US6690474B1 — Apparatus and methods for surface contour measure…

Claim 1

Independent Claim 203 words

A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of: a) providing two sources of radiation having a spatial distribution of spectral regions; b) illuminating said surface with said radiation from each of said sources to produce a first fringe pattern at a first position on said surface; c) moving said first fringe pattern to a second position; d) generating a first wrapped cycle map in response to said first and second positions of said first fringe pattern; e) estimating fringe numbers in said first fringe pattern; f) changing said first fringe pattern to generate a second fringe pattern at a first position; g) moving said second fringe pattern to a second position; h) generating a second wrapped cycle map in response to said first and second positions of said second fringe pattern; i) estimating fringe numbers in said second fringe pattern in response to said estimated fringe numbers in said first fringe pattern; and j) determining said three-dimensional position information of said point on said surface in response to said estimated fringe numbers in said second fringe pattern and said second wrapped cycle map.

Claim 2

Independent Claim 203 words

A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of: a) providing two sources of radiation having a spatial distribution of spectral regions; b) illuminating said surface with said radiation from each of said sources to produce a first fringe pattern at a first position on said surface; c) moving said first fringe pattern to a second position; d) generating a first wrapped cycle map in response to said first and second positions of said first fringe pattern; e) estimating fringe numbers in said first fringe pattern; f) changing said first fringe pattern to generate a second fringe pattern at a first position; g) moving said second fringe pattern to a second position; h) generating a second wrapped cycle map in response to said first and second positions of said second fringe pattern; i) estimating fringe numbers in said second fringe pattern in response to said estimated fringe numbers in said first fringe pattern; and j) determining said three-dimensional position information of said point on said surface in response to said estimated fringe numbers in said second fringe pattern and said second wrapped cycle map.

Claim 3

Dependent Claim 18 words

The method of claim 1 wherein said two sources of radiation are coherent with respect to one another.

Claim 4

Dependent Claim 18 words

The method of claim 1 wherein said two sources of radiation have a spectral distribution that is narrowband.

Claim 5

Dependent Claim 23 words

The method of claim 1 wherein the step of providing two sources of radiation comprises splitting radiation from a single source of radiation.

Claim 6

Dependent Claim 21 words

The method of claim 1 wherein the step of providing two sources of radiation comprises providing two sources of laser radiation.

Claim 7

Dependent Claim 27 words

The method of claim 1 wherein the steps of estimating fringe numbers in said first fringe pattern and said second fringe pattern comprise applying a mathematical model.

Claim 8

Dependent Claim 28 words

The method of claim 1 wherein the steps of estimating fringe numbers in said first fringe pattern and said second fringe pattern comprise applying a linear estimation model.

Claim 9

Dependent Claim 32 words

The method of claim 1 wherein the steps of estimating fringe numbers in said first fringe pattern and said second fringe pattern comprise applying three-dimensional position information determined for a different surface.

Claim 10

Dependent Claim 42 words

The method of claim 1 wherein each of said spectral regions of one of said sources is separated from a respective spectral region of the other of said sources by a respective distance proportional to the respective wavelength of said spectral regions.

Claim 11

Dependent Claim 18 words

The method of claim 9 wherein said distance is linearly proportional to said wavelength of said spectral regions.

Claim 12

Dependent Claim 32 words

The method of claim 1 wherein said step of changing said first fringe pattern comprises separating each of said spectral regions relative to the other of said spectral regions by a distance.

Claim 13

Dependent Claim 39 words

The method of claim 11 wherein said distance comprises a midpoint equidistant from each of two respective spectral regions and wherein the step of separating each of said spectral regions comprises changing said distance and keeping said midpoint fixed.

Claim 14

Dependent Claim 53 words

The method of claim 1 wherein said step of moving said second fringe pattern comprises the step of changing the phase of a spectral region in said spatial distribution from one of said sources relative to the phase of a respective spectral region in said spatial distribution from the other of said sources.

Claim 15

Independent Claim 188 words

A method for synthesizing a wrapped cycle map corresponding to a fringe pattern of a predetermined spacing on a surface, said method comprising the steps of: a) providing two sources of radiation having a spatial distribution of spectral regions; b) illuminating said surface with said radiation from each of said sources to produce a first fringe pattern at a first position on said surface; c) moving said first fringe pattern to a second position on said surface; d) generating a first wrapped cycle map in response to said first and second positions of said first fringe pattern; e) changing said first fringe pattern to generate a second fringe pattern at a first position; f) moving said second fringe pattern to a second position; g) generating a second wrapped cycle map in response to said first and second positions of said second fringe pattern; h) subtracting said second wrapped cycle map from said first wrapped cycle map; and i) wrapping said difference between said second wrapped cycle map and said first wrapped cycle map to generate a wrapped cycle map corresponding to said fringe pattern of said predetermined spacing.

Claim 16

Independent Claim 188 words

A method for synthesizing a wrapped cycle map corresponding to a fringe pattern of a predetermined spacing on a surface, said method comprising the steps of: a) providing two sources of radiation having a spatial distribution of spectral regions; b) illuminating said surface with said radiation from each of said sources to produce a first fringe pattern at a first position on said surface; c) moving said first fringe pattern to a second position on said surface; d) generating a first wrapped cycle map in response to said first and second positions of said first fringe pattern; e) changing said first fringe pattern to generate a second fringe pattern at a first position; f) moving said second fringe pattern to a second position; g) generating a second wrapped cycle map in response to said first and second positions of said second fringe pattern; h) subtracting said second wrapped cycle map from said first wrapped cycle map; and i) wrapping said difference between said second wrapped cycle map and said first wrapped cycle map to generate a wrapped cycle map corresponding to said fringe pattern of said predetermined spacing.

Claim 17

Dependent Claim 18 words

The method of claim 14 wherein said two sources of radiation are coherent with respect to one another.

Claim 18

Dependent Claim 18 words

The method of claim 14 wherein said two sources of radiation have a spectral distribution that is narrowband.

Claim 19

Dependent Claim 23 words

The method of claim 14 wherein the step of providing two sources of radiation comprises splitting radiation from a single source of radiation.

Claim 20

Dependent Claim 21 words

The method of claim 14 wherein the step of providing two sources of radiation comprises providing two sources of laser radiation.

Claim 21

Dependent Claim 41 words

The method of claim 14 wherein each of said spectral regions of one of said sources is separated from a respective spectral region of the other of said sources by a distance proportional to the respective wavelength of said spectral regions.

Claim 22

Dependent Claim 18 words

The method of claim 19 wherein said distance is linearly proportional to said wavelength of said spectral regions.

Claim 23

Dependent Claim 32 words

The method of claim 14 wherein said step of changing said first fringe pattern comprises separating each of said spectral regions relative to the other of said spectral regions by a distance.

Claim 24

Dependent Claim 39 words

The method of claim 21 wherein said distance comprises a midpoint equidistant from each of two respective spectral regions and wherein the step of separating each of said spectral regions comprises changing said distance and keeping said midpoint fixed.

Claim 25

Dependent Claim 53 words

The method of claim 14 wherein said step of moving said second fringe pattern comprises the step of changing the phase of a spectral region in said spatial distribution from one of said sources relative to the phase of a respective spectral region in said spatial distribution from the other of said sources.

Claim 26

Dependent Claim 40 words

The method of claim 14 wherein said two sources of radiation have a first frequency and wherein said step of changing said first fringe pattern to generate a second fringe pattern comprises changing said first frequency to a second frequency.

Claim 27

Independent Claim 227 words

A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of: a) generating a first and a second beam of radiation, said first and second beams of radiation having a first frequency and being coherent with respect to one another; b) illuminating said surface with said second beam of radiation; c) generating a first interference pattern at a first position in response to said first beam of radiation and radiation from said second beam of radiation scattered by said surface; d) moving said first interference pattern to a second position; e) generating a first wrapped cycle map in response to said first and second positions of said first interference pattern; f) estimating intensity cycles in said first interference pattern; g) changing said first interference pattern to generate a second interference pattern at a first position; h) moving said second interference pattern to a second position; i) generating a second wrapped cycle map in response to said first and second positions of said second interference pattern; j) estimating intensity cycles in said second interference pattern in response to estimated intensity cycles in said first interference pattern; and k) calculating said three-dimensional position information in response to said estimated intensity cycles in said second interference pattern and said second wrapped cycle map.

Claim 28

Independent Claim 227 words

A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of: a) generating a first and a second beam of radiation, said first and second beams of radiation having a first frequency and being coherent with respect to one another; b) illuminating said surface with said second beam of radiation; c) generating a first interference pattern at a first position in response to said first beam of radiation and radiation from said second beam of radiation scattered by said surface; d) moving said first interference pattern to a second position; e) generating a first wrapped cycle map in response to said first and second positions of said first interference pattern; f) estimating intensity cycles in said first interference pattern; g) changing said first interference pattern to generate a second interference pattern at a first position; h) moving said second interference pattern to a second position; i) generating a second wrapped cycle map in response to said first and second positions of said second interference pattern; j) estimating intensity cycles in said second interference pattern in response to estimated intensity cycles in said first interference pattern; and k) calculating said three-dimensional position information in response to said estimated intensity cycles in said second interference pattern and said second wrapped cycle map.

Claim 29

Dependent Claim 29 words

The method of claim 25 wherein said step of changing said first interference pattern to generate a second interference pattern comprises changing said first frequency to a second frequency.

Claim 30

Dependent Claim 17 words

The method of claim 25 further comprising the step of imaging said surface onto an image plane.

Claim 31

Dependent Claim 12 words

The method of claim 27 wherein said image plane comprises a detector.

Claim 32

Independent Claim 244 words

A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of: a) generating a first and a second beam of radiation, said first and second beams of radiation being coherent with respect to one another; b) illuminating said surface with said second beam of radiation; c) generating a first interference pattern in response to said first beam of radiation and radiation from said second beam of radiation scattered by said surface; d) phase shifting one of said first and second beams of radiation with respect to the other of said first and second beams of radiation to generate a first phase shifted interference pattern; e) generating a first wrapped cycle map in response to said first interference pattern and said first phase shifted interference pattern; f) changing said first interference pattern to generate a second interference pattern; g) phase shifting one of said first and second beams of radiation with respect to the other of said first and second beams of radiation to generate a second phase shifted interference pattern; h) generating a second wrapped cycle map in response to said second interference pattern and said second phase shifted interference pattern; i) subtracting said second wrapped cycle map from said first wrapped cycle map; and j) wrapping said difference between said second wrapped cycle map and said first wrapped cycle map to generate a wrapped cycle map.

Claim 33

Independent Claim 244 words

A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of: a) generating a first and a second beam of radiation, said first and second beams of radiation being coherent with respect to one another; b) illuminating said surface with said second beam of radiation; c) generating a first interference pattern in response to said first beam of radiation and radiation from said second beam of radiation scattered by said surface; d) phase shifting one of said first and second beams of radiation with respect to the other of said first and second beams of radiation to generate a first phase shifted interference pattern; e) generating a first wrapped cycle map in response to said first interference pattern and said first phase shifted interference pattern; f) changing said first interference pattern to generate a second interference pattern; g) phase shifting one of said first and second beams of radiation with respect to the other of said first and second beams of radiation to generate a second phase shifted interference pattern; h) generating a second wrapped cycle map in response to said second interference pattern and said second phase shifted interference pattern; i) subtracting said second wrapped cycle map from said first wrapped cycle map; and j) wrapping said difference between said second wrapped cycle map and said first wrapped cycle map to generate a wrapped cycle map.

Claim 34

Dependent Claim 42 words

The method of claim 29 wherein said first and second beams of radiation have a first frequency and wherein said step of changing said first interference pattern to generate a second interference pattern comprises changing said first frequency to a second frequency.

Claim 35

Dependent Claim 21 words

The method of claim 29 further comprising the step of determining said three-dimensional position information by using said wrapped cycle map.

Claim 36

Dependent Claim 17 words

The method of claim 29 further comprising the step of imaging said surface onto an image plane.

Claim 37

Dependent Claim 12 words

The method of claim 32 wherein said image plane comprises a detector.

Claim 38

Independent Claim 176 words

A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of: a) projecting a first cyclical pattern to produce a first projected pattern at a first position on said surface; b) moving said first projected pattern to a second position; c) generating a first wrapped cycle map in response to said first and second positions of said first projected pattern; d) estimating cycle numbers in said first projected pattern; e) changing said first projected pattern to generate a second projected pattern at a first position; f) moving said second projected pattern to a second position; g) generating a second wrapped cycle map in response to said first and second positions of said second projected pattern; h) estimating cycle numbers in said second projected pattern in response to said estimated cycle numbers in said first projected pattern; and i) determining said surface in response to said estimated cycle numbers in said second projected pattern and said second wrapped cycle map.

Claim 39

Independent Claim 176 words

A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of: a) projecting a first cyclical pattern to produce a first projected pattern at a first position on said surface; b) moving said first projected pattern to a second position; c) generating a first wrapped cycle map in response to said first and second positions of said first projected pattern; d) estimating cycle numbers in said first projected pattern; e) changing said first projected pattern to generate a second projected pattern at a first position; f) moving said second projected pattern to a second position; g) generating a second wrapped cycle map in response to said first and second positions of said second projected pattern; h) estimating cycle numbers in said second projected pattern in response to said estimated cycle numbers in said first projected pattern; and i) determining said surface in response to said estimated cycle numbers in said second projected pattern and said second wrapped cycle map.

Claim 40

Dependent Claim 30 words

The method of claim 34 wherein the step of changing said first projected pattern comprises projecting a second cyclical pattern to generate a second projected pattern at a first position.

Claim 41

Independent Claim 171 words

A method for synthesizing a wrapped cycle map corresponding to a projected cyclical pattern of a predetermined spacing on a surface, said method comprising the steps of: a) projecting a first cyclical pattern to produce a first projected pattern at a first position on said surface; b) moving said first projected pattern to a second position on said surface; c) generating a first wrapped cycle map in response to said first and second positions of said first projected pattern; d) changing said first projected pattern to generate a second projected pattern at a first position; e) moving said second projected pattern to a second position; f) generating a second wrapped cycle map in response to said first and second positions of said second projected pattern; g) subtracting said second wrapped cycle map from said first wrapped cycle map; and h) wrapping said difference between said second wrapped cycle map and said first wrapped cycle map to generate a wrapped cycle map corresponding to said projected cyclical pattern of said predetermined spacing.

Claim 42

Independent Claim 171 words

A method for synthesizing a wrapped cycle map corresponding to a projected cyclical pattern of a predetermined spacing on a surface, said method comprising the steps of: a) projecting a first cyclical pattern to produce a first projected pattern at a first position on said surface; b) moving said first projected pattern to a second position on said surface; c) generating a first wrapped cycle map in response to said first and second positions of said first projected pattern; d) changing said first projected pattern to generate a second projected pattern at a first position; e) moving said second projected pattern to a second position; f) generating a second wrapped cycle map in response to said first and second positions of said second projected pattern; g) subtracting said second wrapped cycle map from said first wrapped cycle map; and h) wrapping said difference between said second wrapped cycle map and said first wrapped cycle map to generate a wrapped cycle map corresponding to said projected cyclical pattern of said predetermined spacing.

Claim 43

Dependent Claim 30 words

The method of claim 36 wherein the step of changing said first projected pattern comprises projecting a second cyclical pattern to generate a second projected pattern at a first position.

Claim 44

Independent Claim 127 words

A method for mitigating the effects of speckle on a measurement of a point on a surface of an object, said method comprising the steps of: a) generating a coherent fringe pattern from two sources of radiation separated by a distance; b) projecting the coherent fringe pattern onto the surface of the object; c) detecting the fringe pattern and the speckle in an image of the surface of the object; d) translating the two sources such that the fringe pattern remains substantially stationary and the speckle changes; e) detecting the new fringe pattern and the changed speckle in an image of the surface of the object; and f) determining the fringe pattern substantially without speckle in response to the detected fringe patterns and the change in speckle.

Claim 45

Independent Claim 127 words

A method for mitigating the effects of speckle on a measurement of a point on a surface of an object, said method comprising the steps of: a) generating a coherent fringe pattern from two sources of radiation separated by a distance; b) projecting the coherent fringe pattern onto the surface of the object; c) detecting the fringe pattern and the speckle in an image of the surface of the object; d) translating the two sources such that the fringe pattern remains substantially stationary and the speckle changes; e) detecting the new fringe pattern and the changed speckle in an image of the surface of the object; and f) determining the fringe pattern substantially without speckle in response to the detected fringe patterns and the change in speckle.

Claim 46

Dependent Claim 16 words

The method of claim 38 further comprising the step of iteratively repeating steps d) and e).

Claim 47

Dependent Claim 14 words

The method of claim 38 wherein the two sources of radiation are laser radiation.

Claim 48

Independent Claim 155 words

A method for mitigating the effects of speckle on a measurement of a point on a surface of an object, said method comprising the steps of: a) generating a coherent fringe pattern from two sources of radiation separated by a distance; b) projecting the coherent fringe pattern onto the surface of the object; c) detecting the fringe pattern and the speckle in an image of the surface of the object; d) translating the object laterally with respect to the two sources of radiation along a path parallel to the equiphase plane of the fringe pattern such that the fringe pattern remains substantially stationary with respect to the surface of the object and the speckle changes; e) detecting the new fringe pattern and the changed speckle in an image of the surface of the object; and f) determining the fringe pattern substantially without speckle in response to the detected fringe patterns and the change in speckle.

Claim 49

Independent Claim 155 words

A method for mitigating the effects of speckle on a measurement of a point on a surface of an object, said method comprising the steps of: a) generating a coherent fringe pattern from two sources of radiation separated by a distance; b) projecting the coherent fringe pattern onto the surface of the object; c) detecting the fringe pattern and the speckle in an image of the surface of the object; d) translating the object laterally with respect to the two sources of radiation along a path parallel to the equiphase plane of the fringe pattern such that the fringe pattern remains substantially stationary with respect to the surface of the object and the speckle changes; e) detecting the new fringe pattern and the changed speckle in an image of the surface of the object; and f) determining the fringe pattern substantially without speckle in response to the detected fringe patterns and the change in speckle.

Claim 50

Dependent Claim 16 words

The method of claim 41 further comprising the step of iteratively repeating steps d) and e).

Claim 51

Dependent Claim 14 words

The method of claim 41 wherein the two sources of radiation are laser radiation.

Claim 52

Independent Claim 83 words

A method for mitigating the effects of speckle on a measurement of a point on a surface of an object, said method comprising the steps of: a) projecting a coherent fringe pattern onto the surface of the object; b) providing a lens having a transmission function having a gradual transmission drop off at the lens edge; and c) detecting the fringe pattern in an image of the surface of the object, wherein the transmission function substantially reduces the speckle influence on the measurement.

Claim 53

Independent Claim 83 words

A method for mitigating the effects of speckle on a measurement of a point on a surface of an object, said method comprising the steps of: a) projecting a coherent fringe pattern onto the surface of the object; b) providing a lens having a transmission function having a gradual transmission drop off at the lens edge; and c) detecting the fringe pattern in an image of the surface of the object, wherein the transmission function substantially reduces the speckle influence on the measurement.

Claim 54

Independent Claim 105 words

A method for mitigating the effects of speckle on a measurement of a point on a surface of an object, said method comprising the steps of: a) generating a first fringe pattern from two sources of radiation having a first frequency and separated by a distance; b) changing said first fringe pattern to generate a second fringe pattern by changing said first frequency to a second frequency; and c) changing said distance in response to the difference between said first frequency and said second frequency, wherein the ratio of said distance to the difference between said first frequency and said second frequency is substantially constant.

Claim 55

Independent Claim 105 words

A method for mitigating the effects of speckle on a measurement of a point on a surface of an object, said method comprising the steps of: a) generating a first fringe pattern from two sources of radiation having a first frequency and separated by a distance; b) changing said first fringe pattern to generate a second fringe pattern by changing said first frequency to a second frequency; and c) changing said distance in response to the difference between said first frequency and said second frequency, wherein the ratio of said distance to the difference between said first frequency and said second frequency is substantially constant.

Claim 56

Independent Claim 116 words

A method for projecting fringes onto a surface of object, said method comprising the steps of: a) providing two sources of radiation separated by a distance, each of said sources having a spectral distribution and being coherent with respect to the other of said sources; b) illuminating said point on said surface of said object with said radiation from each of said sources; c) moving one of said sources relative to the other of said sources; d) detecting radiation scattered by said point on said surface of said object; and e) calculating position information in response to said movement of said sources and said detected radiation scattered by said point on said surface of said object.

Claim 57

Independent Claim 116 words

A method for projecting fringes onto a surface of object, said method comprising the steps of: a) providing two sources of radiation separated by a distance, each of said sources having a spectral distribution and being coherent with respect to the other of said sources; b) illuminating said point on said surface of said object with said radiation from each of said sources; c) moving one of said sources relative to the other of said sources; d) detecting radiation scattered by said point on said surface of said object; and e) calculating position information in response to said movement of said sources and said detected radiation scattered by said point on said surface of said object.

Claim 58

Dependent Claim 59 words

The method of claim 46 wherein the step of moving one of said sources relative to the other of said sources comprises changing said distance between a spectral component of one of said sources relative to a respective spectral component of the other of said sources to change said distance between each of said spectral components of said sources.

Claim 59

Dependent Claim 81 words

The method of claim 47 wherein said distance comprises a midpoint equidistant from each of said spectral components of said sources and wherein the step of moving one of said sources relative to the other of said sources comprises changing said distance between a spectral component of one of said sources relative to a respective spectral component of the other of said sources to change said distance between each of said spectral components of said sources and keeping said midpoint fixed.

Claim 60

Dependent Claim 72 words

The method of claim 46 wherein the step of providing two sources of radiation comprises: a) providing an initial beam of radiation having a spectral width; b) generating a first radiation beam at a first beam angle and a second radiation beam at a second beam angle from said initial beam of radiation; and c) imaging said first radiation beam and said second radiation beam to form said two sources of radiation.

Claim 61

Dependent Claim 14 words

The method of claim 49 further comprising amplitude modulating said initial beam of radiation.

Claim 62

Dependent Claim 27 words

The method of claim 49 wherein said generating a first radiation beam and a second radiation beam comprises acousto-optically modulating with an acoustic field said initial beam.

Claim 63

Dependent Claim 20 words

The method of claim 51 wherein said step of acousto-optically modulating comprises the step of phase modulating said acoustic field.

Claim 64

Dependent Claim 20 words

The method of claim 51 wherein said step of acousto-optically modulating comprises the step of amplitude modulating said acoustic field.

Claim 65

Dependent Claim 33 words

The method of claim 46 wherein said step of moving one of said sources relative to the other of said sources comprises acousto-optically modulating said initial beam by frequency modulating an acoustic field.

Claim 66

Independent Claim 110 words

An apparatus for projecting fringes onto a surface of an object, said apparatus comprising: a) two sources of radiation separated by a distance, each of said sources having a spectral distribution and being coherent with respect to the other of said sources; b) control system moving each of said sources relative to the other of said sources; c) a detector positioned to receive radiation scattered from said point on said surface of said object; and d) a processor receiving signals from said detector, said processor calculating position information in response to said movement of said sources and said received radiation scattered from said point on said surface of said object.

Claim 67

Independent Claim 110 words

An apparatus for projecting fringes onto a surface of an object, said apparatus comprising: a) two sources of radiation separated by a distance, each of said sources having a spectral distribution and being coherent with respect to the other of said sources; b) control system moving each of said sources relative to the other of said sources; c) a detector positioned to receive radiation scattered from said point on said surface of said object; and d) a processor receiving signals from said detector, said processor calculating position information in response to said movement of said sources and said received radiation scattered from said point on said surface of said object.

Claim 68

Dependent Claim 52 words

The apparatus of claim 55 wherein said control system moves each of a spectral component of one of said sources of radiation relative to a respective spectral component of the other of said sources of radiation to change said distance between each of said spectral components of said two sources of radiations.

Claim 69

Dependent Claim 54 words

The apparatus of claim 56 wherein said distance comprises a midpoint equidistant from each of said spectral components of said sources and said control system moves each of said spectral components of said sources relative to the other of said spectral components of said sources to change said distance and keep said midpoint fixed.

Claim 70

Dependent Claim 48 words

The apparatus of claim 55 wherein said detector comprises a plurality of photodetectors and wherein said processor comprises a multiprocessor system having a plurality of processing units and each of said plurality of photodetectors is in electrical communication with a respective one of said plurality of processing units.

Claim 71

Dependent Claim 92 words

The apparatus of claim 55 wherein said two sources of radiation comprise: a) an initial source of a beam of radiation having a spectral width; b) a beam separator in optical communication with said initial source of a beam of radiation, said beam separator generating a first optical beam and a second optical beam; and c) an imaging system in optical communication with said beam separator, said imaging system generating said two sources of radiation each respective source of radiation corresponding to said first optical beam and said second optical beam, respectively.

Claim 72

Dependent Claim 13 words

The apparatus of claim 59 wherein said beam separator is a diffraction grating.

Claim 73

Dependent Claim 49 words

The apparatus of claim 55 wherein a point at a wavelength in said spectral distribution of one source is separated from a respective point at said wavelength in said spectral distribution of the other source by said distance, said distance being substantially proportional to said wavelength of said points.

Claim 74

Dependent Claim 14 words

The apparatus of claim 55 wherein said control system further comprises a phase shifter.

Claim 75

Dependent Claim 26 words

The apparatus of claim 62 wherein said phase shifter is a translator for changing the position of said beam separator relative to said beam of radiation.

Claim 76

Dependent Claim 36 words

The apparatus of claim 55 wherein said control system comprises a zoom lens having a variable focal length, said zoom lens varying said distance of separation in response to a change in said variable focal length.

Claim 77

Dependent Claim 35 words

The apparatus of claim 55 wherein said control system comprises a plurality of lenses of different focal length, said distance of separation corresponding to a respective focal length of one of said plurality of lenses.

Claim 78

Dependent Claim 14 words

The apparatus of claim 60 wherein said diffraction grating is a spatial light modulator.

Claim 79

Dependent Claim 30 words

The apparatus of claim 66 wherein said spatial light modulator has an adjustable grating period, said grating period being responsive to an electrical signal applied to said spatial light modulator.

Claim 80

Dependent Claim 13 words

The apparatus of claim 59 wherein said beam separator is an acousto-optic modulator.

Claim 81

Dependent Claim 22 words

The apparatus of claim 59 further comprising an amplitude modulator in optical communication with said initial source of a beam of radiation.

Claim 82

Dependent Claim 10 words

The apparatus of claim 59 further comprising an order-blocking mask.

Claim 83

Dependent Claim 13 words

The apparatus of claim 70 wherein the order-blocking mask is a double-slit mask.

Claim 84

Dependent Claim 27 words

The apparatus of claim 59 further comprising an amplitude modulator in optical communication with said beam separator, said amplitude modulator modulating the amplitude of said initial source.

Claim 85

Independent Claim 134 words

A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of: a) providing two sources of radiation, each of said two sources of radiation having a spectral distribution and being coherent with respect to the other of said two sources; b) providing a detector at said point on said surface; c) illuminating said point on said surface of said object with said radiation from each of said sources; d) moving each of said sources relative to each other; e) detecting said radiation at said point on said surface of said object; and f) calculating position information in response to said movement of said sources and said radiation detected at said point on said surface of said object.

Claim 86

Independent Claim 134 words

A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of: a) providing two sources of radiation, each of said two sources of radiation having a spectral distribution and being coherent with respect to the other of said two sources; b) providing a detector at said point on said surface; c) illuminating said point on said surface of said object with said radiation from each of said sources; d) moving each of said sources relative to each other; e) detecting said radiation at said point on said surface of said object; and f) calculating position information in response to said movement of said sources and said radiation detected at said point on said surface of said object.

Claim 87

Dependent Claim 18 words

The method of claim 73 wherein said two sources of radiation have a spectral distribution that is narrowband.

Claim 88

Dependent Claim 62 words

The method of claim 73 further comprising the step of changing the phase of a spectral component in said spectral distribution of said radiation from one of said sources relative to the phase of a respective spectral component in said spectral distribution of said radiation from the other of said sources as measured at said point on said surface of said object.

Claim 89

Dependent Claim 15 words

The method of claim 73 wherein said sources of radiation are virtual sources of radiation.

Claim 90

Dependent Claim 52 words

The method of claim 73 wherein the step of moving each of said sources comprises changing the distance between a spectral component of one of said sources relative to a respective spectral component of the other of said sources to change the distance between each of said spectral components of said sources.

Claim 91

Dependent Claim 74 words

The method of claim 77 wherein said distance comprises a midpoint equidistant from each of said spectral components of said sources and wherein the step of moving each of said sources comprises changing said distance between a spectral component of one of said sources relative to a respective spectral component of the other of said sources to change said distance between each of said spectral components of said sources and keeping said midpoint fixed.

Claim 92

Independent Claim 128 words

An apparatus for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said apparatus comprising: a) two sources of radiation, each of said sources having a spectral distribution and being coherent with respect to one another; b) a control system moving each of said sources relative to each other; c) a detector positioned at said point on said surface of said object to receive radiation illuminating said point on said surface of said object; and d) a processor receiving signals from said detector, said processor calculating position information of said point on said surface of said object in response to said movement of said sources and said radiation received at said point on said surface of said object.

Claim 93

Independent Claim 128 words

An apparatus for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said apparatus comprising: a) two sources of radiation, each of said sources having a spectral distribution and being coherent with respect to one another; b) a control system moving each of said sources relative to each other; c) a detector positioned at said point on said surface of said object to receive radiation illuminating said point on said surface of said object; and d) a processor receiving signals from said detector, said processor calculating position information of said point on said surface of said object in response to said movement of said sources and said radiation received at said point on said surface of said object.

Claim 94

Dependent Claim 18 words

The apparatus of claim 79 wherein said two sources of radiation have a spectral distribution that is narrowband.

Claim 95

Dependent Claim 61 words

The apparatus of claim 79 wherein said control system changes the phase of a spectral component in said spectral distribution of said radiation from one of said sources relative to the phase of a respective spectral component in said spectral distribution of said radiation from the other of said sources as measured at said point on said surface of said object.

Claim 96

Dependent Claim 15 words

The apparatus of claim 79 wherein said sources of radiation are virtual sources of radiation.

Claim 97

Dependent Claim 52 words

The apparatus of claim 79 wherein said control system moves each of a spectral component of one of said sources of radiation relative to a respective spectral component of the other of said sources of radiation to change said distance between each of said spectral components of said two sources of radiation.

Claim 98

Dependent Claim 54 words

The apparatus of claim 83 wherein said distance comprises a midpoint equidistant from each of said spectral components of said sources and said control system moves each of said spectral components of said sources relative to the other of said spectral components of said sources to change said distance and keep said midpoint fixed.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2007-02-09	2007-08-11	2008-02-10	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2011-02-09	2011-08-11	2012-02-10	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2015-02-09	2015-08-11	2016-02-10	$7700.00	Window Closed / Lapsed

Apparatus and methods for surface contour measurement

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