposed through the graytone mask, the method comprising forming a repairing pattern which structurally differs from the intended opaque pattern, wherein the graytone part with the repairing pattern provides a graytone effect substantially equal to the graytone effect of the intended graytone part.
Claim 2
Independent Claim
142 words
A method of repairing a defect in a graytone mask, wherein the graytone mask comprises an opaque part, a transmission part and a graytone part including an opaque pattern, wherein the defect causes the graytone part to differ from an intended graytone part including an intended opaque pattern which does not exceed a resolution limit of an exposure apparatus using the intended graytone mask so that the intended graytone part has a graytone effect in which an amount of light transmitted through the intended graytone part is attenuated thereby selectively varying a thickness of a photoresist film to be exposed through the graytone mask, the method comprising forming a repairing pattern which structurally differs from the intended opaque pattern, wherein the graytone part with the repairing pattern provides a graytone effect substantially equal to the graytone effect of the intended graytone part.
Claim 3
Dependent Claim
38 words
The method of claim 1 , wherein the defect is an opaque defect, and the step of forming the repairing pattern comprises removing at least a portion of an opaque film in an area including the opaque defect.
Claim 4
Dependent Claim
30 words
The method of claim 2 , wherein the step of removing the portion of the opaque film comprises forming a slit in the opaque film using a laser repair apparatus.
Claim 5
Dependent Claim
79 words
The method of claim 1 , wherein said defect is a clear area defect comprising a clear area in the opaque pattern of the graytone part, and the clear area corresponds to an opaque area of the intended opaque pattern of the intended graytone part which is not present in the opaque pattern of the graytone part, and the step of forming the repairing pattern comprises forming the repairing pattern in at least a portion of the clear area.
Claim 6
Dependent Claim
25 words
The method of claim 4 , wherein the step of forming the repairing pattern comprises forming a slit using a laser chemical vapor deposition apparatus.
Claim 7
Dependent Claim
94 words
The method of claim 1 , wherein said defect is a clear area defect comprising a clear area in the opaque pattern of the graytone part, and the clear area corresponds to an opaque area of the intended opaque pattern of the intended graytone part which is not present in the opaque pattern of the graytone part, and the step of forming the repairing pattern comprises: forming the repairing film in at least a portion of the clear area; and removing at least a portion of the repairing film thereby forming the repairing pattern.
Claim 8
Dependent Claim
30 words
The method of claim 6 , wherein the step of removing the portion of the repairing film comprises forming a slit in the repairing film using a laser repair apparatus.
Claim 9
Dependent Claim
18 words
The method of claim 1 , wherein the graytone mask is a mask for a liquid crystal display.
Claim 10
Dependent Claim
18 words
The method of claim 1 , wherein said repairing pattern includes at least a portion of the defect.
Claim 11
Independent Claim
195 words
A method of repairing a clear area defect in a graytone mask, wherein the graytone mask comprises an opaque part, a transmission part and a graytone part including an opaque pattern, wherein the clear area defect causes the graytone part to differ from an intended graytone part including an intended opaque pattern which does not exceed a resolution limit of an exposure apparatus using the intended graytone mask so that the intended graytone part has a graytone effect in which an amount of light transmitted through the intended graytone part is attenuated thereby selectively varying a thickness of a photoresist film to be exposed through the graytone mask, wherein the clear area defect comprises a clear area in the opaque pattern of the graytone part, and the clear area corresponds to an opaque area of the intended opaque pattern of the intended graytone part which is not present in the opaque pattern of the graytone part, the method comprising forming a translucent film over at least a portion of the clear area, wherein the graytone part with the translucent film provides a graytone effect substantially equal to the graytone effect of the intended graytone part.
Claim 12
Independent Claim
195 words
A method of repairing a clear area defect in a graytone mask, wherein the graytone mask comprises an opaque part, a transmission part and a graytone part including an opaque pattern, wherein the clear area defect causes the graytone part to differ from an intended graytone part including an intended opaque pattern which does not exceed a resolution limit of an exposure apparatus using the intended graytone mask so that the intended graytone part has a graytone effect in which an amount of light transmitted through the intended graytone part is attenuated thereby selectively varying a thickness of a photoresist film to be exposed through the graytone mask, wherein the clear area defect comprises a clear area in the opaque pattern of the graytone part, and the clear area corresponds to an opaque area of the intended opaque pattern of the intended graytone part which is not present in the opaque pattern of the graytone part, the method comprising forming a translucent film over at least a portion of the clear area, wherein the graytone part with the translucent film provides a graytone effect substantially equal to the graytone effect of the intended graytone part.
Claim 13
Dependent Claim
24 words
The method of claim 10 , further comprising removing all of the opaque pattern of the graytone part prior to forming the translucent film.
Claim 14
Dependent Claim
18 words
The method of claim 10 , wherein the graytone mask is a mask for a liquid crystal display.
Claim 15
Independent Claim
163 words
A method of repairing a defect in a graytone mask, wherein the graytone mask comprises an opaque part, a transmission part and a graytone part including an opaque pattern, wherein the defect causes the graytone part to differ from an intended graytone part including an intended opaque pattern which does not exceed a resolution limit of an exposure apparatus using the intended graytone mask so that the intended graytone part has a graytone effect in which an amount of light transmitted through the intended graytone part is attenuated thereby selectively varying a thickness of a photoresist film to be exposed through the graytone mask, the method comprising: removing at least a portion of the opaque pattern of the graytone part which includes the defect; and forming a translucent film over at least the portion of opaque pattern which was removed, wherein the graytone part with said translucent film provides a graytone effect substantially equal to the graytone effect of the intended graytone part.
Claim 16
Independent Claim
163 words
A method of repairing a defect in a graytone mask, wherein the graytone mask comprises an opaque part, a transmission part and a graytone part including an opaque pattern, wherein the defect causes the graytone part to differ from an intended graytone part including an intended opaque pattern which does not exceed a resolution limit of an exposure apparatus using the intended graytone mask so that the intended graytone part has a graytone effect in which an amount of light transmitted through the intended graytone part is attenuated thereby selectively varying a thickness of a photoresist film to be exposed through the graytone mask, the method comprising: removing at least a portion of the opaque pattern of the graytone part which includes the defect; and forming a translucent film over at least the portion of opaque pattern which was removed, wherein the graytone part with said translucent film provides a graytone effect substantially equal to the graytone effect of the intended graytone part.
Claim 17
Dependent Claim
18 words
The method of claim 13 , wherein the graytone mask is a mask for a liquid crystal display.
References Cited (Backward Citations)
US6335129B1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-11-23 | 2008-05-24 | 2008-11-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-11-23 | 2012-05-24 | 2012-11-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-11-23 | 2016-05-24 | 2016-11-23 | $7700.00 | Window Closed / Lapsed |