Patent US6744067B1 successfully refreshed from Google Patents.
US6744067B1
Expired / Lapsed
US
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Wafer-level testing apparatus and method
Assignee: Micron Technology Inc
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Filing: 2003-01-17
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Granted: 2004-06-01
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Expires: 2023-01-17
Abstract
Abstract A semiconductor component configured for wafer-level testing includes a semiconductor die having at least one die contact electrically exposed for coupling with a redistribution circuit that electrically couples at least one die contact to an extended contact such as a bumped contact. The component further includes a bus conductor that traverses at least a portion of the die and electrically mates with corresponding bus conductors on other similarly prepared components on the wafer. Functional and nonfunctional dice are identified on the wafer and the nonfunctional dice are isolated from the wafer-level testing grid. Following test, dice may be subsequently tested or moved to singulation wherein the die-to-die interconnection is interrupted, allowing wafer-level tested components to be conventionally assembled. A wafer may be retrofit with the wafer-level redistribution circuit for facilitating wafer-level testing without requiring customization of test fixtures or software for avoiding testing of nonfunctional dice.
Inventors
- 👤 Warren M. Farnworth
- 👤 Steven M. McDonald
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 21:10
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; G01R31/2855; G01R31/2856; H; H10; H10P; H10P74/00; H10P74/27; H10P74/273; G01R31/282; G01R31/2831; G01R31/2884
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
93 words
A semiconductor component comprising: a semiconductor die comprising at least one die contact electrically exposed for coupling therewith; at least one redistribution circuit on said semiconductor die in electrical communication with said at least one die contact; and at least one bus conductor traversing said semiconductor die for electrically coupling with at least one other semiconductor die on a semiconductor wafer, said at least one bus conductor in electrical communication with said at least one redistribution circuit for electrically coupling said at least one die contact to said at least one bus conductor.
Claim 2
Dependent Claim
93 words
A semiconductor component comprising: a semiconductor die comprising at least one die contact electrically exposed for coupling therewith; at least one redistribution circuit on said semiconductor die in electrical communication with said at least one die contact; and at least one bus conductor traversing said semiconductor die for electrically coupling with at least one other semiconductor die on a semiconductor wafer, said at least one bus conductor in electrical communication with said at least one redistribution circuit for electrically coupling said at least one die contact to said at least one bus conductor.
Claim 3
Dependent Claim
32 words
The semiconductor component, as recited in claim 1 , further comprising at least one conductor for electrically directly coupling said at least one redistribution circuit and said at least one bus conductor.
Claim 4
Dependent Claim
29 words
The semiconductor component, as recited in claim 1 , further comprising an outer passivation layer over said at least one redistribution circuit and said at least one bus conductor.
Claim 5
Dependent Claim
68 words
The semiconductor component, as recited in claim 3 , wherein said outer passivation layer is selectively removable to expose at least a portion of at least one of said at least one redistribution circuit and at least one conductor for forming an electrical open circuit between said at least one die contact and said at least one bus conductor when said semiconductor die is determined to be defective.
Claim 6
Dependent Claim
97 words
A semiconductor wafer configured for wafer-level testing, comprising: a plurality of semiconductor dice, each including at least one die contact and at least one redistribution circuit in electrical communication with said at least one die contact; and at least one bus conductor traversing at least a portion of each of said plurality of semiconductor dice for electrically coupling one of said at least one die contact on one of said plurality of semiconductor dice with another one of said at least one die contact on another one of said plurality of semiconductor dice on said semiconductor wafer.
Claim 7
Dependent Claim
97 words
A semiconductor wafer configured for wafer-level testing, comprising: a plurality of semiconductor dice, each including at least one die contact and at least one redistribution circuit in electrical communication with said at least one die contact; and at least one bus conductor traversing at least a portion of each of said plurality of semiconductor dice for electrically coupling one of said at least one die contact on one of said plurality of semiconductor dice with another one of said at least one die contact on another one of said plurality of semiconductor dice on said semiconductor wafer.
Claim 8
Dependent Claim
31 words
The semiconductor wafer, as recited in claim 5 , further comprising at least one conductor for electrically coupling said at least one redistribution circuit and said at least one bus conductor.
Claim 9
Dependent Claim
37 words
The semiconductor wafer, as recited in claim 6 , further comprising an outer passivation layer on an exposed face of said semiconductor wafer covering said at least one redistribution circuit and said at least one bus conductor.
Claim 10
Dependent Claim
74 words
The semiconductor wafer, as recited in claim 7 , wherein said outer passivation layer is selectively removable to expose at least a portion of at least one of said at least one redistribution circuit and at least one conductor for forming an electrical open circuit between said at least one die contact and said at least one bus conductor when at least one of said plurality of semiconductor dice is determined to be defective.
Claim 11
Dependent Claim
148 words
A semiconductor component configured for wafer-level testing, comprising: a semiconductor die comprising at least one die contact electrically exposed for coupling therewith; at least one redistribution circuit on said semiconductor die in electrical communication with said at least one die contact for coupling said at least one die contact with a respective at least one bumped contact, said at least one bumped contact configured for electrical engagement by contacts of a test interconnect configured to interconnect at least a plurality of dice on a semiconductor wafer; and an outer passivation layer on an exposed face of said at least one redistribution circuit, wherein said outer passivation layer is selectively removable to expose at least a portion of said at least one redistribution circuit for forming an electrical open circuit between said at least one die contact and said at least one bumped contact on a nonfunctional semiconductor die.
Claim 12
Dependent Claim
148 words
A semiconductor component configured for wafer-level testing, comprising: a semiconductor die comprising at least one die contact electrically exposed for coupling therewith; at least one redistribution circuit on said semiconductor die in electrical communication with said at least one die contact for coupling said at least one die contact with a respective at least one bumped contact, said at least one bumped contact configured for electrical engagement by contacts of a test interconnect configured to interconnect at least a plurality of dice on a semiconductor wafer; and an outer passivation layer on an exposed face of said at least one redistribution circuit, wherein said outer passivation layer is selectively removable to expose at least a portion of said at least one redistribution circuit for forming an electrical open circuit between said at least one die contact and said at least one bumped contact on a nonfunctional semiconductor die.
Claim 13
Dependent Claim
34 words
The semiconductor die, as recited in claim 9 , wherein said at least one redistribution circuit is an open-circuited redistribution circuit formed at least partially by an etching process on said nonfunctional semiconductor die.
Claim 14
Dependent Claim
35 words
The semiconductor die, as recited in claim 9 , wherein said at least one redistribution circuit is an open-circuited redistribution circuit formed at least partially by a laser ablation process on said nonfunctional semiconductor die.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-06-01 | 2007-12-01 | 2008-06-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-06-01 | 2011-12-01 | 2012-06-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-06-01 | 2015-12-01 | 2016-06-01 | $7700.00 | Window Closed / Lapsed |